DE3776467D1 - Fokusdetektor. - Google Patents

Fokusdetektor.

Info

Publication number
DE3776467D1
DE3776467D1 DE8787307745T DE3776467T DE3776467D1 DE 3776467 D1 DE3776467 D1 DE 3776467D1 DE 8787307745 T DE8787307745 T DE 8787307745T DE 3776467 T DE3776467 T DE 3776467T DE 3776467 D1 DE3776467 D1 DE 3776467D1
Authority
DE
Germany
Prior art keywords
focus detector
focus
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787307745T
Other languages
English (en)
Inventor
Hiroshi Matsui
Osamu Koyama
Hideaki Yano
Yasuo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Canon Electronics Inc
Original Assignee
Canon Inc
Canon Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc, Canon Electronics Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE3776467D1 publication Critical patent/DE3776467D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1381Non-lens elements for altering the properties of the beam, e.g. knife edges, slits, filters or stops
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10Beam splitting or combining systems
    • G02B27/16Beam splitting or combining systems used as aids for focusing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/09Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B7/0908Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for focusing only
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/09Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B7/0908Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for focusing only
    • G11B7/0916Foucault or knife-edge methods

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Recording Or Reproduction (AREA)
  • Automatic Focus Adjustment (AREA)
DE8787307745T 1986-09-05 1987-09-02 Fokusdetektor. Expired - Lifetime DE3776467D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61210031A JPH0734264B2 (ja) 1986-09-05 1986-09-05 光学式情報記録再生装置

Publications (1)

Publication Number Publication Date
DE3776467D1 true DE3776467D1 (de) 1992-03-12

Family

ID=16582663

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787307745T Expired - Lifetime DE3776467D1 (de) 1986-09-05 1987-09-02 Fokusdetektor.

Country Status (3)

Country Link
EP (1) EP0259148B1 (de)
JP (1) JPH0734264B2 (de)
DE (1) DE3776467D1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69014439T2 (de) * 1989-06-28 1995-04-06 Dainippon Screen Mfg Verschiebungsdetektionssystem.
GB2248989B (en) * 1990-10-15 1995-05-24 Applied Magnetics Corp Focus sensing apparatus and method
US5245174A (en) * 1990-10-15 1993-09-14 Applied Magnetics Corporation Focus sensing apparatus utilizing a reflecting surface having variable reflectivity
JP2001307348A (ja) * 2000-04-20 2001-11-02 Seiko Instruments Inc 近視野光ヘッド
DE10300843A1 (de) * 2003-01-10 2004-07-22 Deutsche Thomson-Brandt Gmbh Gerät zum Lesen und/oder Beschreiben optischer Aufzeichnungsträger
CN103018733B (zh) * 2012-12-18 2014-06-18 山东省科学院海洋仪器仪表研究所 一种天文望远镜焦点定位装置
CN104198163B (zh) * 2014-09-19 2017-01-18 南京信息工程大学 望远镜焦点精确定位的装置
US9885656B2 (en) * 2014-12-17 2018-02-06 Kla-Tencor Corporation Line scan knife edge height sensor for semiconductor inspection and metrology

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2325953A1 (fr) * 1975-09-29 1977-04-22 Thomson Brandt Senseur optique de focalisation et dispositif de focalisation comportant un tel senseur
NL8104588A (nl) * 1981-10-08 1983-05-02 Philips Nv Bundelscheidingsprisma, werkwijze voor het vervaardigen van dit prisma en van dit prisma voorziene optische lees- en/of schrijfeenheid.
NL8202058A (nl) * 1982-05-19 1983-12-16 Philips Nv Opto-elektronisch fokusfout-detektiestelsel.
JPS61168135A (ja) * 1985-01-18 1986-07-29 Seiko Instr & Electronics Ltd 光情報検出装置

Also Published As

Publication number Publication date
EP0259148A3 (en) 1988-11-30
EP0259148A2 (de) 1988-03-09
JPH0734264B2 (ja) 1995-04-12
JPS6364636A (ja) 1988-03-23
EP0259148B1 (de) 1992-01-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee