DE68917310D1 - Delta-phi-Mikrolinse für Teilchenstrahlen niedriger Energie. - Google Patents
Delta-phi-Mikrolinse für Teilchenstrahlen niedriger Energie.Info
- Publication number
- DE68917310D1 DE68917310D1 DE68917310T DE68917310T DE68917310D1 DE 68917310 D1 DE68917310 D1 DE 68917310D1 DE 68917310 T DE68917310 T DE 68917310T DE 68917310 T DE68917310 T DE 68917310T DE 68917310 D1 DE68917310 D1 DE 68917310D1
- Authority
- DE
- Germany
- Prior art keywords
- microlens
- phi
- delta
- low energy
- particle beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/12—Lenses electrostatic
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP89810951A EP0432337B1 (de) | 1989-12-13 | 1989-12-13 | Delta-phi-Mikrolinse für Teilchenstrahlen niedriger Energie |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68917310D1 true DE68917310D1 (de) | 1994-09-08 |
DE68917310T2 DE68917310T2 (de) | 1995-03-09 |
Family
ID=8203192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68917310T Expired - Fee Related DE68917310T2 (de) | 1989-12-13 | 1989-12-13 | Delta-phi-Mikrolinse für Teilchenstrahlen niedriger Energie. |
Country Status (4)
Country | Link |
---|---|
US (1) | US5059804A (de) |
EP (1) | EP0432337B1 (de) |
JP (1) | JPH063717B2 (de) |
DE (1) | DE68917310T2 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0536369A (ja) * | 1990-09-25 | 1993-02-12 | Canon Inc | 電子ビーム装置及びその駆動方法 |
DE69506375T2 (de) * | 1994-10-03 | 1999-06-17 | Koninkl Philips Electronics Nv | Partikel-optisches gerät mit einer elektronenquelle versehen die eine nadel und eine membranartige extraktionselektrode aufweist |
US7345290B2 (en) * | 1999-10-07 | 2008-03-18 | Agere Systems Inc | Lens array for electron beam lithography tool |
US20110200844A1 (en) * | 2010-02-17 | 2011-08-18 | Frito-Lay North America, Inc. | Composition for facilitating environmental degradation of a film |
US9040120B2 (en) | 2011-08-05 | 2015-05-26 | Frito-Lay North America, Inc. | Inorganic nanocoating primed organic film |
US20130101831A1 (en) * | 2011-10-20 | 2013-04-25 | Frito-Lay North America, Inc. | Metallized paper packaging film and process for its production |
US9267011B2 (en) | 2012-03-20 | 2016-02-23 | Frito-Lay North America, Inc. | Composition and method for making a cavitated bio-based film |
US9162421B2 (en) | 2012-04-25 | 2015-10-20 | Frito-Lay North America, Inc. | Film with compostable heat seal layer |
AU2013278072B2 (en) | 2012-06-23 | 2016-03-17 | Frito-Lay North America, Inc. | Deposition of ultra-thin inorganic oxide coatings on packaging |
US9149980B2 (en) | 2012-08-02 | 2015-10-06 | Frito-Lay North America, Inc. | Ultrasonic sealing of packages |
US9090021B2 (en) | 2012-08-02 | 2015-07-28 | Frito-Lay North America, Inc. | Ultrasonic sealing of packages |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ATE91822T1 (de) * | 1986-04-24 | 1993-08-15 | Integrated Circuit Testing | Elektrostatisch-magnetische-linse fuer korpuskularstrahlgeraete. |
DE3887891T2 (de) * | 1988-11-01 | 1994-08-11 | Ibm | Niederspannungsquelle für schmale Elektronen-/Ionenstrahlenbündel. |
-
1989
- 1989-12-13 DE DE68917310T patent/DE68917310T2/de not_active Expired - Fee Related
- 1989-12-13 EP EP89810951A patent/EP0432337B1/de not_active Expired - Lifetime
-
1990
- 1990-10-31 US US07/607,175 patent/US5059804A/en not_active Expired - Fee Related
- 1990-11-20 JP JP2313005A patent/JPH063717B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0432337A1 (de) | 1991-06-19 |
JPH03194837A (ja) | 1991-08-26 |
DE68917310T2 (de) | 1995-03-09 |
EP0432337B1 (de) | 1994-08-03 |
US5059804A (en) | 1991-10-22 |
JPH063717B2 (ja) | 1994-01-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |