DE602006003129D1 - ) zum Erzeugen einer Schicht hoher Qualität - Google Patents
) zum Erzeugen einer Schicht hoher QualitätInfo
- Publication number
- DE602006003129D1 DE602006003129D1 DE200660003129 DE602006003129T DE602006003129D1 DE 602006003129 D1 DE602006003129 D1 DE 602006003129D1 DE 200660003129 DE200660003129 DE 200660003129 DE 602006003129 T DE602006003129 T DE 602006003129T DE 602006003129 D1 DE602006003129 D1 DE 602006003129D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- high quality
- quality layer
- layer
- quality
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US68681105P | 2005-06-01 | 2005-06-01 | |
EP05447261A EP1790758A1 (de) | 2005-11-25 | 2005-11-25 | Beschichtungsverfahren mit atomaren Schichten (ald) zum Erzeugen einer Schicht hoher Qualität |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602006003129D1 true DE602006003129D1 (de) | 2008-11-27 |
Family
ID=37647567
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE200660003129 Active DE602006003129D1 (de) | 2005-06-01 | 2006-06-01 | ) zum Erzeugen einer Schicht hoher Qualität |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4769638B2 (de) |
AT (1) | ATE411410T1 (de) |
DE (1) | DE602006003129D1 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101678776B1 (ko) * | 2015-04-13 | 2016-11-22 | 충남대학교산학협력단 | 박막 트랜지스터 제조방법 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2828152B2 (ja) * | 1991-08-13 | 1998-11-25 | 富士通 株式会社 | 薄膜形成方法、多層構造膜及びシリコン薄膜トランジスタの形成方法 |
-
2006
- 2006-06-01 JP JP2006153273A patent/JP4769638B2/ja active Active
- 2006-06-01 AT AT06114855T patent/ATE411410T1/de not_active IP Right Cessation
- 2006-06-01 DE DE200660003129 patent/DE602006003129D1/de active Active
Also Published As
Publication number | Publication date |
---|---|
JP4769638B2 (ja) | 2011-09-07 |
ATE411410T1 (de) | 2008-10-15 |
JP2006352109A (ja) | 2006-12-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |