DE602005014509D1 - Präzisionsgerät mit beweglichem element, luftspalt und vakuumkanal - Google Patents

Präzisionsgerät mit beweglichem element, luftspalt und vakuumkanal

Info

Publication number
DE602005014509D1
DE602005014509D1 DE602005014509T DE602005014509T DE602005014509D1 DE 602005014509 D1 DE602005014509 D1 DE 602005014509D1 DE 602005014509 T DE602005014509 T DE 602005014509T DE 602005014509 T DE602005014509 T DE 602005014509T DE 602005014509 D1 DE602005014509 D1 DE 602005014509D1
Authority
DE
Germany
Prior art keywords
bridge element
air gap
movable element
vacuum channel
air duct
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE602005014509T
Other languages
English (en)
Inventor
Antonius M Rijken
Martinus A Cuppen
Hendrik J Eggink
Bjorn A Nijland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of DE602005014509D1 publication Critical patent/DE602005014509D1/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0003—Arrangements for preventing undesired thermal effects on tools or parts of the machine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/01—Frames, beds, pillars or like members; Arrangement of ways
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Air-Flow Control Members (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE602005014509T 2004-12-21 2005-12-14 Präzisionsgerät mit beweglichem element, luftspalt und vakuumkanal Expired - Fee Related DE602005014509D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP04106767 2004-12-21
PCT/IB2005/054238 WO2006067687A1 (en) 2004-12-21 2005-12-14 Precision apparatus having a movable member, an air slit and a vacuum duct

Publications (1)

Publication Number Publication Date
DE602005014509D1 true DE602005014509D1 (de) 2009-06-25

Family

ID=36035683

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005014509T Expired - Fee Related DE602005014509D1 (de) 2004-12-21 2005-12-14 Präzisionsgerät mit beweglichem element, luftspalt und vakuumkanal

Country Status (9)

Country Link
US (1) US20090298414A1 (de)
EP (1) EP1838494B1 (de)
JP (1) JP2008524007A (de)
KR (1) KR20070095902A (de)
CN (1) CN101084089A (de)
AT (1) ATE431221T1 (de)
DE (1) DE602005014509D1 (de)
TW (1) TW200628259A (de)
WO (1) WO2006067687A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5964159B2 (ja) 2012-07-05 2016-08-03 東芝機械株式会社 精密工作機械
DE102017115869A1 (de) * 2017-07-14 2019-01-17 Homag Gmbh Aufspannvorrichtung mit Aushubfunktion
CN107511688A (zh) * 2017-10-20 2017-12-26 湖南国汇新材料有限公司 一种带有恒温水循环系统的矿物铸件机床及其工作方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57184643A (en) 1981-04-03 1982-11-13 Mitsubishi Heavy Ind Ltd Preventive method for thermal deformation in the structure of a machine tool
JPH06155228A (ja) * 1992-11-26 1994-06-03 Okuma Mach Works Ltd 工作機械
JP2001148588A (ja) * 1999-11-24 2001-05-29 Olympus Optical Co Ltd 工作機械の放熱装置
JP3794938B2 (ja) * 2000-10-04 2006-07-12 株式会社牧野フライス製作所 加工機械設備

Also Published As

Publication number Publication date
KR20070095902A (ko) 2007-10-01
EP1838494A1 (de) 2007-10-03
US20090298414A1 (en) 2009-12-03
WO2006067687A1 (en) 2006-06-29
TW200628259A (en) 2006-08-16
JP2008524007A (ja) 2008-07-10
ATE431221T1 (de) 2009-05-15
CN101084089A (zh) 2007-12-05
EP1838494B1 (de) 2009-05-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee