DE602005016258D1 - Vorrichtung zur Ionenimplantation - Google Patents

Vorrichtung zur Ionenimplantation

Info

Publication number
DE602005016258D1
DE602005016258D1 DE200560016258 DE602005016258T DE602005016258D1 DE 602005016258 D1 DE602005016258 D1 DE 602005016258D1 DE 200560016258 DE200560016258 DE 200560016258 DE 602005016258 T DE602005016258 T DE 602005016258T DE 602005016258 D1 DE602005016258 D1 DE 602005016258D1
Authority
DE
Germany
Prior art keywords
ion implantation
implantation
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE200560016258
Other languages
English (en)
Inventor
Yoshihiro Sohtome
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Publication of DE602005016258D1 publication Critical patent/DE602005016258D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/18—Vacuum control means
    • H01J2237/182—Obtaining or maintaining desired pressure
    • H01J2237/1825—Evacuating means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/201—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated for mounting multiple objects

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
DE200560016258 2005-09-27 2005-09-27 Vorrichtung zur Ionenimplantation Active DE602005016258D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP20050256025 EP1768163B1 (de) 2005-09-27 2005-09-27 Vorrichtung zur Ionenimplantation

Publications (1)

Publication Number Publication Date
DE602005016258D1 true DE602005016258D1 (de) 2009-10-08

Family

ID=36455817

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200560016258 Active DE602005016258D1 (de) 2005-09-27 2005-09-27 Vorrichtung zur Ionenimplantation

Country Status (2)

Country Link
EP (1) EP1768163B1 (de)
DE (1) DE602005016258D1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112366021B (zh) * 2020-11-09 2022-09-23 中国工程物理研究院核物理与化学研究所 一种实现反应堆辐照参数均匀化的设备及方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6181621A (ja) * 1984-09-28 1986-04-25 Nec Corp 半導体素子の製造装置
US4680474A (en) * 1985-05-22 1987-07-14 Varian Associates, Inc. Method and apparatus for improved ion dose accuracy
US4743767A (en) * 1985-09-09 1988-05-10 Applied Materials, Inc. Systems and methods for ion implantation
JPH05190133A (ja) * 1992-01-14 1993-07-30 Nec Corp イオン注入装置
JP2947249B2 (ja) 1998-01-14 1999-09-13 日本電気株式会社 イオン注入装置のウエハ搭載部材
US7009193B2 (en) * 2003-10-31 2006-03-07 Infineon Technologies Richmond, Lp Utilization of an ion gauge in the process chamber of a semiconductor ion implanter

Also Published As

Publication number Publication date
EP1768163B1 (de) 2009-08-26
EP1768163A1 (de) 2007-03-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition