DE69016317T2 - Einkristallziehungsapparat. - Google Patents

Einkristallziehungsapparat.

Info

Publication number
DE69016317T2
DE69016317T2 DE1990616317 DE69016317T DE69016317T2 DE 69016317 T2 DE69016317 T2 DE 69016317T2 DE 1990616317 DE1990616317 DE 1990616317 DE 69016317 T DE69016317 T DE 69016317T DE 69016317 T2 DE69016317 T2 DE 69016317T2
Authority
DE
Germany
Prior art keywords
single crystal
crystal pulling
pulling apparatus
pulling
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1990616317
Other languages
English (en)
Other versions
DE69016317D1 (de
Inventor
Koji Mizuishi
Michiaki Oda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Application granted granted Critical
Publication of DE69016317D1 publication Critical patent/DE69016317D1/de
Publication of DE69016317T2 publication Critical patent/DE69016317T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE1990616317 1989-08-29 1990-08-29 Einkristallziehungsapparat. Expired - Fee Related DE69016317T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9982289U JPH06456Y2 (ja) 1989-08-29 1989-08-29 単結晶引上装置のシール構造

Publications (2)

Publication Number Publication Date
DE69016317D1 DE69016317D1 (de) 1995-03-09
DE69016317T2 true DE69016317T2 (de) 1995-08-03

Family

ID=14257524

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1990616317 Expired - Fee Related DE69016317T2 (de) 1989-08-29 1990-08-29 Einkristallziehungsapparat.

Country Status (3)

Country Link
EP (1) EP0416799B1 (de)
JP (1) JPH06456Y2 (de)
DE (1) DE69016317T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102400232A (zh) * 2011-11-15 2012-04-04 镇江环太硅科技有限公司 一种单晶硅生长炉用石墨/炭毡复合电极
CN103334153B (zh) * 2013-06-26 2015-07-15 英利能源（中国）有限公司 一种单晶炉
CN107513759B (zh) * 2016-06-15 2019-11-19 上海新昇半导体科技有限公司 一种单晶硅生长炉

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3679370A (en) * 1970-07-31 1972-07-25 Western Electric Co Crystal grower with expandable chamber
US3953281A (en) * 1974-06-27 1976-04-27 International Business Machines Corporation Method and system for growing monocrystalline ingots

Also Published As

Publication number Publication date
EP0416799A2 (de) 1991-03-13
EP0416799A3 (en) 1991-07-17
JPH0341862U (de) 1991-04-22
JPH06456Y2 (ja) 1994-01-05
EP0416799B1 (de) 1995-01-25
DE69016317D1 (de) 1995-03-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee