DE60239734D1 - Herstellung von mikromechanischen siliziumstrukturen - Google Patents

Herstellung von mikromechanischen siliziumstrukturen

Info

Publication number
DE60239734D1
DE60239734D1 DE60239734T DE60239734T DE60239734D1 DE 60239734 D1 DE60239734 D1 DE 60239734D1 DE 60239734 T DE60239734 T DE 60239734T DE 60239734 T DE60239734 T DE 60239734T DE 60239734 D1 DE60239734 D1 DE 60239734D1
Authority
DE
Germany
Prior art keywords
preparation
silicon structures
micromechanical silicon
micromechanical
structures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60239734T
Other languages
English (en)
Inventor
Michel Despont
Ute Drechsler
Roy H Magnuson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE60239734D1 publication Critical patent/DE60239734D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30604—Chemical etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00777—Preserve existing structures from alteration, e.g. temporary protection during manufacturing
    • B81C1/00785—Avoid chemical alteration, e.g. contamination, oxidation or unwanted etching
    • B81C1/00801—Avoid alteration of functional structures by etching, e.g. using a passivation layer or an etch stop layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F13/00—Inhibiting corrosion of metals by anodic or cathodic protection
    • C23F13/02—Inhibiting corrosion of metals by anodic or cathodic protection cathodic; Selection of conditions, parameters or procedures for cathodic protection, e.g. of electrical conditions
    • C23F13/06—Constructional parts, or assemblies of cathodic-protection apparatus
    • C23F13/08—Electrodes specially adapted for inhibiting corrosion by cathodic protection; Manufacture thereof; Conducting electric current thereto
    • C23F13/12—Electrodes characterised by the material
    • C23F13/14—Material for sacrificial anodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/12—STM or AFM microtips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102—Surface micromachining
    • B81C2201/0105—Sacrificial layer
    • B81C2201/0107—Sacrificial metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0111—Bulk micromachining
    • B81C2201/0114—Electrochemical etching, anodic oxidation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0133—Wet etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Materials Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Weting (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Physical Vapour Deposition (AREA)
DE60239734T 2001-01-18 2002-01-11 Herstellung von mikromechanischen siliziumstrukturen Expired - Lifetime DE60239734D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP01810046 2001-01-18
PCT/IB2002/000154 WO2002057179A2 (en) 2001-01-18 2002-01-11 Fabrication of silicon micro mechanical structures

Publications (1)

Publication Number Publication Date
DE60239734D1 true DE60239734D1 (de) 2011-05-26

Family

ID=8183678

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60239734T Expired - Lifetime DE60239734D1 (de) 2001-01-18 2002-01-11 Herstellung von mikromechanischen siliziumstrukturen

Country Status (9)

Country Link
US (2) US6949397B2 (de)
EP (1) EP1383707B1 (de)
JP (1) JP3940362B2 (de)
KR (1) KR100495603B1 (de)
CN (1) CN1215968C (de)
AU (1) AU2002225276A1 (de)
DE (1) DE60239734D1 (de)
TW (1) TWI224578B (de)
WO (1) WO2002057179A2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7153440B2 (en) 2002-09-12 2006-12-26 Pts Corporation Surfactant-enhanced protection of micromechanical components from galvanic degradation
US6667457B1 (en) * 2002-09-17 2003-12-23 Hitachi Global Storage Technologies System and method for a sacrificial anode in a kerf for corrosion protection during slider fabrication
CN1309040C (zh) * 2004-06-29 2007-04-04 北京大学 一种将cmos电路与体硅mems单片集成的方法
US7597819B1 (en) * 2004-12-20 2009-10-06 Sandia Corporation Redox buffered hydrofluoric acid etchant for the reduction of galvanic attack during release etching of MEMS devices having noble material films
US20070228667A1 (en) * 2006-04-03 2007-10-04 Northrop Grumman Corporation Apparatus for preventing seal extrusion
CN100397616C (zh) * 2006-11-10 2008-06-25 北京大学 一种可去除残余硅的体硅mems与cmos电路集成的方法
EP2079099B1 (de) * 2008-01-11 2015-09-16 Imec Verfahren und Vorrichtung zur Verhinderung galvanischer Korrosion bei der Halbleiterverarbeitung
US7851975B2 (en) * 2008-09-02 2010-12-14 United Microelectronics Corp. MEMS structure with metal protection rings
US8535966B2 (en) 2010-07-27 2013-09-17 International Business Machines Corporation Horizontal coplanar switches and methods of manufacture
GB201215512D0 (en) * 2012-08-31 2012-10-17 Ibm Four terminal nano-electromechanical switch with a single mechanical contact
GB2505467A (en) 2012-08-31 2014-03-05 Ibm Dynamic logic gate comprising a nano-electro-mechanical switch
KR20140089650A (ko) 2013-01-03 2014-07-16 삼성디스플레이 주식회사 액정 표시 장치 및 그 제조 방법
US11149921B2 (en) * 2020-03-23 2021-10-19 AeroLEDS, LLC Aircraft light collimation and redirection apparatus and method

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62241363A (ja) * 1986-04-11 1987-10-22 Mitsubishi Electric Corp 半導体装置
US5059556A (en) * 1988-09-28 1991-10-22 Siemens-Bendix Automotive Electronics, L.P. Low stress polysilicon microstructures
US5164339A (en) * 1988-09-30 1992-11-17 Siemens-Bendix Automotive Electronics L.P. Fabrication of oxynitride frontside microstructures
US5914507A (en) * 1994-05-11 1999-06-22 Regents Of The University Of Minnesota PZT microdevice
JP3182301B2 (ja) * 1994-11-07 2001-07-03 キヤノン株式会社 マイクロ構造体及びその形成法
KR0152558B1 (ko) * 1995-10-12 1998-10-01 김광호 부식 방지용 리드 프레임 및 그 제조방법
EP0836226A4 (de) * 1996-04-19 2001-09-05 Matsushita Electronics Corp Halbleitervorrichtung
WO1997043656A2 (en) * 1996-05-17 1997-11-20 Formfactor, Inc. Wafer-level burn-in and test
US5903380A (en) * 1997-05-01 1999-05-11 Rockwell International Corp. Micro-electromechanical (MEM) optical resonator and method
US6647766B2 (en) * 1999-12-31 2003-11-18 International Business Machines Corporation Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever
US6580138B1 (en) * 2000-08-01 2003-06-17 Hrl Laboratories, Llc Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same

Also Published As

Publication number Publication date
EP1383707B1 (de) 2011-04-13
US6949397B2 (en) 2005-09-27
EP1383707A2 (de) 2004-01-28
WO2002057179A2 (en) 2002-07-25
WO2002057179A3 (en) 2003-11-20
CN1215968C (zh) 2005-08-24
JP3940362B2 (ja) 2007-07-04
TWI224578B (en) 2004-12-01
KR100495603B1 (ko) 2005-06-16
US7566939B2 (en) 2009-07-28
US20040135219A1 (en) 2004-07-15
CN1496333A (zh) 2004-05-12
US20050230839A1 (en) 2005-10-20
JP2004521753A (ja) 2004-07-22
KR20030088424A (ko) 2003-11-19
AU2002225276A1 (en) 2002-07-30

Similar Documents

Publication Publication Date Title
DE60217126D1 (de) Herstellung von aminopyrimidinverbindungen
NO20042680L (no) Fremgangsmater for fremstilling av O-demetylvenflaxine
DE60231151D1 (de) Silizium-mikrofon
DE60103821D1 (de) Herstellung von Oberflächenmodifitierte Kieselsäure
DE60210020D1 (de) Herstellung von Polysulfidzusammensetzungen
DE50100948D1 (de) Herstellung von Organosilanen
NO20014256D0 (no) Fremstilling av immunstimulerende forbindelse
DE60239734D1 (de) Herstellung von mikromechanischen siliziumstrukturen
NO20033737L (no) PEG-konjugater av HGT-NK4
DE60019960D1 (de) Herstellung von isobutencopolymere
NO20042667L (no) Fremgangsmate for fremstilling av escitalopram
DK1436322T3 (da) Blandinger af cyclosporinanaloger og deres anvendelse som immunmodulerende midler
ITMI20001883A0 (it) Procedimento integrato per la preparazione di epossidi
DE60132362D1 (de) Herstellung von ultradünnwandigen cordierit-strukturen
NO20041968L (no) Anvendelse av cystationin
DE60142051D1 (de) Herstellung von perfluorolefinen
DE60118678D1 (de) Herstellung von mikro-elektromechanischen Spiegelstrukturen
DE60201084D1 (de) Herstellung von cyclischen esteroligomeren
DE602004013599D1 (de) Herstellung von somatostatinpeptiden
DE60333439D1 (de) Herstellung von olefinen
DE60227896D1 (de) Verfahen zur Herstellung von Polyalkylphenoxyaminoalkanen
FI982832A0 (fi) Piimikromekaaninen vaaka
DE60307022D1 (de) Herstellung von Organohalosilanen
DE60117846D1 (de) Herstellung von 6-aminocaprinsäurealkylestern
NO20033163D0 (no) Ny anvendelse av iloperidon

Legal Events

Date Code Title Description
R084 Declaration of willingness to licence

Ref document number: 1383707

Country of ref document: EP