DE68928486T2 - Laser und eine damit gekoppelte optische Schicht aus Ta2O5 - Google Patents

Laser und eine damit gekoppelte optische Schicht aus Ta2O5

Info

Publication number
DE68928486T2
DE68928486T2 DE68928486T DE68928486T DE68928486T2 DE 68928486 T2 DE68928486 T2 DE 68928486T2 DE 68928486 T DE68928486 T DE 68928486T DE 68928486 T DE68928486 T DE 68928486T DE 68928486 T2 DE68928486 T2 DE 68928486T2
Authority
DE
Germany
Prior art keywords
ta2o5
laser
optical layer
layer made
coupled optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68928486T
Other languages
English (en)
Other versions
DE68928486D1 (de
Inventor
Eduard Dr Kuegler
Roland Pfefferkorn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of DE68928486D1 publication Critical patent/DE68928486D1/de
Application granted granted Critical
Publication of DE68928486T2 publication Critical patent/DE68928486T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/46—Sputtering by ion beam produced by an external ion source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Optical Filters (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Optical Integrated Circuits (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Laminated Bodies (AREA)
  • Optical Head (AREA)
  • Optical Elements Other Than Lenses (AREA)
DE68928486T 1989-01-23 1989-12-29 Laser und eine damit gekoppelte optische Schicht aus Ta2O5 Expired - Fee Related DE68928486T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29976189A 1989-01-23 1989-01-23
US43769789A 1989-11-15 1989-11-15

Publications (2)

Publication Number Publication Date
DE68928486D1 DE68928486D1 (de) 1998-01-22
DE68928486T2 true DE68928486T2 (de) 1998-04-02

Family

ID=26971391

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68928486T Expired - Fee Related DE68928486T2 (de) 1989-01-23 1989-12-29 Laser und eine damit gekoppelte optische Schicht aus Ta2O5

Country Status (4)

Country Link
EP (1) EP0379738B1 (de)
JP (2) JP3253065B2 (de)
AT (1) ATE161108T1 (de)
DE (1) DE68928486T2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5457570A (en) * 1993-05-25 1995-10-10 Litton Systems, Inc. Ultraviolet resistive antireflective coating of Ta2 O5 doped with Al2 O3 and method of fabrication
US5513039A (en) * 1993-05-26 1996-04-30 Litton Systems, Inc. Ultraviolet resistive coated mirror and method of fabrication

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1416097A (en) * 1973-05-30 1975-12-03 Communications Satellite Corp Solar cell with tantalum pentoxide anti-reflective coating
GB2002581B (en) * 1977-08-11 1982-07-14 Optical Coating Laboratory Inc Silicon solar cell and 350 nanometer cut-on filter for use therein
DE3009533C2 (de) * 1980-03-12 1986-11-06 D. Swarovski & Co., Wattens, Tirol Belag mit mittlerem Brechwert, Verfahren zu dessen Herstellung und Verwendung des Belages

Also Published As

Publication number Publication date
ATE161108T1 (de) 1997-12-15
JP3523224B2 (ja) 2004-04-26
EP0379738B1 (de) 1997-12-10
JP3253065B2 (ja) 2002-02-04
JP2002139620A (ja) 2002-05-17
JPH02275904A (ja) 1990-11-09
EP0379738A2 (de) 1990-08-01
DE68928486D1 (de) 1998-01-22
EP0379738A3 (de) 1991-10-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: GROSSE, BOCKHORNI, SCHUMACHER, 81476 MUENCHEN

8339 Ceased/non-payment of the annual fee