DE60307304D1 - Fluorfreie metallkomplexe zum chemische gasphasenabscheidung - Google Patents
Fluorfreie metallkomplexe zum chemische gasphasenabscheidungInfo
- Publication number
- DE60307304D1 DE60307304D1 DE60307304T DE60307304T DE60307304D1 DE 60307304 D1 DE60307304 D1 DE 60307304D1 DE 60307304 T DE60307304 T DE 60307304T DE 60307304 T DE60307304 T DE 60307304T DE 60307304 D1 DE60307304 D1 DE 60307304D1
- Authority
- DE
- Germany
- Prior art keywords
- gas phase
- phase separation
- metal complexes
- chemical gas
- fluorous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002184 metal Substances 0.000 title abstract 2
- 229910052751 metal Inorganic materials 0.000 title abstract 2
- 238000005191 phase separation Methods 0.000 title 1
- 239000000126 substance Substances 0.000 title 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 2
- 229910052802 copper Inorganic materials 0.000 abstract 2
- 239000010949 copper Substances 0.000 abstract 2
- 238000005234 chemical deposition Methods 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 abstract 1
- 239000004332 silver Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F1/00—Compounds containing elements of Groups 1 or 11 of the Periodic Table
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F1/00—Compounds containing elements of Groups 1 or 11 of the Periodic Table
- C07F1/005—Compounds containing elements of Groups 1 or 11 of the Periodic Table without C-Metal linkages
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F1/00—Compounds containing elements of Groups 1 or 11 of the Periodic Table
- C07F1/08—Copper compounds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/0803—Compounds with Si-C or Si-Si linkages
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Vapour Deposition (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0212059 | 2002-09-30 | ||
FR0212059A FR2845088B1 (fr) | 2002-09-30 | 2002-09-30 | Nouveaux complexes metalliques exempts de fluor pour le depot chimique de metaux en phase gazeuse |
PCT/FR2003/002820 WO2004029061A1 (fr) | 2002-09-30 | 2003-09-25 | Complexes metalliques exempts de fluor pour le depot chimique de metaux en phase gazeuse |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60307304D1 true DE60307304D1 (de) | 2006-09-14 |
DE60307304T2 DE60307304T2 (de) | 2007-10-11 |
Family
ID=31985326
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60307304T Expired - Lifetime DE60307304T2 (de) | 2002-09-30 | 2003-09-25 | Fluorfreie metallkomplexe zum chemische gasphasenabscheidung |
Country Status (9)
Country | Link |
---|---|
US (1) | US7238820B2 (de) |
EP (1) | EP1551851B1 (de) |
JP (1) | JP4634800B2 (de) |
AT (1) | ATE334990T1 (de) |
AU (1) | AU2003276374A1 (de) |
CA (1) | CA2500386C (de) |
DE (1) | DE60307304T2 (de) |
FR (1) | FR2845088B1 (de) |
WO (1) | WO2004029061A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009039216A1 (en) * | 2007-09-17 | 2009-03-26 | L'air Liquide - Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Neutral ligand containing precursors and methods for deposition of a metal containing film |
CN103839604A (zh) * | 2014-02-26 | 2014-06-04 | 京东方科技集团股份有限公司 | 导电膜及其制备方法、阵列基板 |
JP7497022B2 (ja) | 2020-06-24 | 2024-06-10 | 国立研究開発法人産業技術総合研究所 | アルキニルシランの製造方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5085731A (en) * | 1991-02-04 | 1992-02-04 | Air Products And Chemicals, Inc. | Volatile liquid precursors for the chemical vapor deposition of copper |
FR2760743B1 (fr) * | 1997-03-13 | 1999-07-23 | Centre Nat Rech Scient | Nouveaux precurseurs de cuivre(i) pour depot chimique en phase gazeuse de cuivre metallique |
US6838573B1 (en) * | 2004-01-30 | 2005-01-04 | Air Products And Chemicals, Inc. | Copper CVD precursors with enhanced adhesion properties |
-
2002
- 2002-09-30 FR FR0212059A patent/FR2845088B1/fr not_active Expired - Fee Related
-
2003
- 2003-09-25 EP EP03798226A patent/EP1551851B1/de not_active Expired - Lifetime
- 2003-09-25 JP JP2004539140A patent/JP4634800B2/ja not_active Expired - Fee Related
- 2003-09-25 AT AT03798226T patent/ATE334990T1/de active
- 2003-09-25 WO PCT/FR2003/002820 patent/WO2004029061A1/fr active IP Right Grant
- 2003-09-25 US US10/529,569 patent/US7238820B2/en not_active Expired - Fee Related
- 2003-09-25 DE DE60307304T patent/DE60307304T2/de not_active Expired - Lifetime
- 2003-09-25 AU AU2003276374A patent/AU2003276374A1/en not_active Abandoned
- 2003-09-25 CA CA2500386A patent/CA2500386C/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2845088B1 (fr) | 2004-12-03 |
WO2004029061A1 (fr) | 2004-04-08 |
CA2500386A1 (fr) | 2004-04-08 |
ATE334990T1 (de) | 2006-08-15 |
JP4634800B2 (ja) | 2011-02-16 |
AU2003276374A1 (en) | 2004-04-19 |
EP1551851B1 (de) | 2006-08-02 |
JP2006501280A (ja) | 2006-01-12 |
EP1551851A1 (de) | 2005-07-13 |
FR2845088A1 (fr) | 2004-04-02 |
US20060121709A1 (en) | 2006-06-08 |
CA2500386C (fr) | 2012-03-13 |
US7238820B2 (en) | 2007-07-03 |
DE60307304T2 (de) | 2007-10-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |