DE602005004228D1 - Messsonde für Oberflächentextur und dieselbe verwendendes Mikroskop. - Google Patents
Messsonde für Oberflächentextur und dieselbe verwendendes Mikroskop.Info
- Publication number
- DE602005004228D1 DE602005004228D1 DE602005004228T DE602005004228T DE602005004228D1 DE 602005004228 D1 DE602005004228 D1 DE 602005004228D1 DE 602005004228 T DE602005004228 T DE 602005004228T DE 602005004228 T DE602005004228 T DE 602005004228T DE 602005004228 D1 DE602005004228 D1 DE 602005004228D1
- Authority
- DE
- Germany
- Prior art keywords
- microscope
- probe
- same
- surface texture
- texture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/02—Probe holders
- G01Q70/04—Probe holders with compensation for temperature or vibration induced errors
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004319379 | 2004-11-02 | ||
JP2004319379A JP4323412B2 (ja) | 2004-11-02 | 2004-11-02 | 表面性状測定用探針およびこれを用いた顕微鏡 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE602005004228D1 true DE602005004228D1 (de) | 2008-02-21 |
DE602005004228T2 DE602005004228T2 (de) | 2008-05-08 |
Family
ID=35519759
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005004228T Active DE602005004228T2 (de) | 2004-11-02 | 2005-11-02 | Messsonde für Oberflächentextur und dieselbe verwendendes Mikroskop. |
Country Status (5)
Country | Link |
---|---|
US (1) | US7581438B2 (de) |
EP (1) | EP1653478B1 (de) |
JP (1) | JP4323412B2 (de) |
CN (1) | CN1769860B (de) |
DE (1) | DE602005004228T2 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006001496B4 (de) * | 2006-01-11 | 2019-02-21 | Siemens Aktiengesellschaft | System und Verfahren zur Bestimmung geometrischer Veränderungen eines Werkstücks |
EP2120037B1 (de) | 2008-05-16 | 2017-01-25 | Mitutoyo Corporation | Messsonde für ein Scanmikroskop und Betriebsverfahren dafür |
EP2120036B1 (de) | 2008-05-16 | 2012-07-18 | Mitutoyo Corporation | Messsonde mit einem oder mehreren Stützelementen für ein Messinstrument |
EP2163906B1 (de) | 2008-09-16 | 2014-02-26 | Mitutoyo Corporation | Verfahren zur Bewegungserkennung einer Messsonde und Messinstrument |
EP2211187B1 (de) | 2009-01-14 | 2013-10-02 | Mitutoyo Corporation | Verfahren zur Betätigung eines Systems, Vorrichtung zur Modifizierung eines Steuersignals zur Betätigung eines Systems und Verfahren zum Abstimmen einer solchen Vorrichtung |
US8701301B2 (en) * | 2011-04-19 | 2014-04-22 | Mitutoyo Corporation | Surface texture measuring instrument |
JP5776608B2 (ja) * | 2012-03-30 | 2015-09-09 | 東亜ディーケーケー株式会社 | 薄板固定方法およびそれを用いた油膜検出装置 |
US9785862B2 (en) | 2014-08-18 | 2017-10-10 | International Business Machines Corporation | System and method for feeling surface roughness through microscopic data |
CN114072655A (zh) * | 2019-07-17 | 2022-02-18 | 株式会社岛津制作所 | 气体测定装置用采样探针 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4947034A (en) | 1989-04-28 | 1990-08-07 | International Business Machines Corporation | Apertureless near field optical microscope |
JPH0830707B2 (ja) | 1991-01-26 | 1996-03-27 | 株式会社ミツトヨ | 走査型トンネル顕微鏡の探針 |
US5517190A (en) * | 1994-02-03 | 1996-05-14 | Gunn; Colin N. | Physical measurement from changes in reactance |
JPH09203864A (ja) | 1996-01-25 | 1997-08-05 | Nikon Corp | Nfm一体型顕微鏡 |
JP3290586B2 (ja) | 1996-03-13 | 2002-06-10 | セイコーインスツルメンツ株式会社 | 走査型近視野光学顕微鏡 |
JP2001165843A (ja) | 1999-12-14 | 2001-06-22 | Olympus Optical Co Ltd | 近接場光学顕微鏡及びそれに用いられるカンチレバー |
US6469288B1 (en) | 1999-05-17 | 2002-10-22 | Olympus Optcial Co., Ltd. | Near field optical microscope and probe for near field optical microscope |
JP4044241B2 (ja) | 1999-05-24 | 2008-02-06 | 日本分光株式会社 | プローブ顕微鏡 |
JP2001264230A (ja) | 2000-03-21 | 2001-09-26 | Nippon Telegr & Teleph Corp <Ntt> | 原子間力顕微鏡、トンネル顕微鏡に用いる探針 |
US6598306B2 (en) * | 2001-04-17 | 2003-07-29 | Homer L. Eaton | Self-loading spatial reference point array |
IL145136A0 (en) | 2001-08-27 | 2002-06-30 | Multiple plate tip or sample scanning reconfigurable scanning probe microscope with transparent interfacing of far-field optical microscopes | |
JP2003344034A (ja) | 2002-05-23 | 2003-12-03 | Mitsutoyo Corp | 表面性状測定装置及び表面性状センサ |
GB0228368D0 (en) * | 2002-12-05 | 2003-01-08 | Renishaw Plc | Probe for high speed scanning |
JP3920247B2 (ja) * | 2003-07-02 | 2007-05-30 | 三菱電機株式会社 | 感熱式流量検出素子およびその製造方法 |
-
2004
- 2004-11-02 JP JP2004319379A patent/JP4323412B2/ja not_active Expired - Fee Related
-
2005
- 2005-11-01 US US11/263,681 patent/US7581438B2/en active Active
- 2005-11-02 EP EP05023874A patent/EP1653478B1/de not_active Expired - Fee Related
- 2005-11-02 DE DE602005004228T patent/DE602005004228T2/de active Active
- 2005-11-02 CN CN200510117193XA patent/CN1769860B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1653478A2 (de) | 2006-05-03 |
DE602005004228T2 (de) | 2008-05-08 |
US20060090550A1 (en) | 2006-05-04 |
EP1653478B1 (de) | 2008-01-09 |
CN1769860B (zh) | 2010-08-11 |
EP1653478A3 (de) | 2006-09-06 |
CN1769860A (zh) | 2006-05-10 |
JP2006132969A (ja) | 2006-05-25 |
US7581438B2 (en) | 2009-09-01 |
JP4323412B2 (ja) | 2009-09-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |