DE60239825D1 - Phasenverschiebungsinterferometrieverfahren und -system - Google Patents

Phasenverschiebungsinterferometrieverfahren und -system

Info

Publication number
DE60239825D1
DE60239825D1 DE60239825T DE60239825T DE60239825D1 DE 60239825 D1 DE60239825 D1 DE 60239825D1 DE 60239825 T DE60239825 T DE 60239825T DE 60239825 T DE60239825 T DE 60239825T DE 60239825 D1 DE60239825 D1 DE 60239825D1
Authority
DE
Germany
Prior art keywords
phase shift
shift interferometer
interferometer process
phase
shift
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60239825T
Other languages
English (en)
Inventor
Leslie L Deck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zygo Corp
Original Assignee
Zygo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/304,209 external-priority patent/US6924898B2/en
Application filed by Zygo Corp filed Critical Zygo Corp
Application granted granted Critical
Publication of DE60239825D1 publication Critical patent/DE60239825D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G01B9/02028—Two or more reference or object arms in one interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S13/00—Systems using the reflection or reradiation of radio waves, e.g. radar systems; Analogous systems using reflection or reradiation of waves whose nature or wavelength is irrelevant or unspecified
    • G01S13/02—Systems using reflection of radio waves, e.g. primary radar systems; Analogous systems
    • G01S13/06—Systems determining position data of a target
    • G01S13/08—Systems for measuring distance only
    • G01S13/32—Systems for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S13/34—Systems for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
    • G01S13/342—Systems for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal using sinusoidal modulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/10—Wheel alignment
    • G01B2210/30—Reference markings, reflector, scale or other passive device
    • G01B2210/306—Mirror, prism or other reflector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE60239825T 2001-12-10 2002-12-04 Phasenverschiebungsinterferometrieverfahren und -system Expired - Lifetime DE60239825D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US33921401P 2001-12-10 2001-12-10
US10/304,209 US6924898B2 (en) 2000-08-08 2002-11-26 Phase-shifting interferometry method and system
PCT/US2002/038660 WO2003050470A2 (en) 2001-12-10 2002-12-04 Phase-shifting interferometry method and system

Publications (1)

Publication Number Publication Date
DE60239825D1 true DE60239825D1 (de) 2011-06-01

Family

ID=39648943

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60239825T Expired - Lifetime DE60239825D1 (de) 2001-12-10 2002-12-04 Phasenverschiebungsinterferometrieverfahren und -system

Country Status (2)

Country Link
KR (1) KR100858447B1 (de)
DE (1) DE60239825D1 (de)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5502566A (en) 1993-07-23 1996-03-26 Wyko Corporation Method and apparatus for absolute optical measurement of entire surfaces of flats
US6359692B1 (en) * 1999-07-09 2002-03-19 Zygo Corporation Method and system for profiling objects having multiple reflective surfaces using wavelength-tuning phase-shifting interferometry

Also Published As

Publication number Publication date
KR100858447B1 (ko) 2008-09-12
KR20080042187A (ko) 2008-05-14

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