DE602008005096D1 - Optisches Element für Röntgenstrahlen - Google Patents

Optisches Element für Röntgenstrahlen

Info

Publication number
DE602008005096D1
DE602008005096D1 DE200860005096 DE602008005096T DE602008005096D1 DE 602008005096 D1 DE602008005096 D1 DE 602008005096D1 DE 200860005096 DE200860005096 DE 200860005096 DE 602008005096 T DE602008005096 T DE 602008005096T DE 602008005096 D1 DE602008005096 D1 DE 602008005096D1
Authority
DE
Germany
Prior art keywords
rays
optical element
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE200860005096
Other languages
English (en)
Inventor
Takayuki Miura
Kenji Ando
Hidehiro Kanazawa
Koji Teranishi
Seiken Matsumoto
Kyoko Nagata
Shumpei Tatsumi
Shinji Fukui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE602008005096D1 publication Critical patent/DE602008005096D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

DE200860005096 2007-12-05 2008-12-04 Optisches Element für Röntgenstrahlen Active DE602008005096D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007314369 2007-12-05
JP2008278429A JP2009156863A (ja) 2007-12-05 2008-10-29 Ｘ線用光学素子

Publications (1)

Publication Number Publication Date
DE602008005096D1 true DE602008005096D1 (de) 2011-04-07

Family

ID=40961019

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200860005096 Active DE602008005096D1 (de) 2007-12-05 2008-12-04 Optisches Element für Röntgenstrahlen

Country Status (3)

Country Link
JP (1) JP2009156863A (de)
AT (1) ATE499687T1 (de)
DE (1) DE602008005096D1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5552635B2 (ja) * 2010-05-28 2014-07-16 国立大学法人京都大学 中性子ミラーの製造方法及び中性子ミラー
DE102011077983A1 (de) * 2011-06-22 2012-12-27 Carl Zeiss Smt Gmbh Verfahren zur Herstellung eines reflektiven optischen Elements für die EUV-Lithographie
JP2015018918A (ja) * 2013-07-10 2015-01-29 キヤノン株式会社 反射型原版、露光方法及びデバイス製造方法

Also Published As

Publication number Publication date
JP2009156863A (ja) 2009-07-16
ATE499687T1 (de) 2011-03-15

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