DE602006000374D1 - Sensor für oxidierendes Gas und dessen Herstellungsverfahren - Google Patents

Sensor für oxidierendes Gas und dessen Herstellungsverfahren

Info

Publication number
DE602006000374D1
DE602006000374D1 DE602006000374T DE602006000374T DE602006000374D1 DE 602006000374 D1 DE602006000374 D1 DE 602006000374D1 DE 602006000374 T DE602006000374 T DE 602006000374T DE 602006000374 T DE602006000374 T DE 602006000374T DE 602006000374 D1 DE602006000374 D1 DE 602006000374D1
Authority
DE
Germany
Prior art keywords
sensor
production process
oxidizing gas
oxidizing
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006000374T
Other languages
English (en)
Other versions
DE602006000374T2 (de
Inventor
Yoshihiro Nakano
Masahito Kida
Shinichi Nakagawa
Takio Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Publication of DE602006000374D1 publication Critical patent/DE602006000374D1/de
Application granted granted Critical
Publication of DE602006000374T2 publication Critical patent/DE602006000374T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
DE602006000374T 2005-02-24 2006-02-22 Sensor für oxidierendes Gas und dessen Herstellungsverfahren Active DE602006000374T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2005049295 2005-02-24
JP2005049295 2005-02-24
JP2005183171 2005-06-23
JP2005183171 2005-06-23
JP2006003692 2006-01-11
JP2006003692A JP4452244B2 (ja) 2005-02-24 2006-01-11 ガスセンサ素子およびガスセンサ素子の製造方法

Publications (2)

Publication Number Publication Date
DE602006000374D1 true DE602006000374D1 (de) 2008-02-14
DE602006000374T2 DE602006000374T2 (de) 2008-05-08

Family

ID=37792857

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006000374T Active DE602006000374T2 (de) 2005-02-24 2006-02-22 Sensor für oxidierendes Gas und dessen Herstellungsverfahren

Country Status (4)

Country Link
US (1) US7412871B2 (de)
EP (1) EP1696229B1 (de)
JP (1) JP4452244B2 (de)
DE (1) DE602006000374T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007242189A (ja) * 2006-03-10 2007-09-20 Alps Electric Co Ltd 薄膜磁気ヘッド及びその製造方法
DE102006025249A1 (de) * 2006-05-29 2007-12-06 Eads Deutschland Gmbh Verfahren und Einrichtung zum Betreiben eines MOX-Gas-Sensors
EP1953539B1 (de) * 2007-01-30 2017-04-12 NGK Spark Plug Co., Ltd. Gassensor
US7952486B2 (en) * 2007-08-02 2011-05-31 Chimei Innolux Corporation Liquid crystal display device provided with a gas detector, gas detector and method for manufacturing a gas detector
US10132769B2 (en) * 2016-07-13 2018-11-20 Vaon, Llc Doped, metal oxide-based chemical sensors
CN107782767B (zh) * 2016-08-26 2022-01-07 深迪半导体(绍兴)有限公司 一种气体传感器加热盘及加工方法
US11243192B2 (en) 2016-09-27 2022-02-08 Vaon, Llc 3-D glass printable hand-held gas chromatograph for biomedical and environmental applications
US10802008B2 (en) 2017-02-28 2020-10-13 Vaon, Llc Bimetal doped-metal oxide-based chemical sensors
US11203183B2 (en) 2016-09-27 2021-12-21 Vaon, Llc Single and multi-layer, flat glass-sensor structures
WO2019094501A1 (en) * 2017-11-09 2019-05-16 The Board Of Trustees Of The Leland Stanford Junior University Ultrathin electrochemical catalysts on catalyst support for proton exchange membrane fuel cells
US10656129B2 (en) * 2017-12-11 2020-05-19 National Applied Research Laboratories Miniature gas sensor
KR102333667B1 (ko) * 2020-07-17 2021-12-01 연세대학교 산학협력단 금 나노파티클 표면 위에 형성된 2차원 나노박막을 포함하는 복합체 및 이의 제조방법
KR20230108615A (ko) * 2022-01-11 2023-07-18 현대자동차주식회사 접촉 연소식 수소센서 및 그 제조방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4358951A (en) * 1981-02-17 1982-11-16 General Motors Corporation Zinc oxide thin film sensor having improved reducing gas sensitivity
US5603983A (en) * 1986-03-24 1997-02-18 Ensci Inc Process for the production of conductive and magnetic transitin metal oxide coated three dimensional substrates
JPH02252610A (ja) * 1989-03-24 1990-10-11 Agency Of Ind Science & Technol 金超微粒子固定化酸化物の製造法
ATE149250T1 (de) 1989-10-17 1997-03-15 Itvi Inttech Venture Investa Gas-sensor-anordnung
DE4020113C2 (de) 1990-06-23 1998-10-29 Itvi Inttech Venture Investa Gassensor für kraftfahrzeugtechnische und Umweltmeßzwecke mit einem auf oxidierbare Gase und einem auf sauerstofftragende Gase reagierenden Sensorelement
JPH05223769A (ja) 1991-03-14 1993-08-31 Kurabe Ind Co Ltd 窒素酸化物ガス検知素子
JP3097234B2 (ja) 1991-04-24 2000-10-10 エヌオーケー株式会社 ガスセンサ
JPH0650919A (ja) 1992-07-31 1994-02-25 Nok Corp ガスセンサ
JPH06213853A (ja) 1993-01-14 1994-08-05 Nok Corp ガス検出素子の製造法
KR100990798B1 (ko) * 2002-11-27 2010-10-29 니혼도꾸슈도교 가부시키가이샤 산화성 가스센서

Also Published As

Publication number Publication date
US7412871B2 (en) 2008-08-19
JP4452244B2 (ja) 2010-04-21
DE602006000374T2 (de) 2008-05-08
EP1696229B1 (de) 2008-01-02
JP2007033431A (ja) 2007-02-08
EP1696229A1 (de) 2006-08-30
US20060196248A1 (en) 2006-09-07

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