DE602007004656D1 - Vorrichtung zur Plasmaverarbeitung ein- oder zweidimensionaler Artikel - Google Patents

Vorrichtung zur Plasmaverarbeitung ein- oder zweidimensionaler Artikel

Info

Publication number
DE602007004656D1
DE602007004656D1 DE602007004656T DE602007004656T DE602007004656D1 DE 602007004656 D1 DE602007004656 D1 DE 602007004656D1 DE 602007004656 T DE602007004656 T DE 602007004656T DE 602007004656 T DE602007004656 T DE 602007004656T DE 602007004656 D1 DE602007004656 D1 DE 602007004656D1
Authority
DE
Germany
Prior art keywords
gas
discharge region
plasma
dimensional articles
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007004656T
Other languages
English (en)
Inventor
Giorgio Apostolo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Apostolo Giorgio Ivrea It
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE602007004656D1 publication Critical patent/DE602007004656D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
    • H01J37/32761—Continuous moving
    • H01J37/3277—Continuous moving of continuous material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32825—Working under atmospheric pressure or higher

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Manufacture And Refinement Of Metals (AREA)
DE602007004656T 2006-07-17 2007-07-16 Vorrichtung zur Plasmaverarbeitung ein- oder zweidimensionaler Artikel Active DE602007004656D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT000522A ITTO20060522A1 (it) 2006-07-17 2006-07-17 Apparecchiatura per il trattamento al plasma di articoli uni- o bi-dimensionali

Publications (1)

Publication Number Publication Date
DE602007004656D1 true DE602007004656D1 (de) 2010-03-25

Family

ID=38537558

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007004656T Active DE602007004656D1 (de) 2006-07-17 2007-07-16 Vorrichtung zur Plasmaverarbeitung ein- oder zweidimensionaler Artikel

Country Status (4)

Country Link
EP (1) EP1887609B1 (de)
AT (1) ATE457080T1 (de)
DE (1) DE602007004656D1 (de)
IT (1) ITTO20060522A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202008006477U1 (de) * 2008-05-06 2008-07-24 Forschungs- Und Applikationslabor Plasmatechnik Gmbh Dresden Vorrichtung zur Modifizierung von Substratoberflächen
FI20235124A1 (en) * 2023-02-08 2024-08-09 Spinnova Oyj Arrangements for controlling the route of a material during transport and corresponding procedure

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6116185A (en) * 1996-05-01 2000-09-12 Rietzel; James G. Gas injector for plasma enhanced chemical vapor deposition
EP1115141A1 (de) * 2000-01-06 2001-07-11 TePla AG Verfahren und Vorrichtung zur Plasmabehandlung eines drahtförmigen Körpers
WO2004087991A1 (ja) 2003-03-31 2004-10-14 Konica Minolta Holdings, Inc. 薄膜形成装置及び薄膜形成方法

Also Published As

Publication number Publication date
ITTO20060522A1 (it) 2008-01-18
EP1887609A1 (de) 2008-02-13
EP1887609B1 (de) 2010-02-03
ATE457080T1 (de) 2010-02-15

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: APOSTOLO, GIORGIO, IVREA, IT

8381 Inventor (new situation)

Inventor name: APOSTOLO, GIORGIO, 10015 IVREA, IT

8364 No opposition during term of opposition