DE602007002411D1 - Erungsmitteln - Google Patents
ErungsmittelnInfo
- Publication number
- DE602007002411D1 DE602007002411D1 DE602007002411T DE602007002411T DE602007002411D1 DE 602007002411 D1 DE602007002411 D1 DE 602007002411D1 DE 602007002411 T DE602007002411 T DE 602007002411T DE 602007002411 T DE602007002411 T DE 602007002411T DE 602007002411 D1 DE602007002411 D1 DE 602007002411D1
- Authority
- DE
- Germany
- Prior art keywords
- electrodes
- arm
- lateral
- central
- excitation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000005284 excitation Effects 0.000 abstract 4
- 239000002184 metal Substances 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H2003/026—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the tuning fork type
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Gyroscopes (AREA)
- Memory System Of A Hierarchy Structure (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US46182406A | 2006-08-02 | 2006-08-02 | |
EP06118326A EP1887691A1 (de) | 2006-08-02 | 2006-08-02 | Piezoelektrischer Resonator mit Mitteln zur Kurzschlussvermeidung |
PCT/CH2007/000375 WO2008014628A1 (en) | 2006-08-02 | 2007-07-31 | Piezoelectric resonator with short-circu its preventi ng means |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602007002411D1 true DE602007002411D1 (de) | 2009-10-22 |
Family
ID=38626707
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602007002411T Active DE602007002411D1 (de) | 2006-08-02 | 2007-07-31 | Erungsmitteln |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP2052458B1 (de) |
AT (1) | ATE442702T1 (de) |
DE (1) | DE602007002411D1 (de) |
WO (1) | WO2008014628A1 (de) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1600706A (en) * | 1977-09-17 | 1981-10-21 | Citizen Watch Co Ltd | Subminiature quartz crystal vibrator and method for manufacturing the same |
US6894428B2 (en) * | 2001-01-15 | 2005-05-17 | Seiko Epson Corporation | Vibrating piece, vibrator, oscillator, and electronic device |
US7138288B2 (en) * | 2003-03-28 | 2006-11-21 | Citizen Watch Co., Ltd. | Method for manufacturing small crystal resonator |
JP4329492B2 (ja) * | 2003-10-28 | 2009-09-09 | セイコーエプソン株式会社 | 圧電振動片と圧電デバイスおよびこれらの製造方法、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器 |
-
2007
- 2007-07-31 EP EP07785070A patent/EP2052458B1/de active Active
- 2007-07-31 AT AT07785070T patent/ATE442702T1/de not_active IP Right Cessation
- 2007-07-31 WO PCT/CH2007/000375 patent/WO2008014628A1/en active Search and Examination
- 2007-07-31 DE DE602007002411T patent/DE602007002411D1/de active Active
Also Published As
Publication number | Publication date |
---|---|
ATE442702T1 (de) | 2009-09-15 |
EP2052458B1 (de) | 2009-09-09 |
WO2008014628A1 (en) | 2008-02-07 |
EP2052458A1 (de) | 2009-04-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ATE390759T1 (de) | Piezoelektrischer resonator mit kleinen abmessungen | |
ATE453954T1 (de) | Piezoelektrischer resonator mit optimierten bewegungsfähigkeiten | |
ATE382984T1 (de) | Piezoelektrischer resonator, piezoelektrische vorrichtung, herstellungsverfahren derselben, mobiltelefon und elektronische ausrüstung welche eine piezoelektrische vorrichtung benutzen. | |
DE602007007643D1 (de) | Siliziumresonator des stimmgabeltyps | |
TW200746630A (en) | Piezoelectric resonator and method for manufacturing thereof | |
ATE421799T1 (de) | Kompakter piezoelektrischer resonator | |
JP4319657B2 (ja) | 圧電振動子 | |
DE602004027033D1 (de) | Quartzresonator mit sehr kleinen Abmessungen | |
TW200644049A (en) | Film bulk acoustic resonator and filter circuit | |
JP2008178021A5 (de) | ||
JP2010232932A5 (ja) | 振動片 | |
JP2012054946A5 (de) | ||
BRPI0507502A (pt) | espelho bimorfo com duas camadas piezoelétricas separadas por um núcleo central de material semi-rìgido | |
DE602007002411D1 (de) | Erungsmitteln | |
JP2008278489A5 (de) | ||
JP2011228980A5 (de) | ||
JP2005227215A (ja) | 角速度センサおよびその設計方法 | |
DE602004030653D1 (de) | Schwingkristall vom Stimmgabeltyp | |
JP2012160996A5 (de) | ||
ATE417405T1 (de) | Piezoelektrischer resonator mit kleinen abmessungen | |
DE602004013170D1 (de) | Messwertgeber zur Drehgeschwindigkeitsmessung | |
JP2011139233A (ja) | 音叉型屈曲水晶振動素子 | |
JP2010193331A5 (de) | ||
CN101523721A (zh) | 具有短路防止工具的压电谐振器 | |
JP2014165573A5 (de) |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |