DE602005013876D1 - Piezoelektrischer Tintenstrahldruckkopf und Herstellungsverfahren dafür - Google Patents
Piezoelektrischer Tintenstrahldruckkopf und Herstellungsverfahren dafürInfo
- Publication number
- DE602005013876D1 DE602005013876D1 DE602005013876T DE602005013876T DE602005013876D1 DE 602005013876 D1 DE602005013876 D1 DE 602005013876D1 DE 602005013876 T DE602005013876 T DE 602005013876T DE 602005013876 T DE602005013876 T DE 602005013876T DE 602005013876 D1 DE602005013876 D1 DE 602005013876D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- ink jet
- method therefor
- jet printhead
- piezoelectric ink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14419—Manifold
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040079959A KR100590558B1 (ko) | 2004-10-07 | 2004-10-07 | 압전 방식의 잉크젯 프린트 헤드 및 그 제조방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602005013876D1 true DE602005013876D1 (de) | 2009-05-28 |
Family
ID=36144789
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005013876T Active DE602005013876D1 (de) | 2004-10-07 | 2005-10-05 | Piezoelektrischer Tintenstrahldruckkopf und Herstellungsverfahren dafür |
Country Status (5)
Country | Link |
---|---|
US (1) | US7497559B2 (de) |
EP (1) | EP1645416B1 (de) |
JP (1) | JP4731270B2 (de) |
KR (1) | KR100590558B1 (de) |
DE (1) | DE602005013876D1 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100682964B1 (ko) * | 2006-02-09 | 2007-02-15 | 삼성전자주식회사 | 잉크젯 헤드의 압전 액츄에이터 형성 방법 |
KR100773554B1 (ko) * | 2006-07-06 | 2007-11-06 | 삼성전자주식회사 | 기포 제거를 위한 베젤 구조를 가진 잉크젯 프린트헤드 |
KR100738117B1 (ko) * | 2006-07-06 | 2007-07-12 | 삼성전자주식회사 | 압전 방식의 잉크젯 프린트헤드 |
JP4192983B2 (ja) * | 2006-09-29 | 2008-12-10 | ブラザー工業株式会社 | 液滴吐出ヘッド |
JP4362738B2 (ja) * | 2007-02-13 | 2009-11-11 | セイコーエプソン株式会社 | 液体噴射ヘッドおよびプリンタ |
KR100900961B1 (ko) * | 2007-07-10 | 2009-06-08 | 삼성전기주식회사 | 잉크젯 헤드 및 그 제조방법 |
KR101567506B1 (ko) * | 2009-02-04 | 2015-11-10 | 삼성전자주식회사 | 잉크젯 프린팅 장치 및 그 구동 방법 |
JP5207544B2 (ja) * | 2009-02-24 | 2013-06-12 | 富士フイルム株式会社 | インクジェットヘッドの製造方法及びインクジェット記録装置 |
US8388116B2 (en) | 2009-10-30 | 2013-03-05 | Hewlett-Packard Development Company, L.P. | Printhead unit |
US8757511B2 (en) | 2010-01-11 | 2014-06-24 | AdvanJet | Viscous non-contact jetting method and apparatus |
US8486814B2 (en) * | 2011-07-21 | 2013-07-16 | International Business Machines Corporation | Wafer backside defectivity clean-up utilizing selective removal of substrate material |
US9346075B2 (en) | 2011-08-26 | 2016-05-24 | Nordson Corporation | Modular jetting devices |
US9254642B2 (en) | 2012-01-19 | 2016-02-09 | AdvanJet | Control method and apparatus for dispensing high-quality drops of high-viscosity material |
JP5925064B2 (ja) * | 2012-06-20 | 2016-05-25 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
JP2014046665A (ja) * | 2012-09-04 | 2014-03-17 | Canon Inc | 液体吐出ヘッドの製造方法 |
JP6094143B2 (ja) * | 2012-10-25 | 2017-03-15 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置及び圧電素子 |
US10308022B2 (en) * | 2016-05-27 | 2019-06-04 | Sii Printek Inc. | Liquid jet head and liquid jet apparatus |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4730197A (en) * | 1985-11-06 | 1988-03-08 | Pitney Bowes Inc. | Impulse ink jet system |
IT1268870B1 (it) | 1993-08-23 | 1997-03-13 | Seiko Epson Corp | Testa di registrazione a getto d'inchiostro e procedimento per la sua fabbricazione. |
JP3728906B2 (ja) * | 1998-01-16 | 2005-12-21 | セイコーエプソン株式会社 | インクジェットヘッドの貫通孔形成方法 |
KR100514711B1 (ko) * | 1997-05-14 | 2005-09-15 | 세이코 엡슨 가부시키가이샤 | 분사 장치의 노즐 형성 방법 및 잉크 젯 헤드의 제조 방법 |
JP2000079685A (ja) * | 1998-06-30 | 2000-03-21 | Kansai Shingijutsu Kenkyusho:Kk | インクジェット式プリンタのラインヘッド |
JP4420544B2 (ja) * | 2000-08-31 | 2010-02-24 | セイコーエプソン株式会社 | インクジェット式記録ヘッド並びにインクジェット式記録装置 |
KR100438836B1 (ko) | 2001-12-18 | 2004-07-05 | 삼성전자주식회사 | 압전 방식의 잉크젯 프린트 헤드 및 그 제조방법 |
JP4269601B2 (ja) * | 2002-09-02 | 2009-05-27 | 富士ゼロックス株式会社 | 液滴吐出ヘッドおよび液滴吐出装置 |
KR100519760B1 (ko) * | 2003-02-13 | 2005-10-07 | 삼성전자주식회사 | 압전 방식 잉크젯 프린트헤드의 제조방법 |
KR20050014130A (ko) * | 2003-07-30 | 2005-02-07 | 삼성전자주식회사 | 압전 및 정전 방식에 의해 구동되는 잉크젯 프린트헤드 및그 제조방법 |
-
2004
- 2004-10-07 KR KR1020040079959A patent/KR100590558B1/ko active IP Right Grant
-
2005
- 2005-10-05 EP EP05256212A patent/EP1645416B1/de active Active
- 2005-10-05 DE DE602005013876T patent/DE602005013876D1/de active Active
- 2005-10-06 JP JP2005294005A patent/JP4731270B2/ja active Active
- 2005-10-07 US US11/245,131 patent/US7497559B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
KR20060031075A (ko) | 2006-04-12 |
EP1645416A2 (de) | 2006-04-12 |
JP4731270B2 (ja) | 2011-07-20 |
JP2006103334A (ja) | 2006-04-20 |
KR100590558B1 (ko) | 2006-06-19 |
US7497559B2 (en) | 2009-03-03 |
EP1645416A3 (de) | 2007-03-07 |
EP1645416B1 (de) | 2009-04-15 |
US20060077237A1 (en) | 2006-04-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |