DE60307028D1 - Flacher Röntgenstrahlen-Detektor - Google Patents

Flacher Röntgenstrahlen-Detektor

Info

Publication number
DE60307028D1
DE60307028D1 DE60307028T DE60307028T DE60307028D1 DE 60307028 D1 DE60307028 D1 DE 60307028D1 DE 60307028 T DE60307028 T DE 60307028T DE 60307028 T DE60307028 T DE 60307028T DE 60307028 D1 DE60307028 D1 DE 60307028D1
Authority
DE
Germany
Prior art keywords
flat
ray detector
ray
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60307028T
Other languages
English (en)
Other versions
DE60307028T2 (de
Inventor
Mitsushi Ikeda
Toshiyuki Oka
Mutsuki Yamazaki
Masaki Atsuta
Akira Kinno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of DE60307028D1 publication Critical patent/DE60307028D1/de
Application granted granted Critical
Publication of DE60307028T2 publication Critical patent/DE60307028T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K4/00—Conversion screens for the conversion of the spatial distribution of X-rays or particle radiation into visible images, e.g. fluoroscopic screens
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14643—Photodiode arrays; MOS imagers
    • H01L27/14658—X-ray, gamma-ray or corpuscular radiation imagers
    • H01L27/14659—Direct radiation imagers structures

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measurement Of Radiation (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Light Receiving Elements (AREA)
DE60307028T 2002-12-09 2003-12-05 Flacher Röntgenstrahlen-Detektor Expired - Fee Related DE60307028T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002357121 2002-12-09
JP2002357121A JP4153783B2 (ja) 2002-12-09 2002-12-09 Ｘ線平面検出器

Publications (2)

Publication Number Publication Date
DE60307028D1 true DE60307028D1 (de) 2006-09-07
DE60307028T2 DE60307028T2 (de) 2007-02-15

Family

ID=32322065

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60307028T Expired - Fee Related DE60307028T2 (de) 2002-12-09 2003-12-05 Flacher Röntgenstrahlen-Detektor

Country Status (4)

Country Link
US (1) US7115878B2 (de)
EP (1) EP1429156B1 (de)
JP (1) JP4153783B2 (de)
DE (1) DE60307028T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050056829A1 (en) * 2003-09-17 2005-03-17 Green Michael C. Reducing dark current of photoconductor using heterojunction that maintains high x-ray sensitivity
US7126128B2 (en) * 2004-02-13 2006-10-24 Kabushiki Kaisha Toshiba Flat panel x-ray detector
JP2005327817A (ja) * 2004-05-12 2005-11-24 Toshiba Corp 放射線検出器
JP4653579B2 (ja) * 2005-07-13 2011-03-16 株式会社東芝 Ｘ線平面検出器
DE102005060795A1 (de) * 2005-12-16 2007-07-12 Siemens Ag Flachbilddetektor
DE102005060794B3 (de) * 2005-12-16 2007-06-14 Siemens Ag Flachbilddetektor
US8232531B2 (en) * 2007-03-29 2012-07-31 Varian Medical Systems, Inc. Corrosion barrier layer for photoconductive X-ray imagers
DE102011003454A1 (de) 2011-02-01 2012-08-02 Siemens Aktiengesellschaft Strahlungsdirektkonverter, Strahlungsdetektor, medizintechnisches Gerät und Verfahren zum Erzeugen eines Strahlungsdirektkonverters
JP2015061041A (ja) * 2013-09-20 2015-03-30 株式会社東芝 放射線検出器および放射線検出装置
US9778561B2 (en) * 2014-01-31 2017-10-03 Lam Research Corporation Vacuum-integrated hardmask processes and apparatus
US9513380B2 (en) 2014-07-25 2016-12-06 General Electric Company X-ray detectors supported on a substrate having a surrounding metal barrier
US10712454B2 (en) 2014-07-25 2020-07-14 General Electric Company X-ray detectors supported on a substrate having a metal barrier
US9996004B2 (en) 2015-11-20 2018-06-12 Lam Research Corporation EUV photopatterning of vapor-deposited metal oxide-containing hardmasks
US10796912B2 (en) 2017-05-16 2020-10-06 Lam Research Corporation Eliminating yield impact of stochastics in lithography
US11921427B2 (en) 2018-11-14 2024-03-05 Lam Research Corporation Methods for making hard masks useful in next-generation lithography
WO2021146138A1 (en) 2020-01-15 2021-07-22 Lam Research Corporation Underlayer for photoresist adhesion and dose reduction

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4689487A (en) 1984-09-03 1987-08-25 Kabushiki Kaisha Toshiba Radiographic image detection apparatus
JP3838806B2 (ja) * 1999-03-26 2006-10-25 株式会社東芝 信号増倍ｘ線撮像装置
US6864484B1 (en) * 1999-07-26 2005-03-08 Edge Medical Devices, Ltd Digital detector for x-ray imaging
US6507026B2 (en) * 2000-01-12 2003-01-14 Kabushiki Kaisha Toshiba Planar X-ray detector
JP2001210855A (ja) * 2000-01-27 2001-08-03 Sharp Corp 二次元画像検出器
FI20021255A (fi) * 2002-06-27 2003-12-28 Metorex Internat Oy Suoraan konversioon perustuva kuvaava röntgendetektori
US20050082491A1 (en) * 2003-10-15 2005-04-21 Seppi Edward J. Multi-energy radiation detector

Also Published As

Publication number Publication date
US7115878B2 (en) 2006-10-03
US20040113087A1 (en) 2004-06-17
EP1429156B1 (de) 2006-07-26
EP1429156A1 (de) 2004-06-16
DE60307028T2 (de) 2007-02-15
JP2004191102A (ja) 2004-07-08
JP4153783B2 (ja) 2008-09-24

Similar Documents

Publication Publication Date Title
DE60330633D1 (de) Strahlungsdetektor
FI20041301A0 (fi) Röntgen CT-laite
DE60318946D1 (de) Positionsdetektor
DE60217606D1 (de) Flachbildröntgenstrahlendetektor
DE60304786D1 (de) Röntgen-Computertomograph
FI20021255A (fi) Suoraan konversioon perustuva kuvaava röntgendetektori
GB2391064B (en) Radiation detector
DE60228908D1 (de) Strahlungsdetektor
DE602004026137D1 (de) Strahlungsdetektionskassette
DE50306132D1 (de) Rauchmelder
DE60314820D1 (de) Strahlungsdetektionskassette
IL171134A (en) Radiation detector
DE60307028D1 (de) Flacher Röntgenstrahlen-Detektor
DE60319905D1 (de) Röntgenstrahlungsdetektor
SG112033A1 (en) Radiation detector
EP1542039A4 (de) Strahlungsdetektor
DE60110383D1 (de) Strahlungsdetektor
EP1542038A4 (de) Strahlungsdetektor
FR2838240B1 (fr) Detecteur de rayonnement
DE502004003840D1 (de) Röntgengerät
EP1698911A4 (de) Strahlungsdetektor
DE50202776D1 (de) Röntgeneinrichtung
IL175524A0 (en) Radiation detector
DE60314089D1 (de) Verbesserte radiographische Kassette
EP1505409A4 (de) Strahlungsdetektor

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee