DE60231181D1 - Verfahren zum Abgleich und zur Stabilisierung der Frequenz eines akustischen Resonators - Google Patents

Verfahren zum Abgleich und zur Stabilisierung der Frequenz eines akustischen Resonators

Info

Publication number
DE60231181D1
DE60231181D1 DE60231181T DE60231181T DE60231181D1 DE 60231181 D1 DE60231181 D1 DE 60231181D1 DE 60231181 T DE60231181 T DE 60231181T DE 60231181 T DE60231181 T DE 60231181T DE 60231181 D1 DE60231181 D1 DE 60231181D1
Authority
DE
Germany
Prior art keywords
stabilizing
adjusting
frequency
acoustic resonator
resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60231181T
Other languages
English (en)
Inventor
Richard C Ruby
Joe Quingzhe Wen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Avago Technologies International Sales Pte Ltd
Original Assignee
Avago Technologies Wireless IP Singapore Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Avago Technologies Wireless IP Singapore Pte Ltd filed Critical Avago Technologies Wireless IP Singapore Pte Ltd
Application granted granted Critical
Publication of DE60231181D1 publication Critical patent/DE60231181D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE60231181T 2001-11-27 2002-09-13 Verfahren zum Abgleich und zur Stabilisierung der Frequenz eines akustischen Resonators Expired - Lifetime DE60231181D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/996,951 US6710508B2 (en) 2001-11-27 2001-11-27 Method for adjusting and stabilizing the frequency of an acoustic resonator

Publications (1)

Publication Number Publication Date
DE60231181D1 true DE60231181D1 (de) 2009-04-02

Family

ID=25543465

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60231181T Expired - Lifetime DE60231181D1 (de) 2001-11-27 2002-09-13 Verfahren zum Abgleich und zur Stabilisierung der Frequenz eines akustischen Resonators

Country Status (4)

Country Link
US (1) US6710508B2 (de)
EP (1) EP1315294B1 (de)
JP (1) JP4010545B2 (de)
DE (1) DE60231181D1 (de)

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US8248185B2 (en) * 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
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JP5617523B2 (ja) * 2009-12-08 2014-11-05 株式会社村田製作所 積層型圧電薄膜フィルタの製造方法
US9243316B2 (en) 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
US8796904B2 (en) 2011-10-31 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
US8962443B2 (en) 2011-01-31 2015-02-24 Avago Technologies General Ip (Singapore) Pte. Ltd. Semiconductor device having an airbridge and method of fabricating the same
US9136818B2 (en) 2011-02-28 2015-09-15 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked acoustic resonator comprising a bridge
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US9148117B2 (en) 2011-02-28 2015-09-29 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge and frame elements
US9154112B2 (en) 2011-02-28 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge
US9083302B2 (en) 2011-02-28 2015-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
US9048812B2 (en) 2011-02-28 2015-06-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
US9425764B2 (en) 2012-10-25 2016-08-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having composite electrodes with integrated lateral features
US9444426B2 (en) 2012-10-25 2016-09-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having integrated lateral feature and temperature compensation feature
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US8922302B2 (en) 2011-08-24 2014-12-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator formed on a pedestal
US8923794B2 (en) * 2011-11-02 2014-12-30 Triquint Semiconductor, Inc. Temperature compensation of acoustic resonators in the electrical domain
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CN110741550B (zh) * 2017-06-20 2023-07-25 株式会社村田制作所 谐振器以及谐振装置
CN111355459B (zh) * 2020-03-26 2023-06-20 中国科学院半导体研究所 基于电化学腐蚀的mems谐振器频率修调方法
TWI721934B (zh) * 2020-10-22 2021-03-11 台灣奈米碳素股份有限公司 製造具特定共振頻率之薄膜體聲波共振裝置的方法

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Also Published As

Publication number Publication date
EP1315294A3 (de) 2004-06-16
JP2003209451A (ja) 2003-07-25
EP1315294B1 (de) 2009-02-18
JP4010545B2 (ja) 2007-11-21
EP1315294A2 (de) 2003-05-28
US6710508B2 (en) 2004-03-23
US20030098631A1 (en) 2003-05-29

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