DE60214617D1 - Piezoelektrisches/elektrostriktives Dünnfilmelement - Google Patents

Piezoelektrisches/elektrostriktives Dünnfilmelement

Info

Publication number
DE60214617D1
DE60214617D1 DE60214617T DE60214617T DE60214617D1 DE 60214617 D1 DE60214617 D1 DE 60214617D1 DE 60214617 T DE60214617 T DE 60214617T DE 60214617 T DE60214617 T DE 60214617T DE 60214617 D1 DE60214617 D1 DE 60214617D1
Authority
DE
Germany
Prior art keywords
piezoelectric
film element
electrostrictive thin
electrostrictive
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60214617T
Other languages
English (en)
Other versions
DE60214617T2 (de
Inventor
Hirofumi Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE60214617D1 publication Critical patent/DE60214617D1/de
Application granted granted Critical
Publication of DE60214617T2 publication Critical patent/DE60214617T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
DE60214617T 2001-03-02 2002-03-01 Piezoelektrisches/elektrostriktives Dünnfilmelement Expired - Lifetime DE60214617T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001059118 2001-03-02
JP2001059118A JP3728623B2 (ja) 2001-03-02 2001-03-02 圧電／電歪膜型素子

Publications (2)

Publication Number Publication Date
DE60214617D1 true DE60214617D1 (de) 2006-10-26
DE60214617T2 DE60214617T2 (de) 2007-09-13

Family

ID=18918734

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60214617T Expired - Lifetime DE60214617T2 (de) 2001-03-02 2002-03-01 Piezoelektrisches/elektrostriktives Dünnfilmelement

Country Status (4)

Country Link
US (1) US6541895B2 (de)
EP (1) EP1237204B1 (de)
JP (1) JP3728623B2 (de)
DE (1) DE60214617T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4038776B2 (ja) * 2003-02-10 2008-01-30 セイコーエプソン株式会社 液体検出装置及び同装置を備えた液体容器
KR100528350B1 (ko) * 2004-02-27 2005-11-15 삼성전자주식회사 잉크젯 프린트헤드의 압전 액츄에이터 및 그 형성 방법
US7126255B2 (en) * 2004-04-05 2006-10-24 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film-type device
JP5009507B2 (ja) * 2004-04-05 2012-08-22 日本碍子株式会社 圧電／電歪膜型素子
JP2006147839A (ja) * 2004-11-19 2006-06-08 Ngk Insulators Ltd 圧電／電歪デバイス
JP4963159B2 (ja) 2004-11-19 2012-06-27 日本碍子株式会社 圧電／電歪デバイス
EP1909340B1 (de) * 2005-06-29 2012-10-24 NGK Insulators, Ltd. Element des piezoelektrischen bzw.elektrostriktionsfilmtyps
WO2007123278A1 (ja) 2006-04-24 2007-11-01 Ngk Insulators, Ltd. 圧電／電歪膜型素子
WO2008004701A1 (fr) * 2006-07-04 2008-01-10 Ngk Insulators, Ltd. Capteur à film piézoélectrique
US8261618B2 (en) * 2010-11-22 2012-09-11 General Electric Company Device for measuring properties of working fluids
JP6133655B2 (ja) * 2013-03-29 2017-05-24 日本碍子株式会社 圧電／電歪素子とその製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2665106B2 (ja) * 1992-03-17 1997-10-22 日本碍子株式会社 圧電／電歪膜型素子
JP3151644B2 (ja) * 1993-03-08 2001-04-03 日本碍子株式会社 圧電／電歪膜型素子
JP3521499B2 (ja) * 1993-11-26 2004-04-19 日本碍子株式会社 圧電／電歪膜型素子
JP3501860B2 (ja) * 1994-12-21 2004-03-02 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
US6004474A (en) * 1997-03-28 1999-12-21 Tdk Corporation Piezoelectric ceramic composition
JP3648086B2 (ja) * 1998-03-27 2005-05-18 日本碍子株式会社 ＺｒＯ２磁器
US6502928B1 (en) * 1998-07-29 2003-01-07 Seiko Epson Corporation Ink jet recording head and ink jet recording apparatus comprising the same
JP3482939B2 (ja) * 2000-05-09 2004-01-06 日本碍子株式会社 圧電／電歪膜型素子

Also Published As

Publication number Publication date
JP3728623B2 (ja) 2005-12-21
US6541895B2 (en) 2003-04-01
JP2002261347A (ja) 2002-09-13
DE60214617T2 (de) 2007-09-13
EP1237204A2 (de) 2002-09-04
EP1237204A3 (de) 2005-02-09
EP1237204B1 (de) 2006-09-13
US20020158550A1 (en) 2002-10-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition