DE69004525D1 - Rückschlagsicherheitsvorrichtung. - Google Patents

Rückschlagsicherheitsvorrichtung.

Info

Publication number
DE69004525D1
DE69004525D1 DE90116378T DE69004525T DE69004525D1 DE 69004525 D1 DE69004525 D1 DE 69004525D1 DE 90116378 T DE90116378 T DE 90116378T DE 69004525 T DE69004525 T DE 69004525T DE 69004525 D1 DE69004525 D1 DE 69004525D1
Authority
DE
Germany
Prior art keywords
inlet
pump
valve
common outlet
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE90116378T
Other languages
English (en)
Other versions
DE69004525T2 (de
Inventor
Luc Mathieu
Jean-Marc Paquet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Application granted granted Critical
Publication of DE69004525D1 publication Critical patent/DE69004525D1/de
Publication of DE69004525T2 publication Critical patent/DE69004525T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28Safety arrangements; Monitoring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B11/00Equalisation of pulses, e.g. by use of air vessels; Counteracting cavitation
    • F04B11/0008Equalisation of pulses, e.g. by use of air vessels; Counteracting cavitation using accumulators
    • F04B11/0016Equalisation of pulses, e.g. by use of air vessels; Counteracting cavitation using accumulators with a fluid spring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/10Other safety measures
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/02Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with tubular diaphragm
    • F16K7/04Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with tubular diaphragm constrictable by external radial force
    • F16K7/07Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with tubular diaphragm constrictable by external radial force by means of fluid pressure
    • F16K7/075Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with tubular diaphragm constrictable by external radial force by means of fluid pressure a rigid body being located within the tubular diaphragm
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00Control; Monitoring or safety arrangements
    • F04C2270/70Safety, emergency conditions or requirements
    • F04C2270/72Safety, emergency conditions or requirements preventing reverse rotation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05BINDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2270/00Control
    • F05B2270/10Purpose of the control system
    • F05B2270/109Purpose of the control system to prolong engine life
    • F05B2270/1097Purpose of the control system to prolong engine life by preventing reverse rotation
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/7722Line condition change responsive valves
    • Y10T137/7758Pilot or servo controlled
    • Y10T137/7762Fluid pressure type

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Details Of Valves (AREA)
  • Pipe Accessories (AREA)
  • Pens And Brushes (AREA)
  • Surgical Instruments (AREA)
  • Discharge Heating (AREA)
  • Compressor (AREA)
  • Fluid-Driven Valves (AREA)
  • Arc Welding In General (AREA)
  • Alarm Systems (AREA)
  • Forging (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • External Artificial Organs (AREA)
  • Slot Machines And Peripheral Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE90116378T 1989-09-01 1990-08-27 Rückschlagsicherheitsvorrichtung. Expired - Fee Related DE69004525T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8911486A FR2651552B1 (fr) 1989-09-01 1989-09-01 Vanne et dispositifs utilisant ladite vanne.

Publications (2)

Publication Number Publication Date
DE69004525D1 true DE69004525D1 (de) 1993-12-16
DE69004525T2 DE69004525T2 (de) 1994-03-03

Family

ID=9385070

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69006982T Expired - Fee Related DE69006982T2 (de) 1989-09-01 1990-08-27 Ventil und mit diesem Ventil ausgerüstete Vorrichtung.
DE90116378T Expired - Fee Related DE69004525T2 (de) 1989-09-01 1990-08-27 Rückschlagsicherheitsvorrichtung.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69006982T Expired - Fee Related DE69006982T2 (de) 1989-09-01 1990-08-27 Ventil und mit diesem Ventil ausgerüstete Vorrichtung.

Country Status (7)

Country Link
US (2) US5049042A (de)
EP (2) EP0415311B1 (de)
JP (2) JPH0392684A (de)
AT (2) ATE97196T1 (de)
DE (2) DE69006982T2 (de)
ES (2) ES2050899T3 (de)
FR (1) FR2651552B1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5167491A (en) * 1991-09-23 1992-12-01 Carrier Corporation High to low side bypass to prevent reverse rotation
US5478537A (en) * 1992-09-24 1995-12-26 Sunburst Chemicals, Inc. Detergent dispenser for use with solid casting detergent
FR2703338B1 (fr) * 1993-03-30 1995-05-12 Atochem Elf Sa Dispositif d'inertage d'un stockeur.
US5957152A (en) * 1996-09-24 1999-09-28 Hydro Systems Company Select valve purge
US6737028B1 (en) 1999-06-02 2004-05-18 Sunburst Chemicals, Inc. Solid cast container
GB0208840D0 (en) * 2002-04-18 2002-05-29 Novamedix Distrib Ltd Fluid control valve
DE102004043922B4 (de) * 2004-09-10 2006-11-16 Kvt Gmbh Ventil
CN100439774C (zh) * 2007-01-26 2008-12-03 清华大学 一种气动式截断阀
ITBO20130680A1 (it) * 2013-12-06 2015-06-07 Tera Automation S R L Valvola di ritegno per un tunnel di passaggio di elementi solidi
ITBO20130679A1 (it) * 2013-12-06 2015-06-07 Tera Automation S R L Macchina, e relativo metodo, per la produzione di lingotti metallici in continuo
US9718082B2 (en) * 2014-01-26 2017-08-01 Tokyo Electron Limited Inline dispense capacitor
US10403501B2 (en) 2016-08-11 2019-09-03 Tokyo Electron Limited High-purity dispense system
KR102545444B1 (ko) 2016-08-11 2023-06-19 도쿄엘렉트론가부시키가이샤 메니스커스 제어에 의한 고정밀 분배 시스템
TWI760354B (zh) 2016-08-11 2022-04-11 日商東京威力科創股份有限公司 高純度分配單元
CN107575601B (zh) * 2017-08-23 2024-03-19 上海泽宁环保科技有限公司 一种负压源动力真空阀芯、密封装置及界面阀

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2124390A (en) * 1935-05-07 1938-07-19 Gen Electric Vacuum pump apparatus
FR1595857A (de) * 1968-11-29 1970-06-15
US3838704A (en) * 1971-11-01 1974-10-01 D Johnson Method of assembling an axial flow valve
US4138087A (en) * 1976-06-18 1979-02-06 Rockwell International Corporation Axial flow throttling valve
US4135550A (en) * 1977-03-11 1979-01-23 Trelleborg Rubber Company, Inc. Pinch valve control circuit
GB2054041A (en) * 1979-02-08 1981-02-11 Johal K S Surge Suppression Device
FR2458013A1 (fr) * 1979-05-28 1980-12-26 Gibert Rene Vanne a manchon deformable
DE3247325C2 (de) * 1982-12-21 1990-02-15 Grünbeck Wasseraufbereitung GmbH, 8884 Höchstädt Rohrtrenner
US4645174A (en) * 1985-05-16 1987-02-24 American Meter Company Mounting arrangement for a critical flow device

Also Published As

Publication number Publication date
DE69006982T2 (de) 1994-06-09
DE69004525T2 (de) 1994-03-03
JPH0355677B2 (de) 1991-08-26
EP0415311A2 (de) 1991-03-06
FR2651552A1 (fr) 1991-03-08
US5048559A (en) 1991-09-17
EP0415317A3 (en) 1991-10-09
US5049042A (en) 1991-09-17
FR2651552B1 (fr) 1991-12-06
ES2046629T3 (es) 1994-02-01
JPH0392684A (ja) 1991-04-17
EP0415317B1 (de) 1993-11-10
ATE97196T1 (de) 1993-11-15
JPH0392588A (ja) 1991-04-17
EP0415317A2 (de) 1991-03-06
DE69006982D1 (de) 1994-04-07
EP0415311A3 (en) 1991-10-02
ATE102316T1 (de) 1994-03-15
ES2050899T3 (es) 1994-06-01
EP0415311B1 (de) 1994-03-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee