DE68908934T2 - Halbleiter-Druckwandler. - Google Patents

Halbleiter-Druckwandler.

Info

Publication number
DE68908934T2
DE68908934T2 DE1989608934 DE68908934T DE68908934T2 DE 68908934 T2 DE68908934 T2 DE 68908934T2 DE 1989608934 DE1989608934 DE 1989608934 DE 68908934 T DE68908934 T DE 68908934T DE 68908934 T2 DE68908934 T2 DE 68908934T2
Authority
DE
Germany
Prior art keywords
pressure transducer
semiconductor pressure
semiconductor
transducer
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1989608934
Other languages
English (en)
Other versions
DE68908934D1 (de
Inventor
W Mathias Milton
W Wilda Douglas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Application granted granted Critical
Publication of DE68908934D1 publication Critical patent/DE68908934D1/de
Publication of DE68908934T2 publication Critical patent/DE68908934T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE1989608934 1988-04-15 1989-04-11 Halbleiter-Druckwandler. Expired - Lifetime DE68908934T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US18176988A 1988-04-15 1988-04-15

Publications (2)

Publication Number Publication Date
DE68908934D1 DE68908934D1 (de) 1993-10-14
DE68908934T2 true DE68908934T2 (de) 1994-06-01

Family

ID=22665717

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1989608934 Expired - Lifetime DE68908934T2 (de) 1988-04-15 1989-04-11 Halbleiter-Druckwandler.

Country Status (5)

Country Link
EP (1) EP0337380B1 (de)
JP (1) JP2645588B2 (de)
CA (1) CA1320847C (de)
DE (1) DE68908934T2 (de)
HK (1) HK1008091A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116380330B (zh) * 2023-05-31 2023-10-24 成都凯天电子股份有限公司 一种用于高温的无液体压阻式碳化硅压力传感器

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5242517B2 (de) * 1972-10-11 1977-10-25
US4106349A (en) * 1977-11-03 1978-08-15 Kulite Semiconductor Products, Inc. Transducer structures for high pressure application
JPS5543819A (en) * 1978-09-22 1980-03-27 Hitachi Ltd Pressure detecting equipment

Also Published As

Publication number Publication date
JPH02203231A (ja) 1990-08-13
DE68908934D1 (de) 1993-10-14
EP0337380B1 (de) 1993-09-08
CA1320847C (en) 1993-08-03
EP0337380A3 (de) 1991-07-03
HK1008091A1 (en) 1999-04-30
EP0337380A2 (de) 1989-10-18
JP2645588B2 (ja) 1997-08-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition