DE68912634T2 - Dünnschicht-SiC-Thermistor für hohe Temperatur. - Google Patents

Dünnschicht-SiC-Thermistor für hohe Temperatur.

Info

Publication number
DE68912634T2
DE68912634T2 DE68912634T DE68912634T DE68912634T2 DE 68912634 T2 DE68912634 T2 DE 68912634T2 DE 68912634 T DE68912634 T DE 68912634T DE 68912634 T DE68912634 T DE 68912634T DE 68912634 T2 DE68912634 T2 DE 68912634T2
Authority
DE
Germany
Prior art keywords
thermistor
thin film
high temperature
film sic
sic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE68912634T
Other languages
English (en)
Other versions
DE68912634D1 (de
Inventor
Takeshi Nagai
Masahiko Itoh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE68912634D1 publication Critical patent/DE68912634D1/de
Application granted granted Critical
Publication of DE68912634T2 publication Critical patent/DE68912634T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • A—HUMAN NECESSITIES
    • A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
    • A24D—CIGARS; CIGARETTES; TOBACCO SMOKE FILTERS; MOUTHPIECES FOR CIGARS OR CIGARETTES; MANUFACTURE OF TOBACCO SMOKE FILTERS OR MOUTHPIECES
    • A24D3/00—Tobacco smoke filters, e.g. filter-tips, filtering inserts; Filters specially adapted for simulated smoking devices; Mouthpieces for cigars or cigarettes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/008—Thermistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C1/00—Details
    • H01C1/14—Terminals or tapping points or electrodes specially adapted for resistors; Arrangements of terminals or tapping points or electrodes on resistors
    • H01C1/1406—Terminals or electrodes formed on resistive elements having positive temperature coefficient
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C1/00—Details
    • H01C1/14—Terminals or tapping points or electrodes specially adapted for resistors; Arrangements of terminals or tapping points or electrodes on resistors
    • H01C1/1413—Terminals or electrodes formed on resistive elements having negative temperature coefficient
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/02—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Thermistors And Varistors (AREA)
DE68912634T 1988-04-21 1989-04-19 Dünnschicht-SiC-Thermistor für hohe Temperatur. Expired - Lifetime DE68912634T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63098633A JPH0810645B2 (ja) 1988-04-21 1988-04-21 薄膜サーミスタ

Publications (2)

Publication Number Publication Date
DE68912634D1 DE68912634D1 (de) 1994-03-10
DE68912634T2 true DE68912634T2 (de) 1994-08-11

Family

ID=14224910

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68912634T Expired - Lifetime DE68912634T2 (de) 1988-04-21 1989-04-19 Dünnschicht-SiC-Thermistor für hohe Temperatur.

Country Status (6)

Country Link
US (1) US4968964A (de)
EP (1) EP0338522B1 (de)
JP (1) JPH0810645B2 (de)
KR (1) KR920007578B1 (de)
AU (1) AU598970B2 (de)
DE (1) DE68912634T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988003319A1 (en) * 1986-10-24 1988-05-05 Anritsu Corporation Electric resistor equipped with thin film conductor and power detector
US5216404A (en) * 1990-07-25 1993-06-01 Matsushita Electric Industrial Co., Ltd. Sic thin-film thermistor
US5521357A (en) * 1992-11-17 1996-05-28 Heaters Engineering, Inc. Heating device for a volatile material with resistive film formed on a substrate and overmolded body
US5367284A (en) * 1993-05-10 1994-11-22 Texas Instruments Incorporated Thin film resistor and method for manufacturing the same
DE4328791C2 (de) * 1993-08-26 1997-07-17 Siemens Matsushita Components Hybrid-Thermistortemperaturfühler
US5980785A (en) * 1997-10-02 1999-11-09 Ormet Corporation Metal-containing compositions and uses thereof, including preparation of resistor and thermistor elements
JP2002270404A (ja) * 2001-03-14 2002-09-20 Denso Corp サーミスタ素子
US8118485B2 (en) * 2008-09-04 2012-02-21 AGlobal Tech, LLC Very high speed thin film RTD sandwich
JP6256690B2 (ja) * 2014-02-26 2018-01-10 三菱マテリアル株式会社 非接触温度センサ
JP2016039376A (ja) * 2014-08-08 2016-03-22 三菱マテリアル株式会社 サーミスタ素子の欠陥検出方法
US11300458B2 (en) 2017-09-05 2022-04-12 Littelfuse, Inc. Temperature sensing tape, assembly, and method of temperature control
JP2019090785A (ja) * 2017-09-05 2019-06-13 リテルヒューズ・インク 温度感知テープ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2061002B (en) * 1979-10-11 1983-10-19 Matsushita Electric Ind Co Ltd Method for making a carbide thin film thermistor
US4424507A (en) * 1981-04-10 1984-01-03 Matsushita Electric Industrial Co., Ltd. Thin film thermistor

Also Published As

Publication number Publication date
JPH01270202A (ja) 1989-10-27
DE68912634D1 (de) 1994-03-10
JPH0810645B2 (ja) 1996-01-31
KR900015651A (ko) 1990-11-10
KR920007578B1 (ko) 1992-09-07
EP0338522B1 (de) 1994-01-26
EP0338522A3 (en) 1990-03-14
AU598970B2 (en) 1990-07-05
EP0338522A2 (de) 1989-10-25
US4968964A (en) 1990-11-06
AU3321189A (en) 1989-11-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP