DE602005000770D1 - Verfahren und Einrichtung zum Recycling von Inertgasen - Google Patents

Verfahren und Einrichtung zum Recycling von Inertgasen

Info

Publication number
DE602005000770D1
DE602005000770D1 DE602005000770T DE602005000770T DE602005000770D1 DE 602005000770 D1 DE602005000770 D1 DE 602005000770D1 DE 602005000770 T DE602005000770 T DE 602005000770T DE 602005000770 T DE602005000770 T DE 602005000770T DE 602005000770 D1 DE602005000770 D1 DE 602005000770D1
Authority
DE
Germany
Prior art keywords
inert gases
recycling inert
recycling
gases
inert
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005000770T
Other languages
English (en)
Other versions
DE602005000770T2 (de
Inventor
Daniel Clark
Jeffrey Allen
Justin Mark Burrows
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rolls Royce PLC
Original Assignee
Rolls Royce PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rolls Royce PLC filed Critical Rolls Royce PLC
Publication of DE602005000770D1 publication Critical patent/DE602005000770D1/de
Application granted granted Critical
Publication of DE602005000770T2 publication Critical patent/DE602005000770T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/137—Spraying in vacuum or in an inert atmosphere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/102—Nitrogen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/104—Oxygen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/108—Hydrogen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/80—Water

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Vapour Deposition (AREA)
DE602005000770T 2004-08-12 2005-07-06 Verfahren und Einrichtung zum Recycling von Inertgasen Active DE602005000770T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0417936 2004-08-12
GBGB0417936.2A GB0417936D0 (en) 2004-08-12 2004-08-12 Method and apparatus for recycling inert gas

Publications (2)

Publication Number Publication Date
DE602005000770D1 true DE602005000770D1 (de) 2007-05-10
DE602005000770T2 DE602005000770T2 (de) 2007-07-12

Family

ID=33017359

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005000770T Active DE602005000770T2 (de) 2004-08-12 2005-07-06 Verfahren und Einrichtung zum Recycling von Inertgasen

Country Status (5)

Country Link
US (2) US7465476B2 (de)
EP (1) EP1626102B1 (de)
DE (1) DE602005000770T2 (de)
ES (1) ES2282979T3 (de)
GB (1) GB0417936D0 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109819660A (zh) * 2017-09-18 2019-05-28 欧洲涂料股份公司 等离子体喷涂装置和方法

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DE102005023046A1 (de) * 2005-05-13 2006-11-16 Nordson Corp., Westlake Kleberdüse mit gekühlter Überwachungsoptik
JP2010153769A (ja) * 2008-11-19 2010-07-08 Tokyo Electron Ltd 基板位置検出装置、基板位置検出方法、成膜装置、成膜方法、プログラム及びコンピュータ可読記憶媒体
DE102015117906B4 (de) * 2015-10-21 2018-01-25 Westfalen Ag Verfahren und Vorrichtung zum Herstellen von metallischen Gegenständen
FR3066938B1 (fr) * 2017-06-02 2019-07-26 Prodways Group Procede et dispositif de fabrication additive par soudage a l'arc robotise avec apport de matiere par fil de soudage pour la fabrication de pieces en metal a tres faible conductivite thermique
EP3486070B8 (de) * 2017-11-15 2023-04-12 Concept Laser GmbH Verfahren zur generativen fertigung von dreidimensionalen objekten
CN108127224B (zh) * 2017-12-21 2020-08-25 重庆晓微城企业孵化器有限公司 自动空调架焊接设备
CN112059453A (zh) * 2020-07-31 2020-12-11 苏州优霹耐磨复合材料有限公司 一种耐磨板组织细化处理方法

Family Cites Families (18)

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Publication number Priority date Publication date Assignee Title
US3610876A (en) * 1969-12-22 1971-10-05 Gopal Krishna Bhat Variable parameter tungsten-inert gas welding
US4551197A (en) * 1984-07-26 1985-11-05 Guilmette Joseph G Method and apparatus for the recovery and recycling of condensable gas reactants
US4616694A (en) * 1984-10-22 1986-10-14 Hsieh Shih Yung Fireproof cabinet system for electronic equipment
ATE160055T1 (de) 1990-09-07 1997-11-15 Sulzer Metco Ag Apparatur zur plasmathermischen bearbeitung von werkstückoberflächen
US5227038A (en) * 1991-10-04 1993-07-13 William Marsh Rice University Electric arc process for making fullerenes
JP3372581B2 (ja) 1993-01-21 2003-02-04 東京エレクトロン株式会社 処理装置
DE4336694A1 (de) * 1993-10-27 1995-05-04 Inst Neue Mat Gemein Gmbh Verfahren zur Herstellung von Metall- und Keramiksinterkörpern und -schichten
JPH0929002A (ja) * 1995-07-17 1997-02-04 Teisan Kk ガス回収装置
JPH09142892A (ja) * 1995-11-28 1997-06-03 Furukawa Electric Co Ltd:The 被覆光ファイバの製造装置及び製造方法
US5958348A (en) * 1997-02-28 1999-09-28 Nanogram Corporation Efficient production of particles by chemical reaction
US6296711B1 (en) * 1998-04-14 2001-10-02 Cvd Systems, Inc. Film processing system
KR100291330B1 (ko) * 1998-07-02 2001-07-12 윤종용 반도체장치제조용스퍼터링설비및이를이용한스퍼터링방법
US6364932B1 (en) * 2000-05-02 2002-04-02 The Boc Group, Inc. Cold gas-dynamic spraying process
EP1437327B1 (de) * 2001-10-19 2007-04-11 Tokuyama Corporation Verfahren zur herstellung von silicium
DE10224777A1 (de) * 2002-06-04 2003-12-18 Linde Ag Verfahren und Vorrichtung zum Kaltgasspritzen
US6759085B2 (en) * 2002-06-17 2004-07-06 Sulzer Metco (Us) Inc. Method and apparatus for low pressure cold spraying
JP4336509B2 (ja) * 2003-03-07 2009-09-30 キヤノン株式会社 処理方法及びシステム
GB0512184D0 (en) * 2005-06-15 2005-07-20 Rolls Royce Plc Method and apparatus for the treatment of a component

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109819660A (zh) * 2017-09-18 2019-05-28 欧洲涂料股份公司 等离子体喷涂装置和方法
CN109819660B (zh) * 2017-09-18 2022-05-03 林科泰克特伦多股份公司 等离子体喷涂装置和方法

Also Published As

Publication number Publication date
US20090071401A1 (en) 2009-03-19
DE602005000770T2 (de) 2007-07-12
EP1626102B1 (de) 2007-03-28
ES2282979T3 (es) 2007-10-16
US7465476B2 (en) 2008-12-16
GB0417936D0 (en) 2004-09-15
EP1626102A1 (de) 2006-02-15
US20060032441A1 (en) 2006-02-16

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