DE602007006249D1 - Vorrichtung zur Analyse fluoreszenter Röntgenstrahlen - Google Patents

Vorrichtung zur Analyse fluoreszenter Röntgenstrahlen

Info

Publication number
DE602007006249D1
DE602007006249D1 DE602007006249T DE602007006249T DE602007006249D1 DE 602007006249 D1 DE602007006249 D1 DE 602007006249D1 DE 602007006249 T DE602007006249 T DE 602007006249T DE 602007006249 T DE602007006249 T DE 602007006249T DE 602007006249 D1 DE602007006249 D1 DE 602007006249D1
Authority
DE
Germany
Prior art keywords
rays
fluorescent
analysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007006249T
Other languages
German (de)
English (en)
Inventor
Norio Sasayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Analysis Corp
Original Assignee
SII NanoTechnology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SII NanoTechnology Inc filed Critical SII NanoTechnology Inc
Publication of DE602007006249D1 publication Critical patent/DE602007006249D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/07Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076X-ray fluorescence

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE602007006249T 2006-06-06 2007-06-06 Vorrichtung zur Analyse fluoreszenter Röntgenstrahlen Active DE602007006249D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006156821A JP4902272B2 (ja) 2006-06-06 2006-06-06 蛍光x線分析装置

Publications (1)

Publication Number Publication Date
DE602007006249D1 true DE602007006249D1 (de) 2010-06-17

Family

ID=38283646

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007006249T Active DE602007006249D1 (de) 2006-06-06 2007-06-06 Vorrichtung zur Analyse fluoreszenter Röntgenstrahlen

Country Status (5)

Country Link
US (1) US7471763B2 (https=)
EP (1) EP1865309B1 (https=)
JP (1) JP4902272B2 (https=)
CN (1) CN101093201B (https=)
DE (1) DE602007006249D1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100310041A1 (en) * 2009-06-03 2010-12-09 Adams William L X-Ray System and Methods with Detector Interior to Focusing Element
US8439520B2 (en) * 2010-10-21 2013-05-14 Rambus Delaware Llc Color-configurable lighting assembly
CN102841108B (zh) * 2012-03-09 2014-12-17 深圳市华唯计量技术开发有限公司 一种偏振二次靶能量色散型x射线荧光光谱仪
US11029263B2 (en) * 2015-12-09 2021-06-08 Integrated-X, Inc. Systems and methods for inspection using electromagnetic radiation

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3944822A (en) * 1974-09-30 1976-03-16 The United States Of America As Represented By The Administrator Of The U. S. Environmental Protection Agency Polarization excitation device for X-ray fluorescence analysis
SU1045094A1 (ru) 1982-05-04 1983-09-30 Научно-исследовательский институт ядерной физики при Томском политехническом институте им.С.М.Кирова Устройство дл рентгенофлуоресцентного анализа вещества
JPH088314A (ja) * 1994-06-24 1996-01-12 Toshiba Corp 半導体分析装置
FI102697B1 (fi) * 1997-06-26 1999-01-29 Metorex Int Oy Polarisoitua herätesäteilyä hyödyntävä röntgenfluoresenssimittausjärjestely ja röntgenputki
JP3013827B2 (ja) * 1997-12-12 2000-02-28 日本電気株式会社 X線偏光分析器及びそれを用いたx線偏光分析方法
DE19826294C1 (de) * 1998-06-12 2000-02-10 Glukomeditech Ag Polarimetrisches Verfahren zur Bestimmung der (Haupt-)Schwingungsebene polarisierten Lichts auf etwa 0,1m DEG und miniaturisierbare Vorrichtung zu seiner Durchführung
JP3498689B2 (ja) * 2000-07-31 2004-02-16 株式会社島津製作所 モノクロ線源励起用モノクロメータ及び蛍光x線分析装置
JP2004004125A (ja) * 2003-08-22 2004-01-08 Shimadzu Corp 蛍光x線分析装置
JP4754957B2 (ja) * 2005-12-08 2011-08-24 株式会社リガク 多元素同時型蛍光x線分析装置

Also Published As

Publication number Publication date
US7471763B2 (en) 2008-12-30
EP1865309A1 (en) 2007-12-12
JP4902272B2 (ja) 2012-03-21
CN101093201B (zh) 2011-08-03
EP1865309B1 (en) 2010-05-05
JP2007327756A (ja) 2007-12-20
US20070280414A1 (en) 2007-12-06
CN101093201A (zh) 2007-12-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition