DE68903678T2 - Einrichtung zur messung des durchflusses von fluessigkeiten. - Google Patents

Einrichtung zur messung des durchflusses von fluessigkeiten.

Info

Publication number
DE68903678T2
DE68903678T2 DE8989201249T DE68903678T DE68903678T2 DE 68903678 T2 DE68903678 T2 DE 68903678T2 DE 8989201249 T DE8989201249 T DE 8989201249T DE 68903678 T DE68903678 T DE 68903678T DE 68903678 T2 DE68903678 T2 DE 68903678T2
Authority
DE
Germany
Prior art keywords
tube
flow
measuring
fluid
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8989201249T
Other languages
English (en)
Other versions
DE68903678D1 (de
Inventor
Paul Jan Bernard Nijdam
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brooks Instrument BV
Original Assignee
Brooks Instrument BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Instrument BV filed Critical Brooks Instrument BV
Publication of DE68903678D1 publication Critical patent/DE68903678D1/de
Application granted granted Critical
Publication of DE68903678T2 publication Critical patent/DE68903678T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
DE8989201249T 1988-05-18 1989-05-17 Einrichtung zur messung des durchflusses von fluessigkeiten. Expired - Fee Related DE68903678T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8801277 1988-05-18

Publications (2)

Publication Number Publication Date
DE68903678D1 DE68903678D1 (de) 1993-01-14
DE68903678T2 true DE68903678T2 (de) 1993-04-22

Family

ID=19852311

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8989201249T Expired - Fee Related DE68903678T2 (de) 1988-05-18 1989-05-17 Einrichtung zur messung des durchflusses von fluessigkeiten.

Country Status (9)

Country Link
US (1) US4972707A (de)
EP (1) EP0342763B1 (de)
JP (1) JP2559848B2 (de)
CN (1) CN1019146B (de)
AT (1) ATE83072T1 (de)
CA (1) CA1320359C (de)
DE (1) DE68903678T2 (de)
ES (1) ES2037393T3 (de)
GR (1) GR3006629T3 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011120899A1 (de) * 2011-12-12 2013-06-13 Karlsruher Institut für Technologie Vorrichtung und Verfahren zur Bestimmung des Massenstroms eines Fluids

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8900474A (nl) * 1989-02-24 1990-09-17 Bronkhorst High Tech Bv Massa-debietmeter met temperatuursensoren.
US5237866A (en) * 1991-05-10 1993-08-24 Brooks Instrument B.V. Flow sensor for measuring high fluid flow rates
KR940011791B1 (ko) * 1992-04-15 1994-12-26 금성일렉트론주식회사 온도안정화 매스 플로우 컨트롤러 센서
DE4335332A1 (de) * 1993-10-18 1995-04-20 Bitop Gmbh Verfahren und Vorrichtung zur insbesondere nicht invasiven Ermittlung mindestens eines interessierenden Parameters eines Fluid-Rohr-Systems
NL1001674C2 (nl) * 1995-11-17 1997-05-21 Berkin Bv Debietmeter.
US5868159A (en) * 1996-07-12 1999-02-09 Mks Instruments, Inc. Pressure-based mass flow controller
NL1014797C2 (nl) * 2000-03-30 2001-10-02 Berkin Bv Massadebietmeter.
DE10031813C2 (de) * 2000-06-30 2002-08-01 Fafnir Gmbh Verfahren und Vorrichtung zum Bestimmen des Durchflusses eines Gasgemisches
JP4502256B2 (ja) * 2004-09-07 2010-07-14 株式会社山武 流量センサ
US8302471B2 (en) * 2005-12-02 2012-11-06 Melexis Nv Calorimetric flow meter having high heat conductivity strips
US20090077862A1 (en) 2007-09-25 2009-03-26 Schwab Scott D Lubricity additives and methods of producing lubricity additives
US7971480B2 (en) * 2008-10-13 2011-07-05 Hitachi Metals, Ltd. Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements
JP2013026283A (ja) * 2011-07-15 2013-02-04 Toshiba Corp 干渉露光装置
KR101261627B1 (ko) * 2011-12-07 2013-05-06 인제대학교 산학협력단 열 유속 측정 장치 및 이를 포함하는 열 유속 측정 시스템
DE102012201214A1 (de) * 2012-01-27 2013-08-01 Siemens Aktiengesellschaft Durchfluss-Sensor
DE102014101792A1 (de) * 2014-02-13 2015-08-13 Aixtron Se Vorrichtung zum Bestimmen des Massenflusses eines Gases beziehungsweise Gasgemisches mit ineinandergeschachtelten rohrförmigen Filamentanordnungen
JP2017173143A (ja) * 2016-03-24 2017-09-28 セイコーエプソン株式会社 流量検出装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2594618A (en) * 1945-08-11 1952-04-29 Atomic Energy Commission Thermal flowmeter
BE622482A (de) * 1962-08-31
US3650151A (en) * 1970-11-18 1972-03-21 Tylan Corp Fluid flow measuring system
DE2856289A1 (de) * 1978-12-27 1980-07-17 Babcock Bsh Ag Verfahren und vorrichtung zur thermischen massenstrommessung
EP0014934B1 (de) * 1979-02-17 1984-08-01 Battelle-Institut e.V. Vorrichtung zur Messung des Massenflusses und des Wärmeflusses sowie Verfahren zur Bestimmung des Massenflusses
NL7902313A (nl) * 1979-03-23 1980-09-25 Kema Nv Warmtehoeveelheidsmeter.
US4270386A (en) * 1979-08-23 1981-06-02 Teledyne, Inc. Indirectly heated thermal flowmeter
US4440021A (en) * 1980-07-29 1984-04-03 Abouchar John W Mass flow meter with reduced attitude sensitivity
GB2107475B (en) * 1981-09-26 1985-08-21 Joshua Swithenbank Measuring fluid flow
US4686856A (en) * 1983-02-28 1987-08-18 Vavra Randall J Mass flow meter

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011120899A1 (de) * 2011-12-12 2013-06-13 Karlsruher Institut für Technologie Vorrichtung und Verfahren zur Bestimmung des Massenstroms eines Fluids
WO2013087174A1 (de) 2011-12-12 2013-06-20 Karlsruher Institut für Technologie Vorrichtung und verfahren zur bestimmung des massenstroms eines fluids
DE102011120899B4 (de) * 2011-12-12 2015-08-20 Karlsruher Institut für Technologie Verfahren und Verwendung einer Vorrichtung zur Bestimmung des Massenstroms eines Fluids

Also Published As

Publication number Publication date
CA1320359C (en) 1993-07-20
CN1019146B (zh) 1992-11-18
ES2037393T3 (es) 1993-06-16
US4972707A (en) 1990-11-27
EP0342763A1 (de) 1989-11-23
CN1038160A (zh) 1989-12-20
JPH0219715A (ja) 1990-01-23
ATE83072T1 (de) 1992-12-15
GR3006629T3 (de) 1993-06-30
JP2559848B2 (ja) 1996-12-04
DE68903678D1 (de) 1993-01-14
EP0342763B1 (de) 1992-12-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee