DE60227764D1 - Herstellungsverfahren für Spiegel für Komponenten der integrierten Optik - Google Patents

Herstellungsverfahren für Spiegel für Komponenten der integrierten Optik

Info

Publication number
DE60227764D1
DE60227764D1 DE60227764T DE60227764T DE60227764D1 DE 60227764 D1 DE60227764 D1 DE 60227764D1 DE 60227764 T DE60227764 T DE 60227764T DE 60227764 T DE60227764 T DE 60227764T DE 60227764 D1 DE60227764 D1 DE 60227764D1
Authority
DE
Germany
Prior art keywords
mirrors
manufacturing process
integrated optics
optics components
components
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60227764T
Other languages
English (en)
Inventor
Luc Quellet
Yves Tremblay
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teledyne Digital Imaging Inc
Original Assignee
Dalsa Semiconductor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dalsa Semiconductor Inc filed Critical Dalsa Semiconductor Inc
Application granted granted Critical
Publication of DE60227764D1 publication Critical patent/DE60227764D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0891—Ultraviolet [UV] mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0808—Mirrors having a single reflecting layer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
    • G02B6/29316—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide
    • G02B6/29325—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide of the slab or planar or plate like form, i.e. confinement in a single transverse dimension only
    • G02B6/29326—Diffractive elements having focusing properties, e.g. curved gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
    • G02B6/29316—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide
    • G02B6/29325—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide of the slab or planar or plate like form, i.e. confinement in a single transverse dimension only
    • G02B6/29328—Diffractive elements operating in reflection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Physical Vapour Deposition (AREA)
  • Spectrometry And Color Measurement (AREA)
DE60227764T 2001-11-16 2002-11-18 Herstellungsverfahren für Spiegel für Komponenten der integrierten Optik Expired - Lifetime DE60227764D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/987,829 US6656528B2 (en) 2001-11-16 2001-11-16 Method of making specular infrared mirrors for use in optical devices

Publications (1)

Publication Number Publication Date
DE60227764D1 true DE60227764D1 (de) 2008-09-04

Family

ID=25533605

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60227764T Expired - Lifetime DE60227764D1 (de) 2001-11-16 2002-11-18 Herstellungsverfahren für Spiegel für Komponenten der integrierten Optik

Country Status (3)

Country Link
US (1) US6656528B2 (de)
EP (1) EP1312949B1 (de)
DE (1) DE60227764D1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7265439B1 (en) * 1999-11-30 2007-09-04 Avago Technologies Fiber Ip (Singapore) Pte. Ltd. Low cost, high speed, high efficiency infrared transceiver
US6787919B2 (en) * 2001-12-27 2004-09-07 Intel Corporation Flip-chip opto-electronic circuit
DE10392881B4 (de) * 2002-07-01 2007-09-06 Lightgage Inc. Frequenzabtast-Interferometer mit diffus-reflektierender Referenzoberfläche
US7505284B2 (en) * 2005-05-12 2009-03-17 International Business Machines Corporation System for assembling electronic components of an electronic system
US7462560B2 (en) * 2005-08-11 2008-12-09 United Microelectronics Corp. Process of physical vapor depositing mirror layer with improved reflectivity
US7852475B2 (en) * 2007-08-13 2010-12-14 Jds Uniphase Corporation Scanning spectrometer with multiple photodetectors
GB2501891B (en) * 2012-05-09 2016-08-03 Original Design Services Ltd Radiography imaging system
US9816860B2 (en) 2014-08-22 2017-11-14 Spectrasensors, Inc. Spectrometer with active beam steering
US9518866B2 (en) 2014-08-22 2016-12-13 Spectrasensors, Inc. Spectrometer with variable beam power and shape
TWM532577U (zh) * 2015-03-24 2016-11-21 山姆科技公司 具有紋理表面的光學阻障物
US10024788B2 (en) * 2015-05-04 2018-07-17 Spectrasensors, Inc. Spectrometer with random beam profiles
US10097281B1 (en) 2015-11-18 2018-10-09 Hypres, Inc. System and method for cryogenic optoelectronic data link

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3498818A (en) * 1968-01-23 1970-03-03 Gen Electric Method of making highly reflective aluminum films
US4274706A (en) 1979-08-30 1981-06-23 Hughes Aircraft Company Wavelength multiplexer/demultiplexer for optical circuits
DE3107612A1 (de) * 1981-02-27 1982-09-16 Siemens AG, 1000 Berlin und 8000 München Laserspiegel, insbesondere laser-polygonspiegel
US4564509A (en) * 1983-06-30 1986-01-14 Northeast Semiconductor Inc. Method and apparatus for improved gettering for reactant gases
FR2609180B1 (fr) 1986-12-31 1989-11-03 Commissariat Energie Atomique Multiplexeur-demultiplexeur utilisant un reseau concave elliptique et realise en optique integree
JPH03266803A (ja) * 1990-03-16 1991-11-27 Mitsubishi Electric Corp 短波長用ミラーの形成方法
CA2032763C (en) 1990-12-20 2001-08-21 Mitel Corporation Prevention of via poisoning by glow discharge induced desorption
CH683188A5 (de) * 1991-01-11 1994-01-31 Alusuisse Lonza Services Ag Aluminiumoberflächen.
US5793912A (en) 1994-06-09 1998-08-11 Apa Optics, Inc. Tunable receiver for a wavelength division multiplexing optical apparatus and method
US5608826A (en) 1994-06-09 1997-03-04 Apa Optics, Inc. Wavelength division multiplexed optical modulator and multiplexing method using same
US5450510A (en) 1994-06-09 1995-09-12 Apa Optics, Inc. Wavelength division multiplexed optical modulator and multiplexing method using same
KR100304161B1 (ko) * 1996-12-18 2001-11-30 미다라이 후지오 반도체부재의제조방법
JP3349931B2 (ja) * 1997-10-30 2002-11-25 松下電器産業株式会社 半導体レーザ装置の製造方法
US6294441B1 (en) * 1998-08-18 2001-09-25 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a semiconductor device
US6265033B1 (en) * 1998-09-11 2001-07-24 Donald Bennett Hilliard Method for optically coupled vapor deposition

Also Published As

Publication number Publication date
EP1312949A2 (de) 2003-05-21
EP1312949B1 (de) 2008-07-23
US20030094433A1 (en) 2003-05-22
EP1312949A3 (de) 2004-10-13
US6656528B2 (en) 2003-12-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition