DE602005000965D1 - Laser mit Kühlwassereinheit - Google Patents

Laser mit Kühlwassereinheit

Info

Publication number
DE602005000965D1
DE602005000965D1 DE602005000965T DE602005000965T DE602005000965D1 DE 602005000965 D1 DE602005000965 D1 DE 602005000965D1 DE 602005000965 T DE602005000965 T DE 602005000965T DE 602005000965 T DE602005000965 T DE 602005000965T DE 602005000965 D1 DE602005000965 D1 DE 602005000965D1
Authority
DE
Germany
Prior art keywords
laser
cooling water
water unit
unit
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE602005000965T
Other languages
English (en)
Other versions
DE602005000965T2 (de
Inventor
Yuji Nishikawa
Hiroyuki Yoshida
Hisatada Machida
Akihiko Nishio
Ryusuke Miyata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fanuc Corp
Original Assignee
Fanuc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Corp filed Critical Fanuc Corp
Publication of DE602005000965D1 publication Critical patent/DE602005000965D1/de
Application granted granted Critical
Publication of DE602005000965T2 publication Critical patent/DE602005000965T2/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/024—Arrangements for thermal management
    • H01S5/02407—Active cooling, e.g. the laser temperature is controlled by a thermo-electric cooler or water cooling
    • H01S5/02423—Liquid cooling, e.g. a liquid cools a mount of the laser

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE602005000965T 2004-07-14 2005-07-11 Laser mit Kühlwassereinheit Expired - Fee Related DE602005000965T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2004207576 2004-07-14
JP2004207576 2004-07-14
JP2004301785 2004-10-15
JP2004301785A JP3981682B2 (ja) 2004-07-14 2004-10-15 レーザ装置

Publications (2)

Publication Number Publication Date
DE602005000965D1 true DE602005000965D1 (de) 2007-06-06
DE602005000965T2 DE602005000965T2 (de) 2007-09-06

Family

ID=34981119

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005000965T Expired - Fee Related DE602005000965T2 (de) 2004-07-14 2005-07-11 Laser mit Kühlwassereinheit

Country Status (4)

Country Link
US (1) US20060013274A1 (de)
EP (1) EP1617529B1 (de)
JP (1) JP3981682B2 (de)
DE (1) DE602005000965T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103078240A (zh) * 2012-12-28 2013-05-01 中国科学院安徽光学精密机械研究所 一种高重频工业用准分子激光器工作温度自调节系统
CN104466661A (zh) * 2013-09-23 2015-03-25 山东能源机械集团大族再制造有限公司 一种半导体激光器系统
JP6301897B2 (ja) * 2015-11-18 2018-03-28 ファナック株式会社 クーラントを循環させるための循環路を備える光ファイバ中継ユニット
JP6407841B2 (ja) * 2015-11-18 2018-10-17 ファナック株式会社 クーラントを循環させるための循環路を備えるレーザ加工ヘッド
JP6367900B2 (ja) 2016-12-14 2018-08-01 ファナック株式会社 レーザ装置
WO2020100206A1 (ja) * 2018-11-13 2020-05-22 Smc株式会社 マルチ‐チラー

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4724079A (en) * 1985-01-11 1988-02-09 Gloria Stephan Sale Water purification process
US5351199A (en) * 1989-06-26 1994-09-27 Brun Corporation Programmable water treatment controller for progressive flow systems
US4969991A (en) * 1989-08-30 1990-11-13 Valadez Gerardo M Water purifying and dispensing system
JP2504271B2 (ja) * 1990-03-30 1996-06-05 三菱電機株式会社 レ―ザ発振装置
JPH04130784A (ja) * 1990-09-21 1992-05-01 Olympus Optical Co Ltd レーザ装置
US5572538A (en) * 1992-01-20 1996-11-05 Miyachi Technos Corporation Laser apparatus and accessible, compact cooling system thereof having interchangeable flow restricting members
US5464959A (en) * 1992-04-28 1995-11-07 Sodick Co., Ltd. Ion exchange treatment method in producing and recycling aqueous EDM fluid
JPH06252472A (ja) * 1993-02-22 1994-09-09 Zexel Corp レーザー光発生装置におけるレーザー媒質冷却装置
JP2746047B2 (ja) * 1993-03-26 1998-04-28 三菱電機株式会社 純水使用の循環冷却装置
US5748656A (en) * 1996-01-05 1998-05-05 Cymer, Inc. Laser having improved beam quality and reduced operating cost
CA2186963C (en) * 1996-10-01 1999-03-30 Riad A. Al-Samadi High water recovery membrane purification process
US5817231A (en) * 1996-12-20 1998-10-06 American Dryer Corporation Water purifying and vending apparatus
SE516284C2 (sv) * 2000-03-30 2001-12-10 Svenska Rotor Maskiner Ab Sätt att upprätthålla låg bakteriehalt i ett cirkulationssystem, i vilket en kompressor ingår och en anordningför genomförande av sättet.
JP2002190638A (ja) * 2000-10-10 2002-07-05 Shibaura Mechatronics Corp レーザダイオード装置およびレーザダイオード励起固体レーザ装置
JP2002198592A (ja) * 2000-12-25 2002-07-12 Shibaura Mechatronics Corp レーザ発生装置
DE60232568D1 (de) * 2001-07-09 2009-07-23 Canon Kk Belichtungsapparat
JP2004122038A (ja) * 2002-10-04 2004-04-22 Orion Mach Co Ltd 水質制御装置を有する水冷装置

Also Published As

Publication number Publication date
DE602005000965T2 (de) 2007-09-06
EP1617529B1 (de) 2007-04-25
EP1617529A3 (de) 2006-06-14
JP2006054408A (ja) 2006-02-23
US20060013274A1 (en) 2006-01-19
EP1617529A2 (de) 2006-01-18
JP3981682B2 (ja) 2007-09-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee