DE602005008468D1 - Rechteckiger halbleiterträger für die mikroelektronik und herstellungsverfahren dafür - Google Patents
Rechteckiger halbleiterträger für die mikroelektronik und herstellungsverfahren dafürInfo
- Publication number
- DE602005008468D1 DE602005008468D1 DE602005008468T DE602005008468T DE602005008468D1 DE 602005008468 D1 DE602005008468 D1 DE 602005008468D1 DE 602005008468 T DE602005008468 T DE 602005008468T DE 602005008468 T DE602005008468 T DE 602005008468T DE 602005008468 D1 DE602005008468 D1 DE 602005008468D1
- Authority
- DE
- Germany
- Prior art keywords
- microelectronics
- manufacturing
- method therefor
- rectangular semiconductor
- rectangular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000004377 microelectronic Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3732—Diamonds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Thin Film Transistor (AREA)
- Recrystallisation Techniques (AREA)
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0412699A FR2878648B1 (fr) | 2004-11-30 | 2004-11-30 | Support semi-conducteur rectangulaire pour la microelectronique et procede de realisation d'un tel support |
PCT/FR2005/002923 WO2006058984A1 (fr) | 2004-11-30 | 2005-11-24 | Support semi-conducteur rectangulaire pour la microelectronique et procede de realisation d’un tel support |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602005008468D1 true DE602005008468D1 (de) | 2008-09-04 |
Family
ID=34952277
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005008468T Active DE602005008468D1 (de) | 2004-11-30 | 2005-11-24 | Rechteckiger halbleiterträger für die mikroelektronik und herstellungsverfahren dafür |
Country Status (6)
Country | Link |
---|---|
US (1) | US7466019B2 (de) |
EP (1) | EP1817794B1 (de) |
JP (1) | JP2008522422A (de) |
DE (1) | DE602005008468D1 (de) |
FR (1) | FR2878648B1 (de) |
WO (1) | WO2006058984A1 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8822306B2 (en) | 2010-09-30 | 2014-09-02 | Infineon Technologies Ag | Method for manufacturing a composite wafer having a graphite core, and composite wafer having a graphite core |
US8404562B2 (en) * | 2010-09-30 | 2013-03-26 | Infineon Technologies Ag | Method for manufacturing a composite wafer having a graphite core, and composite wafer having a graphite core |
EP2914071A1 (de) * | 2014-02-28 | 2015-09-02 | AT & S Austria Technologie & Systemtechnik Aktiengesellschaft | Wärmeverteiler in mehrschichtigen Wärmeaufbauten |
KR102374256B1 (ko) * | 2015-02-23 | 2022-03-15 | 삼성전기주식회사 | 회로기판 및 회로기판 제조방법 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3961997A (en) * | 1975-05-12 | 1976-06-08 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Fabrication of polycrystalline solar cells on low-cost substrates |
DE2536174C3 (de) * | 1975-08-13 | 1983-11-03 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum Herstellen von polykristallinen Siliciumschichten für Halbleiterbauelemente |
US4466938A (en) * | 1979-08-23 | 1984-08-21 | General Electric Company | Method for reducing damage to diamond crystals during sintering |
JPH07116606B2 (ja) * | 1987-10-31 | 1995-12-13 | 住友電気工業株式会社 | ダイヤモンド被覆炭素部材 |
US5391895A (en) * | 1992-09-21 | 1995-02-21 | Kobe Steel Usa, Inc. | Double diamond mesa vertical field effect transistor |
JPH08505009A (ja) * | 1992-12-18 | 1996-05-28 | ハリス・コーポレーション | ダイヤモンド上シリコンの回路構造物及びその製造方法 |
US5494753A (en) * | 1994-06-20 | 1996-02-27 | General Electric Company | Articles having thermal conductors of graphite |
CA2249288A1 (en) * | 1996-03-18 | 1997-12-24 | Martin G. Bradley | Diamond film deposition |
JPH09326355A (ja) * | 1996-06-04 | 1997-12-16 | Hoya Corp | 支持体付薄膜形成方法およびx線マスク製造方法 |
JPH11307747A (ja) * | 1998-04-17 | 1999-11-05 | Nec Corp | Soi基板およびその製造方法 |
US7132309B2 (en) * | 2003-04-22 | 2006-11-07 | Chien-Min Sung | Semiconductor-on-diamond devices and methods of forming |
FR2823596B1 (fr) * | 2001-04-13 | 2004-08-20 | Commissariat Energie Atomique | Substrat ou structure demontable et procede de realisation |
JP4009090B2 (ja) * | 2001-11-08 | 2007-11-14 | 株式会社神戸製鋼所 | ダイヤモンド被覆非ダイヤモンド炭素部材の製造方法 |
-
2004
- 2004-11-30 FR FR0412699A patent/FR2878648B1/fr not_active Expired - Fee Related
-
2005
- 2005-11-24 JP JP2007543877A patent/JP2008522422A/ja active Pending
- 2005-11-24 EP EP05822943A patent/EP1817794B1/de not_active Expired - Fee Related
- 2005-11-24 US US11/667,920 patent/US7466019B2/en active Active
- 2005-11-24 DE DE602005008468T patent/DE602005008468D1/de active Active
- 2005-11-24 WO PCT/FR2005/002923 patent/WO2006058984A1/fr active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
US7466019B2 (en) | 2008-12-16 |
EP1817794A1 (de) | 2007-08-15 |
FR2878648A1 (fr) | 2006-06-02 |
JP2008522422A (ja) | 2008-06-26 |
WO2006058984A1 (fr) | 2006-06-08 |
EP1817794B1 (de) | 2008-07-23 |
FR2878648B1 (fr) | 2007-02-02 |
US20080001274A1 (en) | 2008-01-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |