DE60319988D1 - Verfahren zur Herstellung einer Mikrostruktur - Google Patents

Verfahren zur Herstellung einer Mikrostruktur

Info

Publication number
DE60319988D1
DE60319988D1 DE60319988T DE60319988T DE60319988D1 DE 60319988 D1 DE60319988 D1 DE 60319988D1 DE 60319988 T DE60319988 T DE 60319988T DE 60319988 T DE60319988 T DE 60319988T DE 60319988 D1 DE60319988 D1 DE 60319988D1
Authority
DE
Germany
Prior art keywords
flexible mold
predetermined
moisture
microstructure
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60319988T
Other languages
English (en)
Other versions
DE60319988T2 (de
Inventor
Chikafumi Yokoyama
Takayuki Kawai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Application granted granted Critical
Publication of DE60319988D1 publication Critical patent/DE60319988D1/de
Publication of DE60319988T2 publication Critical patent/DE60319988T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • H01J9/242—Spacers between faceplate and backplate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/40—Plastics, e.g. foam or rubber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
    • B29C33/424—Moulding surfaces provided with means for marking or patterning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
    • B29C39/02—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of definite length, i.e. discrete articles
    • B29C39/10—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. casting around inserts or for coating articles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2217/00—Gas-filled discharge tubes
    • H01J2217/38—Cold-cathode tubes
    • H01J2217/49—Display panels, e.g. not making use of alternating current
    • H01J2217/492—Details
    • H01J2217/49264—Vessels
DE60319988T 2002-07-17 2003-06-20 Verfahren zur Herstellung einer Mikrostruktur Expired - Lifetime DE60319988T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002208326 2002-07-17
JP2002208326A JP3986386B2 (ja) 2002-07-17 2002-07-17 微細構造体の製造方法
PCT/US2003/019495 WO2004010452A2 (en) 2002-07-17 2003-06-20 Flexible mold and method of manufacturing microstructure using same

Publications (2)

Publication Number Publication Date
DE60319988D1 true DE60319988D1 (de) 2008-05-08
DE60319988T2 DE60319988T2 (de) 2009-04-16

Family

ID=30767670

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60319988T Expired - Lifetime DE60319988T2 (de) 2002-07-17 2003-06-20 Verfahren zur Herstellung einer Mikrostruktur

Country Status (11)

Country Link
US (1) US20050212182A1 (de)
EP (1) EP1525079B9 (de)
JP (1) JP3986386B2 (de)
KR (1) KR100951278B1 (de)
CN (1) CN1668435B (de)
AT (1) ATE390260T1 (de)
AU (1) AU2003245601A1 (de)
CA (1) CA2491415A1 (de)
DE (1) DE60319988T2 (de)
TW (1) TWI275465B (de)
WO (1) WO2004010452A2 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7361409B2 (en) 2003-08-22 2008-04-22 3M Innovative Properties Company Microstructured article comprising a polymerized composition having low glass transition temperature
JP2005066836A (ja) * 2003-08-22 2005-03-17 Three M Innovative Properties Co 可とう性成形型及びその製造方法ならびに微細構造体の製造方法
US7288013B2 (en) 2003-10-31 2007-10-30 3M Innovative Properties Company Method of forming microstructures on a substrate and a microstructured assembly used for same
JP2005288933A (ja) * 2004-04-01 2005-10-20 Three M Innovative Properties Co 可とう性成形型及びその製造方法
JP2008511124A (ja) 2004-08-26 2008-04-10 スリーエム イノベイティブ プロパティズ カンパニー テンプレートで微細構造を形成する方法
KR100697197B1 (ko) * 2004-12-29 2007-03-21 엘지전자 주식회사 플라즈마 디스플레이 패널
JP4773729B2 (ja) * 2005-02-28 2011-09-14 キヤノン株式会社 転写装置およびデバイス製造方法
US7478791B2 (en) 2005-04-15 2009-01-20 3M Innovative Properties Company Flexible mold comprising cured polymerizable resin composition
KR100744573B1 (ko) * 2005-04-21 2007-08-01 미래나노텍(주) 플라즈마 디스플레이 패널
JP4455488B2 (ja) * 2005-12-19 2010-04-21 三菱電機株式会社 半導体装置
KR100822043B1 (ko) * 2006-06-29 2008-04-15 주식회사 싸이노스 플렉시블 플라즈마 디스플레이 패널의 제조 방법
JP2010501108A (ja) * 2006-08-14 2010-01-14 スリーエム イノベイティブ プロパティズ カンパニー 表面改質された非成形領域を有する成形型
US20080093776A1 (en) * 2006-10-05 2008-04-24 3M Innovative Properties Company Method of molding ultraviolet cured microstructures and molds
WO2008073719A1 (en) * 2006-12-07 2008-06-19 3M Innovative Properties Company Method of molding barrier ribs with hygroscopic polymeric molds
EP2163367A4 (de) * 2007-06-04 2011-03-23 Maruzen Petrochem Co Ltd Form, mikroverarbeiteter artikel und deren herstellungsverfahren
JP2010218597A (ja) * 2009-03-13 2010-09-30 Toshiba Corp パターン転写用樹脂スタンパ、及びこれを用いた磁気記録媒体の製造方法
JP5559574B2 (ja) * 2010-03-08 2014-07-23 東芝機械株式会社 転写方法
JP5351096B2 (ja) 2010-06-02 2013-11-27 日東電工株式会社 光導波路の製法
JP5351102B2 (ja) 2010-07-05 2013-11-27 日東電工株式会社 光導波路の製法
JP5351101B2 (ja) 2010-07-05 2013-11-27 日東電工株式会社 光導波路の製法
JP4774125B2 (ja) * 2010-10-04 2011-09-14 キヤノン株式会社 転写装置、型、および、デバイス製造方法
JP5379774B2 (ja) 2010-10-27 2013-12-25 日東電工株式会社 光導波路の製法
US8875356B2 (en) 2011-10-06 2014-11-04 Intercontinental Great Brands Llc Mechanical and adhesive based reclosable fasteners
KR101986473B1 (ko) * 2012-09-06 2019-06-05 에베 그룹 에. 탈너 게엠베하 구조 스탬프 및 구조 스탬프를 엠보싱하기 위한 장치 및 방법
US9480931B1 (en) * 2012-11-16 2016-11-01 Mattel, Inc. Building components
DE102013107909B4 (de) * 2013-07-24 2015-04-09 Schott Ag Verfahren und Anlage zum Einprägen einer Struktur auf einem mit einem Lack beschichteten Substrat
CN111279261B (zh) * 2017-05-09 2023-10-24 赫普塔冈微光有限公司 用于整修复制工具的方法和用于制造大量装置的相关方法
CN108908820B (zh) * 2018-06-19 2020-12-25 深圳摩方新材科技有限公司 一种树脂类光学镜片的制造方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4340709A (en) * 1980-07-16 1982-07-20 General Electric Company Addition curing silicone compositions
US4912948A (en) * 1985-03-22 1990-04-03 Union Carbide Chemicals And Plastics Company Inc. Vacuum guide used in flexible sheet material treatment
US4929403A (en) * 1989-07-25 1990-05-29 Audsley Edwin F Process for forming multi-layer flexible molds
US5462702A (en) * 1992-02-04 1995-10-31 Slaughter, Jr.; Gibbs M. Method for resurfacing fiberglass boat hulls
JP3128312B2 (ja) * 1992-02-28 2001-01-29 株式会社ダイセン工業 合成樹脂の発泡成形用金型装置および発泡成形法
US5840465A (en) * 1995-07-17 1998-11-24 Taiyo Ink Manufacturing Co., Ltd. Compositions and method for formation of barrier ribs of plasma display panel
JP3591910B2 (ja) * 1995-03-30 2004-11-24 大日本印刷株式会社 プラズマディスプレイパネルのセル障壁製造方法
US6251208B1 (en) * 1996-10-29 2001-06-26 Toshiba Machine Co., Ltd. Method for manufacturing a structure with fine ribs
US6247986B1 (en) * 1998-12-23 2001-06-19 3M Innovative Properties Company Method for precise molding and alignment of structures on a substrate using a stretchable mold
US6843952B1 (en) * 1999-03-25 2005-01-18 3M Innovative Properties Company Method of producing substrate for plasma display panel and mold used in the method
US6306948B1 (en) * 1999-10-26 2001-10-23 3M Innovative Properties Company Molding composition containing a debinding catalyst for making ceramic microstructures
JP4082545B2 (ja) * 2000-01-11 2008-04-30 スリーエム イノベイティブ プロパティズ カンパニー プラズマディスプレイパネル用基板を製造するための装置、成形型及び方法
US7033534B2 (en) * 2001-10-09 2006-04-25 3M Innovative Properties Company Method for forming microstructures on a substrate using a mold
US7176492B2 (en) * 2001-10-09 2007-02-13 3M Innovative Properties Company Method for forming ceramic microstructures on a substrate using a mold and articles formed by the method
JP4326190B2 (ja) * 2002-07-10 2009-09-02 スリーエム イノベイティブ プロパティズ カンパニー 可とう性成形型及びその製造方法

Also Published As

Publication number Publication date
TWI275465B (en) 2007-03-11
CN1668435B (zh) 2010-05-26
CA2491415A1 (en) 2004-01-29
JP3986386B2 (ja) 2007-10-03
EP1525079B1 (de) 2008-03-26
US20050212182A1 (en) 2005-09-29
DE60319988T2 (de) 2009-04-16
KR100951278B1 (ko) 2010-04-02
EP1525079A2 (de) 2005-04-27
JP2004050493A (ja) 2004-02-19
AU2003245601A1 (en) 2004-02-09
EP1525079B9 (de) 2009-08-26
ATE390260T1 (de) 2008-04-15
WO2004010452A2 (en) 2004-01-29
CN1668435A (zh) 2005-09-14
TW200408521A (en) 2004-06-01
KR20050039831A (ko) 2005-04-29
WO2004010452A3 (en) 2004-06-10
AU2003245601A8 (en) 2004-02-09

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Legal Events

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8364 No opposition during term of opposition