DE69014029D1 - Apochromatisches Linsensystem. - Google Patents

Apochromatisches Linsensystem.

Info

Publication number
DE69014029D1
DE69014029D1 DE69014029T DE69014029T DE69014029D1 DE 69014029 D1 DE69014029 D1 DE 69014029D1 DE 69014029 T DE69014029 T DE 69014029T DE 69014029 T DE69014029 T DE 69014029T DE 69014029 D1 DE69014029 D1 DE 69014029D1
Authority
DE
Germany
Prior art keywords
lens system
apochromatic lens
apochromatic
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69014029T
Other languages
English (en)
Other versions
DE69014029T2 (de
Inventor
Yoshikazu Kataoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Application granted granted Critical
Publication of DE69014029D1 publication Critical patent/DE69014029D1/de
Publication of DE69014029T2 publication Critical patent/DE69014029T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70241—Optical aspects of refractive lens systems, i.e. comprising only refractive elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
DE69014029T 1989-09-08 1990-09-07 Apochromatisches Linsensystem. Expired - Fee Related DE69014029T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1234474A JPH0823627B2 (ja) 1989-09-08 1989-09-08 色消しレンズ系

Publications (2)

Publication Number Publication Date
DE69014029D1 true DE69014029D1 (de) 1994-12-15
DE69014029T2 DE69014029T2 (de) 1995-03-23

Family

ID=16971582

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69014029T Expired - Fee Related DE69014029T2 (de) 1989-09-08 1990-09-07 Apochromatisches Linsensystem.

Country Status (4)

Country Link
US (1) US5103342A (de)
EP (1) EP0416651B1 (de)
JP (1) JPH0823627B2 (de)
DE (1) DE69014029T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5272236A (en) * 1991-10-15 1993-12-21 The Dow Chemical Company Elastic substantially linear olefin polymers
US5172275A (en) * 1990-12-14 1992-12-15 Eastman Kodak Company Apochromatic relay lens systems suitable for use in a high definition telecine apparatus
US5274503A (en) * 1991-08-23 1993-12-28 Eastman Kodak Company High aperture finite conjugate lens system suitable for use as a micro relay lens
US5525695A (en) * 1991-10-15 1996-06-11 The Dow Chemical Company Elastic linear interpolymers
US5257136A (en) * 1991-12-23 1993-10-26 International Business Machines Corporation Reverse telephoto agron objective lens
US5568325A (en) * 1993-08-25 1996-10-22 Asahi Kogaku Kogyo Kabushiki Kaisha Achromatic lens system
US5991099A (en) * 1998-02-23 1999-11-23 The United States Of America As Represented By The Secretary Of The Air Force Adjustable chromatic correction lens
DE10040998A1 (de) * 2000-08-22 2002-03-14 Zeiss Carl Projektionsbelichtungsanlage
US8867140B2 (en) 2011-08-22 2014-10-21 Bae Systems Information And Electronic Systems Integration Inc. Low distortion athermalized imaging lens
CN105531615A (zh) * 2013-07-12 2016-04-27 日东光学株式会社 制造光学系统的方法、光学系统以及投影仪
CN104991423B (zh) * 2013-09-16 2017-04-12 中国科学院上海光学精密机械研究所 用于印刷电路板光刻领域ldi光刻设备的光刻方法
DE102017207582A1 (de) 2017-05-05 2018-11-08 Carl Zeiss Smt Gmbh Projektionsobjektiv, Projektionsbelichtungsanlage und Projektionsbelichtungsverfahren
CN109975950B (zh) * 2017-12-27 2021-06-04 宁波舜宇车载光学技术有限公司 光学镜头
CN112099199B (zh) * 2020-11-02 2021-02-02 瑞泰光学(常州)有限公司 摄像光学镜头
CN113946028B (zh) * 2021-12-20 2022-05-24 江西联创电子有限公司 投影镜头及投影装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3035488A (en) * 1956-11-29 1962-05-22 Twentieth Cent Fox Film Corp Apparatus for compensating for residual chromatic aberration
US3495895A (en) * 1966-09-01 1970-02-17 Rodenstock Optik G Apochromatic,symmetrical,wide-angle objective lens system
US3540795A (en) * 1969-01-15 1970-11-17 Ibm Achromatic compensation apparatus using polarization rotation and birefringent elements
USRE29856E (en) * 1971-11-24 1978-12-05 Canon Kabushiki Kaisha Projection lens for mask pattern printing
JPS50145225A (de) * 1974-05-13 1975-11-21
JPS5168242A (de) * 1974-12-10 1976-06-12 Olympus Optical Co
GB1582844A (en) * 1976-11-06 1981-01-14 Elliott Brothers London Ltd Optical systems
LU79603A1 (fr) * 1978-05-05 1979-12-06 Angenieux P Ets Dispositif pour le reglage de la valeur des aberrations de chromatismo d'un systeme optique et procede comportant l'application d'un tel dispositif pour le reglage de cameras de television en couleur en utilisant un diascope
JPS5826261B2 (ja) * 1978-07-11 1983-06-01 新日本製鐵株式会社 電気機器巻線の緩み検出方法
JPS63186206A (ja) * 1987-01-29 1988-08-01 Ricoh Co Ltd 複写機用レンズ
US4861983A (en) * 1987-04-27 1989-08-29 Dainippon Screen Mfg. Co., Ltd. Optical system for flying-spot scanning system

Also Published As

Publication number Publication date
DE69014029T2 (de) 1995-03-23
JPH0396912A (ja) 1991-04-22
JPH0823627B2 (ja) 1996-03-06
US5103342A (en) 1992-04-07
EP0416651B1 (de) 1994-11-09
EP0416651A3 (en) 1992-02-26
EP0416651A2 (de) 1991-03-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee