DE602006018393D1 - Vibrierender Aktuator und Methode zum Betreiben eines vibrierenden Aktuators - Google Patents

Vibrierender Aktuator und Methode zum Betreiben eines vibrierenden Aktuators

Info

Publication number
DE602006018393D1
DE602006018393D1 DE602006018393T DE602006018393T DE602006018393D1 DE 602006018393 D1 DE602006018393 D1 DE 602006018393D1 DE 602006018393 T DE602006018393 T DE 602006018393T DE 602006018393 T DE602006018393 T DE 602006018393T DE 602006018393 D1 DE602006018393 D1 DE 602006018393D1
Authority
DE
Germany
Prior art keywords
axis
mover
output shaft
flange portion
vibrating actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006018393T
Other languages
English (en)
Inventor
Takatoshi Ashizawa
Mine Sumitomo
Mina Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2005153784A external-priority patent/JP4882279B2/ja
Priority claimed from JP2005155782A external-priority patent/JP4784154B2/ja
Priority claimed from JP2005157244A external-priority patent/JP4835042B2/ja
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Publication of DE602006018393D1 publication Critical patent/DE602006018393D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Fluid-Driven Valves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
DE602006018393T 2005-05-26 2006-05-25 Vibrierender Aktuator und Methode zum Betreiben eines vibrierenden Aktuators Active DE602006018393D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005153784A JP4882279B2 (ja) 2005-05-26 2005-05-26 振動波モータ
JP2005155782A JP4784154B2 (ja) 2005-05-27 2005-05-27 振動アクチュエータ
JP2005157244A JP4835042B2 (ja) 2005-05-30 2005-05-30 振動波モータ

Publications (1)

Publication Number Publication Date
DE602006018393D1 true DE602006018393D1 (de) 2011-01-05

Family

ID=36997287

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006018393T Active DE602006018393D1 (de) 2005-05-26 2006-05-25 Vibrierender Aktuator und Methode zum Betreiben eines vibrierenden Aktuators

Country Status (4)

Country Link
US (1) US7514845B2 (de)
EP (1) EP1739762B1 (de)
AT (1) ATE489734T1 (de)
DE (1) DE602006018393D1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100680307B1 (ko) * 2005-05-20 2007-02-07 삼성전기주식회사 압전 진동자 및 이를 구비한 초음파 모터
JP5309626B2 (ja) * 2007-03-14 2013-10-09 株式会社ニコン 振動アクチュエータ、振動子の製造方法及び振動アクチュエータの製造方法
JP2008253021A (ja) * 2007-03-29 2008-10-16 Fujinon Corp 駆動装置
US7948060B2 (en) * 2008-07-01 2011-05-24 Xmos Limited Integrated circuit structure
JP2011010539A (ja) * 2009-05-26 2011-01-13 Nikon Corp 振動アクチュエータ及び電子機器
WO2011147467A1 (en) * 2010-05-28 2011-12-01 Piezomotor Uppsala Ab Rotating load bearer
JP5709413B2 (ja) 2010-06-21 2015-04-30 キヤノン株式会社 振動型駆動装置
US20120268910A1 (en) * 2011-04-20 2012-10-25 Golko Albert J Piezoelectric vibrator with double-ended shaft support
JP5459271B2 (ja) * 2011-06-22 2014-04-02 株式会社ニコン 振動アクチュエータ、レンズ鏡筒及びカメラ
DE102013204026B4 (de) * 2013-03-08 2019-08-08 Physik Instrumente (Pi) Gmbh & Co. Kg Aktoranordnung für einen Ultraschallmotor
EP3617796B1 (de) 2017-04-28 2023-10-18 Murata Manufacturing Co., Ltd. Vibrationsvorrichtung
US10536616B2 (en) * 2017-08-31 2020-01-14 Canon Kabushiki Kaisha Image pickup apparatus

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5996881A (ja) 1982-11-22 1984-06-04 Toshio Sashita 平板型超音波モータ装置
JPH06106026B2 (ja) 1985-03-29 1994-12-21 キヤノン株式会社 振動波モ−タ
JP2690901B2 (ja) 1987-07-13 1997-12-17 株式会社日立製作所 マグネトロン
US5557157A (en) * 1989-11-30 1996-09-17 Canon Kabushiki Kaisha Vibration driven motor
US5225734A (en) * 1990-03-01 1993-07-06 Canon Kabushiki Kaisha Vibration wave driven motor
JPH03253272A (ja) * 1990-03-01 1991-11-12 Canon Inc 振動波モータ
JP2862634B2 (ja) * 1990-05-25 1999-03-03 アスモ株式会社 超音波モータ
US5610468A (en) * 1990-10-22 1997-03-11 Seiko Epson Corporation Ultrasonic step motor
KR0151745B1 (ko) * 1993-02-08 1999-04-15 모리시타 요이찌 초음파모터 및 초음파모터의 제어방법
JP3792790B2 (ja) * 1996-07-23 2006-07-05 キヤノン株式会社 振動波モータ
US6107723A (en) * 1996-12-26 2000-08-22 Canon Kabushiki Kaisha Vibrating type driving device
JP4736161B2 (ja) 1999-06-11 2011-07-27 株式会社ニコン 振動アクチュエータ装置
US6943481B2 (en) * 2001-06-05 2005-09-13 Canon Precision Kabushiki Kaisha Vibration member and vibration wave driving apparatus
JP3805240B2 (ja) 2001-11-30 2006-08-02 ニスカ株式会社 超音波モータ
JP4086536B2 (ja) * 2002-04-18 2008-05-14 キヤノン株式会社 振動波駆動装置及びその駆動回路

Also Published As

Publication number Publication date
US7514845B2 (en) 2009-04-07
EP1739762B1 (de) 2010-11-24
EP1739762A3 (de) 2008-08-06
EP1739762A2 (de) 2007-01-03
ATE489734T1 (de) 2010-12-15
US20060267454A1 (en) 2006-11-30

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