DE60328147D1 - Kleine Kupferkugeln und deren Herstellung - Google Patents

Kleine Kupferkugeln und deren Herstellung

Info

Publication number
DE60328147D1
DE60328147D1 DE60328147T DE60328147T DE60328147D1 DE 60328147 D1 DE60328147 D1 DE 60328147D1 DE 60328147 T DE60328147 T DE 60328147T DE 60328147 T DE60328147 T DE 60328147T DE 60328147 D1 DE60328147 D1 DE 60328147D1
Authority
DE
Germany
Prior art keywords
production
copper balls
small copper
small
balls
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60328147T
Other languages
English (en)
Inventor
Ryoichi Kurata
Hoshiro Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Senju Metal Industry Co Ltd
Original Assignee
Senju Metal Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Senju Metal Industry Co Ltd filed Critical Senju Metal Industry Co Ltd
Application granted granted Critical
Publication of DE60328147D1 publication Critical patent/DE60328147D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/0425—Copper-based alloys
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/06—Metallic powder characterised by the shape of the particles
    • B22F1/065—Spherical particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/17—Metallic particles coated with metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
    • B23K35/0244—Powders, particles or spheres; Preforms made therefrom
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814—Conductive parts
    • H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
    • H01L21/4853—Connection or disconnection of other leads to or from a metallisation, e.g. pins, wires, bumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10—Bump connectors ; Manufacturing methods related thereto
    • H01L24/11—Manufacturing methods
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341—Surface mounted components
    • H05K3/3431—Leadless components
    • H05K3/3436—Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/02—Making metallic powder or suspensions thereof using physical processes
    • B22F9/04—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling
    • B22F2009/045—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling by other means than ball or jet milling
    • B22F2009/046—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling by other means than ball or jet milling by cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10—Processes characterised by the sequence of their steps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • B23K35/302—Cu as the principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/11—Manufacturing methods
    • H01L2224/113—Manufacturing methods by local deposition of the material of the bump connector
    • H01L2224/1133—Manufacturing methods by local deposition of the material of the bump connector in solid form
    • H01L2224/11334—Manufacturing methods by local deposition of the material of the bump connector in solid form using preformed bumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001—Core members of the bump connector
    • H01L2224/13099—Material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01004—Beryllium [Be]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01005—Boron [B]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01006—Carbon [C]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01029—Copper [Cu]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/0103—Zinc [Zn]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01033—Arsenic [As]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01047—Silver [Ag]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01074—Tungsten [W]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01078—Platinum [Pt]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01082—Lead [Pb]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013—Alloys
    • H01L2924/0132—Binary Alloys
    • H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013—Alloys
    • H01L2924/0132—Binary Alloys
    • H01L2924/01327—Intermediate phases, i.e. intermetallics compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013—Alloys
    • H01L2924/014—Solder alloys
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10227—Other objects, e.g. metallic pieces
    • H05K2201/10234—Metallic balls
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Metallurgy (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Powder Metallurgy (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
DE60328147T 2002-01-07 2003-01-06 Kleine Kupferkugeln und deren Herstellung Expired - Lifetime DE60328147D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002000662 2002-01-07
JP2002324834A JP3891346B2 (ja) 2002-01-07 2002-11-08 微小銅ボールおよび微小銅ボールの製造方法

Publications (1)

Publication Number Publication Date
DE60328147D1 true DE60328147D1 (de) 2009-08-13

Family

ID=27615653

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60328147T Expired - Lifetime DE60328147D1 (de) 2002-01-07 2003-01-06 Kleine Kupferkugeln und deren Herstellung

Country Status (4)

Country Link
US (1) US6799711B2 (de)
EP (1) EP1357197B1 (de)
JP (1) JP3891346B2 (de)
DE (1) DE60328147D1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3891346B2 (ja) * 2002-01-07 2007-03-14 千住金属工業株式会社 微小銅ボールおよび微小銅ボールの製造方法
JP2004288785A (ja) * 2003-03-20 2004-10-14 Sony Corp 導電突起の接合構造及び接合方法
US20060091184A1 (en) * 2004-10-28 2006-05-04 Art Bayot Method of mitigating voids during solder reflow
WO2007081006A1 (ja) * 2006-01-16 2007-07-19 Hitachi Metals, Ltd. はんだ合金、はんだボールおよびそれを用いたはんだ接合部
JP4556901B2 (ja) * 2006-03-31 2010-10-06 三菱マテリアル株式会社 金合金はんだボールの製造方法
KR101055485B1 (ko) * 2008-10-02 2011-08-08 삼성전기주식회사 범프볼을 갖는 반도체 패키지
JP2012128233A (ja) * 2010-12-16 2012-07-05 Nec Corp 光モジュール及びその実装方法
JP5688715B2 (ja) * 2011-02-23 2015-03-25 独立行政法人産業技術総合研究所 金属球成形用治具、これを用いた金属球の成形方法およびこの成形方法で得られる金属球
US9394619B2 (en) * 2013-03-12 2016-07-19 Intel Corporation Methods of adding dopants to conductive interconnect structures in substrate technologies and structures formed thereby
US9126279B2 (en) * 2013-09-30 2015-09-08 General Electric Company Brazing method
JP5590259B1 (ja) * 2014-01-28 2014-09-17 千住金属工業株式会社 Ｃｕ核ボール、はんだペーストおよびはんだ継手
WO2015114798A1 (ja) * 2014-01-31 2015-08-06 千住金属工業株式会社 フラックスコートボール、はんだペースト、フォームはんだ及びはんだ継手
US10150185B2 (en) * 2014-02-04 2018-12-11 Senju Metal Industry Co., Ltd. Method for producing metal ball, joining material, and metal ball
US9721919B2 (en) * 2015-12-14 2017-08-01 International Business Machines Corporation Solder bumps formed on wafers using preformed solder balls with different compositions and sizes
WO2019195550A1 (en) * 2018-04-04 2019-10-10 Metal Powder Works, LLC System and method for manufacturing powders from ductile materials
CN111468894B (zh) * 2020-04-08 2021-08-06 深圳市兴鸿泰锡业有限公司 一种锡珠的制作方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3104960A1 (de) 1981-02-12 1982-08-26 W.C. Heraeus Gmbh, 6450 Hanau "feinstdraht"
US4925740A (en) * 1989-07-28 1990-05-15 Rohr Industries, Inc. Hollow metal sphere filled stabilized skin structures and method of making
DE69032249T2 (de) 1989-12-07 1998-10-29 Nippon Steel Corp Verfahren zur herstellung winziger metallischer kugeln gleichmässiger grösse
JPH09199506A (ja) * 1995-11-15 1997-07-31 Citizen Watch Co Ltd 半導体素子のバンプ形成方法
DE19606116A1 (de) 1996-02-20 1997-08-21 Berkenhoff Gmbh Elektrische Kontaktelemente
US5808874A (en) * 1996-05-02 1998-09-15 Tessera, Inc. Microelectronic connections with liquid conductive elements
KR20050084536A (ko) * 1997-04-17 2005-08-26 세키스이가가쿠 고교가부시키가이샤 도전성 미립자의 제조장치, 그 제조장치를 이용한 도전성미립자의 제조방법, 그 제조장치를 이용하여 이루어지는전자회로부품
KR100376253B1 (ko) 1997-06-04 2003-03-15 이비덴 가부시키가이샤 인쇄 배선판용 솔더 부재
JP4023526B2 (ja) 1997-10-09 2007-12-19 株式会社Ｎｅｏｍａｘマテリアル 微小金属球の製造方法
US6432599B1 (en) * 1998-06-25 2002-08-13 Matsushita Electric Industrial Co., Ltd. Toner and method for producing the same
US6509645B2 (en) * 1998-07-09 2003-01-21 Nippon Steel Corporation Spherical semiconductor device and method for fabricating the same
TWI230104B (en) * 2000-06-12 2005-04-01 Hitachi Ltd Electronic device
JP2002079100A (ja) * 2000-09-08 2002-03-19 Hiroshima Industrial Technology Organization メタノール水蒸気改質用球状微粒子触媒前駆体並びにメタノール水蒸気改質用球状微粒子触媒及びその製造方法
JP2002224880A (ja) * 2000-11-28 2002-08-13 Fujitsu Ltd はんだペースト、および電子装置
JP3891346B2 (ja) * 2002-01-07 2007-03-14 千住金属工業株式会社 微小銅ボールおよび微小銅ボールの製造方法
JP3757881B2 (ja) * 2002-03-08 2006-03-22 株式会社日立製作所 はんだ

Also Published As

Publication number Publication date
EP1357197B1 (de) 2009-07-01
JP2003268403A (ja) 2003-09-25
US20030141342A1 (en) 2003-07-31
US6799711B2 (en) 2004-10-05
JP3891346B2 (ja) 2007-03-14
EP1357197A1 (de) 2003-10-29

Similar Documents

Publication Publication Date Title
DE602004021904D1 (de) Gyraseinhibitoren und deren verwendungen
DE60310339D1 (de) Querträger und Herstellungsverfahren
ATE415966T1 (de) Substituierte 3-amino-thieno(2,3-b)pyridine-2- amide und herstellungsverfahren sowie deren verwendung
DE60324888D1 (de) und Herstellungsverfahren
DE60328147D1 (de) Kleine Kupferkugeln und deren Herstellung
ATE470675T1 (de) Immunoglobulinvarianten und deren verwendungen
DE602004006179D1 (de) Absorbierender Artikel und Herstellungsverfahren
DE60326611D1 (de) N und dergleichen
DE602004015264D1 (de) Hochintensive süssstoffzusammensetzung und deren abgabe
DE50300492D1 (de) Elektroden, deren herstellung und kondensatoren mit diesen elektroden
DE60309422D1 (de) Multichip-modul und Herstellungsverfahren
NO20055568D0 (no) Substituerte 1,4-diazepiner og anvendelser derav
DE60239896D1 (de) Velourskunstleder und seine herstellung
DE602004027354D1 (de) SUBSTITUIERTE 8y-PYRIDINYLDIHYDROSPIROiCYCLOALKYL PYRIMIDOi1,2-A PYRIMIDIN-6-ON- UND 8y-PYRIMIDINYLDIHYDROSPIROiCYCLOALKYL PYRIMIDOi1,2-A PYRIMIDIN-6-ONDERIVATE UND DEREN VERWENDUNG BEI NEURODEGENERATIVEN KRANKHEITEN
DE60235547D1 (de) En daraus, deren herstellung und verwendung
ATE372998T1 (de) 1-aminophthalazinderivate, deren herstellung und deren therapeutische verwendung
DE60317156D1 (de) Aktuator und dessen Herstellungsverfahren
ATE390856T1 (de) Getränke und ihre herstellung
ATE325122T1 (de) Piperazinylacylpiperidinderivate, deren herstellung und deren therapeutische anwendung
ATE512148T1 (de) Pyrazolo- und imidazopyrimidinderivate
ATE412635T1 (de) Diphenylpyridinderivate, deren herstellung und deren therapeutische anwendung
DE10251294B4 (de) Polyamidformmasse und deren Verwendung
ATE383780T1 (de) Getränke und ihre herstellung
DE50302605D1 (de) Schaltungsträger und herstellung desselben
DE602004006349D1 (de) Strukturen aus Vielfachnanoschichten, Bauteile und damit zusammenhängende Herstellungsverfahren

Legal Events

Date Code Title Description
8364 No opposition during term of opposition