DE60236733D1 - Isoliertes schwingungsgyroskop - Google Patents

Isoliertes schwingungsgyroskop

Info

Publication number
DE60236733D1
DE60236733D1 DE60236733T DE60236733T DE60236733D1 DE 60236733 D1 DE60236733 D1 DE 60236733D1 DE 60236733 T DE60236733 T DE 60236733T DE 60236733 T DE60236733 T DE 60236733T DE 60236733 D1 DE60236733 D1 DE 60236733D1
Authority
DE
Germany
Prior art keywords
vibration gyroscope
isolated vibration
isolated
gyroscope
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60236733T
Other languages
English (en)
Inventor
Dorian A Challoner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Boeing Co
Original Assignee
Boeing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boeing Co filed Critical Boeing Co
Application granted granted Critical
Publication of DE60236733D1 publication Critical patent/DE60236733D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49007—Indicating transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/12—Gyroscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
DE60236733T 2001-08-10 2002-07-01 Isoliertes schwingungsgyroskop Expired - Lifetime DE60236733D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/928,279 US6629460B2 (en) 2001-08-10 2001-08-10 Isolated resonator gyroscope
PCT/US2002/020914 WO2003014668A1 (en) 2001-08-10 2002-07-01 Isolated resonator gyroscope

Publications (1)

Publication Number Publication Date
DE60236733D1 true DE60236733D1 (de) 2010-07-29

Family

ID=25456011

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60236733T Expired - Lifetime DE60236733D1 (de) 2001-08-10 2002-07-01 Isoliertes schwingungsgyroskop

Country Status (6)

Country Link
US (2) US6629460B2 (de)
EP (1) EP1415127B1 (de)
JP (1) JP2004537733A (de)
CN (1) CN100374820C (de)
DE (1) DE60236733D1 (de)
WO (1) WO2003014668A1 (de)

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US6955084B2 (en) * 2001-08-10 2005-10-18 The Boeing Company Isolated resonator gyroscope with compact flexures
US6990863B2 (en) * 2001-08-10 2006-01-31 The Boeing Company Isolated resonator gyroscope with isolation trimming using a secondary element
US6629460B2 (en) * 2001-08-10 2003-10-07 The Boeing Company Isolated resonator gyroscope
US7017410B2 (en) * 2001-08-10 2006-03-28 The Boeing Company Isolated resonator gyroscope with a drive and sense plate
US6854315B2 (en) * 2002-04-22 2005-02-15 Northrop Grumman Corporation Quadrature compensation technique for vibrating gyroscopes
US6823734B1 (en) * 2002-04-26 2004-11-30 California Institute Of Technology Electrostatic spring softening in redundant degree of freedom resonators
US6915215B2 (en) * 2002-06-25 2005-07-05 The Boeing Company Integrated low power digital gyro control electronics
US7040163B2 (en) * 2002-08-12 2006-05-09 The Boeing Company Isolated planar gyroscope with internal radial sensing and actuation
US6944931B2 (en) * 2002-08-12 2005-09-20 The Boeing Company Method of producing an integral resonator sensor and case
US7168318B2 (en) * 2002-08-12 2007-01-30 California Institute Of Technology Isolated planar mesogyroscope
US6922118B2 (en) * 2002-11-01 2005-07-26 Hrl Laboratories, Llc Micro electrical mechanical system (MEMS) tuning using focused ion beams
US8766745B1 (en) 2007-07-25 2014-07-01 Hrl Laboratories, Llc Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same
US7994877B1 (en) 2008-11-10 2011-08-09 Hrl Laboratories, Llc MEMS-based quartz hybrid filters and a method of making the same
US7581443B2 (en) * 2005-07-20 2009-09-01 The Boeing Company Disc resonator gyroscopes
US7285844B2 (en) * 2003-06-10 2007-10-23 California Institute Of Technology Multiple internal seal right micro-electro-mechanical system vacuum package
US6892575B2 (en) * 2003-10-20 2005-05-17 Invensense Inc. X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
US7437253B2 (en) * 2004-07-29 2008-10-14 The Boeing Company Parametrically disciplined operation of a vibratory gyroscope
EP1624284B1 (de) * 2004-07-29 2017-07-19 STMicroelectronics Srl Mikroelektromechanischer hochempfindlicher Inertialsensor und dessen Herstellungsverfahren
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US7232700B1 (en) 2004-12-08 2007-06-19 Hrl Laboratories, Llc Integrated all-Si capacitive microgyro with vertical differential sense and control and process for preparing an integrated all-Si capacitive microgyro with vertical differential sense
US7015060B1 (en) 2004-12-08 2006-03-21 Hrl Laboratories, Llc Cloverleaf microgyroscope with through-wafer interconnects and method of manufacturing a cloverleaf microgyroscope with through-wafer interconnects
US7442570B2 (en) 2005-03-18 2008-10-28 Invensence Inc. Method of fabrication of a AL/GE bonding in a wafer packaging environment and a product produced therefrom
US20070046397A1 (en) * 2005-08-01 2007-03-01 Purdue Research Foundation Nonlinear internal resonance based micromechanical resonators
US7555824B2 (en) 2006-08-09 2009-07-07 Hrl Laboratories, Llc Method for large scale integration of quartz-based devices
US7581994B2 (en) * 2006-08-10 2009-09-01 The Boeing Company Method and assembly for establishing an electrical interface between parts
US10266398B1 (en) 2007-07-25 2019-04-23 Hrl Laboratories, Llc ALD metal coatings for high Q MEMS structures
US7836765B2 (en) * 2007-07-31 2010-11-23 The Boeing Company Disc resonator integral inertial measurement unit
US8151640B1 (en) 2008-02-05 2012-04-10 Hrl Laboratories, Llc MEMS on-chip inertial navigation system with error correction
US7802356B1 (en) 2008-02-21 2010-09-28 Hrl Laboratories, Llc Method of fabricating an ultra thin quartz resonator component
US8327684B2 (en) 2008-10-21 2012-12-11 Teledyne Scientific & Imaging, Llc Method for adjusting resonance frequencies of a vibrating microelectromechanical device
US8322028B2 (en) 2009-04-01 2012-12-04 The Boeing Company Method of producing an isolator for a microelectromechanical system (MEMS) die
US8393212B2 (en) * 2009-04-01 2013-03-12 The Boeing Company Environmentally robust disc resonator gyroscope
US8327526B2 (en) 2009-05-27 2012-12-11 The Boeing Company Isolated active temperature regulator for vacuum packaging of a disc resonator gyroscope
US8176607B1 (en) 2009-10-08 2012-05-15 Hrl Laboratories, Llc Method of fabricating quartz resonators
US8567247B2 (en) * 2009-10-12 2013-10-29 The Regents Of The University Of California Three-dimensional wafer-scale batch-micromachined sensor and method of fabrication for the same
FR2952427B1 (fr) * 2009-11-12 2012-02-24 Sagem Defense Securite Resonateur comportant une couche de passivation, capteur vibrant comportant un tel resonateur et procede de fabrication
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US8912711B1 (en) 2010-06-22 2014-12-16 Hrl Laboratories, Llc Thermal stress resistant resonator, and a method for fabricating same
US9013233B2 (en) * 2010-09-14 2015-04-21 Si-Ware Systems Interface for MEMS inertial sensors
EP2508861B1 (de) * 2011-04-04 2018-11-07 Resonic GmbH System und Verfahren zur Bestimmung von Schwerkrafteigenschaften eines starren Körpers
US8960003B2 (en) * 2011-09-16 2015-02-24 Taiwan Semiconductor Manufacturing Company, Ltd. Motion sensor device and methods for forming the same
EP2573516B1 (de) 2011-09-21 2013-11-20 Tronics Microsystems S.A. Eine mikroelektromechanische Gyroskop-Vorrichtung
US9417067B1 (en) 2012-01-11 2016-08-16 The Boeing Company Electronic bias compensation for a gyroscope
US9417066B2 (en) 2012-01-11 2016-08-16 The Boeing Company Electronic bias compensation for a gyroscope
KR101285589B1 (ko) 2012-04-10 2013-07-23 연세대학교 산학협력단 미세전자기계시스템을 이용한 트라이볼로지 테스터기, 트라이볼로지 테스터기를 갖는 반도체 패키지
US9250074B1 (en) 2013-04-12 2016-02-02 Hrl Laboratories, Llc Resonator assembly comprising a silicon resonator and a quartz resonator
FR3005160B1 (fr) * 2013-04-29 2016-02-12 Sagem Defense Securite Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur
US9599470B1 (en) 2013-09-11 2017-03-21 Hrl Laboratories, Llc Dielectric high Q MEMS shell gyroscope structure
US9977097B1 (en) 2014-02-21 2018-05-22 Hrl Laboratories, Llc Micro-scale piezoelectric resonating magnetometer
US9991863B1 (en) 2014-04-08 2018-06-05 Hrl Laboratories, Llc Rounded and curved integrated tethers for quartz resonators
EP3161415A2 (de) 2014-06-26 2017-05-03 Lumedyne Technologies Incorporated System und verfahren zur bestimmung der drehung nichtlinearer periodischer signale
US10308505B1 (en) 2014-08-11 2019-06-04 Hrl Laboratories, Llc Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite
CN104121984B (zh) * 2014-08-16 2016-08-31 中北大学 一种高灵敏度谐振式mems矢量水听器结构
US10031191B1 (en) 2015-01-16 2018-07-24 Hrl Laboratories, Llc Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors
US10234476B2 (en) 2015-05-20 2019-03-19 Google Llc Extracting inertial information from nonlinear periodic signals
US10110198B1 (en) 2015-12-17 2018-10-23 Hrl Laboratories, Llc Integrated quartz MEMS tuning fork resonator/oscillator
US10175307B1 (en) 2016-01-15 2019-01-08 Hrl Laboratories, Llc FM demodulation system for quartz MEMS magnetometer
ITUA20162172A1 (it) * 2016-03-31 2017-10-01 St Microelectronics Srl Sensore accelerometrico realizzato in tecnologia mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento
US10234477B2 (en) 2016-07-27 2019-03-19 Google Llc Composite vibratory in-plane accelerometer
JP6640176B2 (ja) * 2016-12-19 2020-02-05 アナログ ディヴァイスィズ インク 同期化マスジャイロスコープ
US11237000B1 (en) 2018-05-09 2022-02-01 Hrl Laboratories, Llc Disk resonator gyroscope with out-of-plane electrodes
JP2020030067A (ja) * 2018-08-21 2020-02-27 セイコーエプソン株式会社 物理量センサー、センサーデバイス、電子機器、および移動体
CN109976369A (zh) * 2019-04-19 2019-07-05 南昌航空大学 一种传感信息追踪控制系统
US11082767B1 (en) * 2019-09-28 2021-08-03 Facebook Technologies, Llc Nonlinear suspension component in a tissue conducting vibration isolation system
CN113865573B (zh) * 2021-11-08 2024-01-09 山东理工大学 一种基于压电/电容驱动检测的陀螺结构

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Also Published As

Publication number Publication date
US20040200280A1 (en) 2004-10-14
US7100444B2 (en) 2006-09-05
EP1415127B1 (de) 2010-06-16
WO2003014668A1 (en) 2003-02-20
CN100374820C (zh) 2008-03-12
CN1568420A (zh) 2005-01-19
JP2004537733A (ja) 2004-12-16
US6629460B2 (en) 2003-10-07
EP1415127A1 (de) 2004-05-06
US20030029238A1 (en) 2003-02-13

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