DE60308609T2 - MEMS Schalter und Herstellungsverfahren - Google Patents

MEMS Schalter und Herstellungsverfahren Download PDF

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Publication number
DE60308609T2
DE60308609T2 DE60308609T DE60308609T DE60308609T2 DE 60308609 T2 DE60308609 T2 DE 60308609T2 DE 60308609 T DE60308609 T DE 60308609T DE 60308609 T DE60308609 T DE 60308609T DE 60308609 T2 DE60308609 T2 DE 60308609T2
Authority
DE
Germany
Prior art keywords
movable electrode
electrode
fixed electrode
fixed
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60308609T
Other languages
German (de)
English (en)
Other versions
DE60308609D1 (de
Inventor
Norisato Shimizu
Yoshito Nakanishi
Kunihiko Nakamura
Yasuyuki Naito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE60308609D1 publication Critical patent/DE60308609D1/de
Publication of DE60308609T2 publication Critical patent/DE60308609T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

Landscapes

  • Micromachines (AREA)
  • Manufacture Of Switches (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Contacts (AREA)
DE60308609T 2002-07-30 2003-07-30 MEMS Schalter und Herstellungsverfahren Expired - Fee Related DE60308609T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2002221009 2002-07-30
JP2002221009 2002-07-30
JP2003021852 2003-01-30
JP2003021852 2003-01-30
JP2003279097A JP4206856B2 (ja) 2002-07-30 2003-07-24 スイッチおよびスイッチの製造方法
JP2003279097 2003-07-24

Publications (2)

Publication Number Publication Date
DE60308609D1 DE60308609D1 (de) 2006-11-09
DE60308609T2 true DE60308609T2 (de) 2007-08-09

Family

ID=30118932

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60308609T Expired - Fee Related DE60308609T2 (de) 2002-07-30 2003-07-30 MEMS Schalter und Herstellungsverfahren

Country Status (5)

Country Link
US (1) US6992551B2 (enExample)
EP (1) EP1387380B1 (enExample)
JP (1) JP4206856B2 (enExample)
CN (1) CN1277282C (enExample)
DE (1) DE60308609T2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006147540A (ja) 2004-10-22 2006-06-08 Matsushita Electric Ind Co Ltd 電気機械スイッチ
KR100661347B1 (ko) * 2004-10-27 2006-12-27 삼성전자주식회사 미소 박막 구조물 및 이를 이용한 ｍｅｍｓ 스위치 그리고그것들을 제조하기 위한 방법
US7283030B2 (en) * 2004-11-22 2007-10-16 Eastman Kodak Company Doubly-anchored thermal actuator having varying flexural rigidity
US7339454B1 (en) * 2005-04-11 2008-03-04 Sandia Corporation Tensile-stressed microelectromechanical apparatus and microelectromechanical relay formed therefrom
US8053850B2 (en) * 2005-06-30 2011-11-08 Semiconductor Energy Laboratory Co., Ltd. Minute structure, micromachine, organic transistor, electric appliance, and manufacturing method thereof
CN101111911A (zh) * 2005-11-24 2008-01-23 松下电器产业株式会社 微机电元件及使用其的机电开关
KR100837741B1 (ko) * 2006-12-29 2008-06-13 삼성전자주식회사 미세 스위치 소자 및 미세 스위치 소자의 제조방법
US8138859B2 (en) * 2008-04-21 2012-03-20 Formfactor, Inc. Switch for use in microelectromechanical systems (MEMS) and MEMS devices incorporating same
FR2964243A1 (fr) * 2010-08-27 2012-03-02 Commissariat Energie Atomique Dispositif a contact intermittent ameliore par dielectrophorese
US9165723B2 (en) * 2012-08-23 2015-10-20 Harris Corporation Switches for use in microelectromechanical and other systems, and processes for making same
US9053873B2 (en) 2012-09-20 2015-06-09 Harris Corporation Switches for use in microelectromechanical and other systems, and processes for making same
US9053874B2 (en) 2012-09-20 2015-06-09 Harris Corporation MEMS switches and other miniaturized devices having encapsulating enclosures, and processes for fabricating same
US9203133B2 (en) 2012-10-18 2015-12-01 Harris Corporation Directional couplers with variable frequency response
JP2016144261A (ja) * 2015-01-30 2016-08-08 ソニー株式会社 静電アクチュエータおよびスイッチ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11274805A (ja) * 1998-03-20 1999-10-08 Ricoh Co Ltd 高周波スイッチ並びに製造方法、及び集積化高周波スイッチアレイ
US6291922B1 (en) * 1999-08-25 2001-09-18 Jds Uniphase, Inc. Microelectromechanical device having single crystalline components and metallic components
US6950223B2 (en) * 2003-01-15 2005-09-27 Reflectivity, Inc Multiple hinge MEMS device
US6768403B2 (en) * 2002-03-12 2004-07-27 Hrl Laboratories, Llc Torsion spring for electro-mechanical switches and a cantilever-type RF micro-electromechanical switch incorporating the torsion spring
US6919784B2 (en) * 2001-10-18 2005-07-19 The Board Of Trustees Of The University Of Illinois High cycle MEMS device
US6794101B2 (en) * 2002-05-31 2004-09-21 Motorola, Inc. Micro-electro-mechanical device and method of making
US6850133B2 (en) * 2002-08-14 2005-02-01 Intel Corporation Electrode configuration in a MEMS switch

Also Published As

Publication number Publication date
US20040069608A1 (en) 2004-04-15
EP1387380B1 (en) 2006-09-27
JP4206856B2 (ja) 2009-01-14
CN1277282C (zh) 2006-09-27
JP2004253365A (ja) 2004-09-09
CN1484266A (zh) 2004-03-24
DE60308609D1 (de) 2006-11-09
US6992551B2 (en) 2006-01-31
EP1387380A1 (en) 2004-02-04

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Legal Events

Date Code Title Description
8381 Inventor (new situation)

Inventor name: SHIMIZU, NORISATO, KANAGAWA 206-0005, JP

Inventor name: NAKANISHI, YOSHITO, TOKYO 194-0031, JP

Inventor name: NAKAMURA, KUNIHIKO, KANAGAWA 228-0817, JP

Inventor name: NAITO, YASUYUKI, TOKYO 166-0014, JP

8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8339 Ceased/non-payment of the annual fee