DE60200732D1 - Elektromechanischer Microschalter mit einem einzelnen Anker - Google Patents

Elektromechanischer Microschalter mit einem einzelnen Anker

Info

Publication number
DE60200732D1
DE60200732D1 DE60200732T DE60200732T DE60200732D1 DE 60200732 D1 DE60200732 D1 DE 60200732D1 DE 60200732 T DE60200732 T DE 60200732T DE 60200732 T DE60200732 T DE 60200732T DE 60200732 D1 DE60200732 D1 DE 60200732D1
Authority
DE
Germany
Prior art keywords
single armature
electromechanical microswitch
microswitch
electromechanical
armature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60200732T
Other languages
English (en)
Other versions
DE60200732T2 (de
Inventor
Seok-Jin Kang
Jin-Woo Cho
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of DE60200732D1 publication Critical patent/DE60200732D1/de
Application granted granted Critical
Publication of DE60200732T2 publication Critical patent/DE60200732T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00Electrostatic relays; Electro-adhesion relays
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00Electrostatic relays; Electro-adhesion relays
    • H01H59/0009Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00Contacts
    • H01H1/12Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20Bridging contacts
DE60200732T 2001-05-10 2002-05-09 Elektromechanischer Microschalter mit einem einzelnen Anker Expired - Lifetime DE60200732T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2001-0025568A KR100519749B1 (ko) 2001-05-10 2001-05-10 단일 앵커를 구비하는 마이크로 전자 기계시스템(mems) 스위치
KR2001025568 2001-05-10

Publications (2)

Publication Number Publication Date
DE60200732D1 true DE60200732D1 (de) 2004-08-19
DE60200732T2 DE60200732T2 (de) 2005-07-21

Family

ID=19709302

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60200732T Expired - Lifetime DE60200732T2 (de) 2001-05-10 2002-05-09 Elektromechanischer Microschalter mit einem einzelnen Anker

Country Status (6)

Country Link
US (1) US6628183B2 (de)
EP (1) EP1256970B1 (de)
JP (1) JP3986881B2 (de)
KR (1) KR100519749B1 (de)
CN (1) CN1211274C (de)
DE (1) DE60200732T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100554468B1 (ko) 2003-12-26 2006-03-03 한국전자통신연구원 자기유지 중앙지지대를 갖는 미세 전자기계적 스위치 및그의 제조방법
US7373717B2 (en) 2004-03-16 2008-05-20 Electronics And Telecommunications Research Institute Method of manufacturing a self-sustaining center-anchor microelectromechanical switch
US7102472B1 (en) * 2004-05-06 2006-09-05 Northrop Grumman Corporation MEMS device
US7429864B2 (en) * 2004-12-17 2008-09-30 Hewlett-Packard Development Company, L.P. Systems and methods for rectifying and detecting signals
US7391090B2 (en) * 2004-12-17 2008-06-24 Hewlett-Packard Development Company, L.P. Systems and methods for electrically coupling wires and conductors
US7503989B2 (en) * 2004-12-17 2009-03-17 Hewlett-Packard Development Company, L.P. Methods and systems for aligning and coupling devices
US7521784B2 (en) * 2004-12-17 2009-04-21 Hewlett-Packard Development Company, L.P. System for coupling wire to semiconductor region
JP4792994B2 (ja) * 2005-03-14 2011-10-12 オムロン株式会社 静電マイクロ接点開閉器およびその製造方法、ならびに静電マイクロ接点開閉器を用いた装置
JP4966562B2 (ja) * 2006-02-28 2012-07-04 富士フイルム株式会社 微小電気機械式素子、微小電気機械式素子アレイ、光変調素子、微小電気機械式光変調素子、微小電気機械式光変調素子アレイ、及びこれらを用いた画像形成装置
KR100738114B1 (ko) * 2006-05-18 2007-07-12 삼성전자주식회사 액츄에이터 및 이차원 스캐너
JP6433349B2 (ja) * 2015-03-19 2018-12-05 三菱電機株式会社 半導体圧力センサおよびその製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4305033A1 (de) * 1992-02-21 1993-10-28 Siemens Ag Mikromechanisches Relais mit Hybridantrieb
US5619061A (en) * 1993-07-27 1997-04-08 Texas Instruments Incorporated Micromechanical microwave switching
DE69828430T2 (de) * 1997-10-21 2005-12-15 Omron Corp. Elektrostatisches mikrorelais
JP3796988B2 (ja) * 1998-11-26 2006-07-12 オムロン株式会社 静電マイクロリレー
US6147856A (en) * 1999-03-31 2000-11-14 International Business Machine Corporation Variable capacitor with wobble motor disc selector
US6549394B1 (en) * 2002-03-22 2003-04-15 Agilent Technologies, Inc. Micromachined parallel-plate variable capacitor with plate suspension

Also Published As

Publication number Publication date
EP1256970B1 (de) 2004-07-14
JP3986881B2 (ja) 2007-10-03
CN1385357A (zh) 2002-12-18
US20020167380A1 (en) 2002-11-14
EP1256970A1 (de) 2002-11-13
KR100519749B1 (ko) 2005-10-07
CN1211274C (zh) 2005-07-20
KR20020085988A (ko) 2002-11-18
DE60200732T2 (de) 2005-07-21
JP2003036777A (ja) 2003-02-07
US6628183B2 (en) 2003-09-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition