DE602006021500D1 - Piezoelektrischer Aktuator, Tintenstrahldruckkopf, Verfahren um piezoelektrischen Aktuator herzustellen und Verfahren um Tintenstrahldruckkopf herzustellen - Google Patents

Piezoelektrischer Aktuator, Tintenstrahldruckkopf, Verfahren um piezoelektrischen Aktuator herzustellen und Verfahren um Tintenstrahldruckkopf herzustellen

Info

Publication number
DE602006021500D1
DE602006021500D1 DE602006021500T DE602006021500T DE602006021500D1 DE 602006021500 D1 DE602006021500 D1 DE 602006021500D1 DE 602006021500 T DE602006021500 T DE 602006021500T DE 602006021500 T DE602006021500 T DE 602006021500T DE 602006021500 D1 DE602006021500 D1 DE 602006021500D1
Authority
DE
Germany
Prior art keywords
forming
piezoelectric actuator
ink jet
jet printhead
piezoelectric layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006021500T
Other languages
English (en)
Inventor
Motohiro Yasui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brother Industries Ltd
Original Assignee
Brother Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brother Industries Ltd filed Critical Brother Industries Ltd
Publication of DE602006021500D1 publication Critical patent/DE602006021500D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE602006021500T 2005-03-22 2006-03-21 Piezoelektrischer Aktuator, Tintenstrahldruckkopf, Verfahren um piezoelektrischen Aktuator herzustellen und Verfahren um Tintenstrahldruckkopf herzustellen Active DE602006021500D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005082285 2005-03-22

Publications (1)

Publication Number Publication Date
DE602006021500D1 true DE602006021500D1 (de) 2011-06-09

Family

ID=36577491

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006021500T Active DE602006021500D1 (de) 2005-03-22 2006-03-21 Piezoelektrischer Aktuator, Tintenstrahldruckkopf, Verfahren um piezoelektrischen Aktuator herzustellen und Verfahren um Tintenstrahldruckkopf herzustellen

Country Status (4)

Country Link
US (2) US20060255692A1 (de)
EP (1) EP1705016B1 (de)
AT (1) ATE507076T1 (de)
DE (1) DE602006021500D1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2978301B1 (fr) * 2011-07-18 2013-08-02 Renault Sa Procede d'assemblage d'un transducteur ultrasonore et transducteur obtenu par le procede
LU100594B1 (en) * 2017-12-22 2019-06-28 Luxembourg Inst Science & Tech List Piezoelectric device with a sensor and method for measuring the behaviour of said peizoelectric device
IT202000010261A1 (it) 2020-05-07 2021-11-07 St Microelectronics Srl Attuatore piezoelettrico dotato di una struttura deformabile avente migliorate proprieta' meccaniche e relativo procedimento di fabbricazione
IT202000010264A1 (it) * 2020-05-07 2021-11-07 St Microelectronics Srl Attuatore piezoelettrico avente un sensore di deformazione e relativo procedimento di fabbricazione

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3004080C2 (de) * 1980-02-05 1986-03-20 Sigri GmbH, 8901 Meitingen Verfahren zum Beschichten einer porösen Elektrode
JPS60159185A (ja) * 1984-01-31 1985-08-20 Permelec Electrode Ltd 電極の製造方法
JPS62277780A (ja) * 1986-05-26 1987-12-02 Matsushita Electric Works Ltd 圧電セラミツクス体の製法
JPS63112499A (ja) * 1986-10-31 1988-05-17 Nippon Telegr & Teleph Corp <Ntt> リチウムテトラボレ−ト圧電性薄膜の形成法
DE69600167T2 (de) * 1995-04-03 1998-10-22 Seiko Epson Corp Tintenstrahldruckkopf und dessen Herstellungsverfahren
JPH11334087A (ja) 1998-05-27 1999-12-07 Mita Ind Co Ltd インクジェットヘッドの製造方法
US6531187B2 (en) * 1999-04-23 2003-03-11 Agency Of Industrial Science And Technology Method of forming a shaped body of brittle ultra fine particles with mechanical impact force and without heating
US6740900B2 (en) * 2002-02-27 2004-05-25 Konica Corporation Organic thin-film transistor and manufacturing method for the same
JP3879685B2 (ja) * 2002-03-18 2007-02-14 セイコーエプソン株式会社 圧電素子、圧電アクチュエータ、及び、液体噴射ヘッド
JP2005035013A (ja) 2003-07-15 2005-02-10 Brother Ind Ltd 液体移送装置の製造方法
ATE484851T1 (de) 2005-02-21 2010-10-15 Brother Ind Ltd Verfahren zur herstellung eines piezoelektrischen aktors

Also Published As

Publication number Publication date
US20060255692A1 (en) 2006-11-16
US20070052765A1 (en) 2007-03-08
EP1705016B1 (de) 2011-04-27
EP1705016A3 (de) 2007-09-05
US7685686B2 (en) 2010-03-30
EP1705016A2 (de) 2006-09-27
ATE507076T1 (de) 2011-05-15

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