DE602005000770D1 - Verfahren und Einrichtung zum Recycling von Inertgasen - Google Patents
Verfahren und Einrichtung zum Recycling von InertgasenInfo
- Publication number
- DE602005000770D1 DE602005000770D1 DE602005000770T DE602005000770T DE602005000770D1 DE 602005000770 D1 DE602005000770 D1 DE 602005000770D1 DE 602005000770 T DE602005000770 T DE 602005000770T DE 602005000770 T DE602005000770 T DE 602005000770T DE 602005000770 D1 DE602005000770 D1 DE 602005000770D1
- Authority
- DE
- Germany
- Prior art keywords
- inert gases
- recycling inert
- recycling
- gases
- inert
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/137—Spraying in vacuum or in an inert atmosphere
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/10—Single element gases other than halogens
- B01D2257/102—Nitrogen
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/10—Single element gases other than halogens
- B01D2257/104—Oxygen
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/10—Single element gases other than halogens
- B01D2257/108—Hydrogen
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/80—Water
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0417936 | 2004-08-12 | ||
GBGB0417936.2A GB0417936D0 (en) | 2004-08-12 | 2004-08-12 | Method and apparatus for recycling inert gas |
Publications (2)
Publication Number | Publication Date |
---|---|
DE602005000770D1 true DE602005000770D1 (de) | 2007-05-10 |
DE602005000770T2 DE602005000770T2 (de) | 2007-07-12 |
Family
ID=33017359
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005000770T Active DE602005000770T2 (de) | 2004-08-12 | 2005-07-06 | Verfahren und Einrichtung zum Recycling von Inertgasen |
Country Status (5)
Country | Link |
---|---|
US (2) | US7465476B2 (de) |
EP (1) | EP1626102B1 (de) |
DE (1) | DE602005000770T2 (de) |
ES (1) | ES2282979T3 (de) |
GB (1) | GB0417936D0 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109819660A (zh) * | 2017-09-18 | 2019-05-28 | 欧洲涂料股份公司 | 等离子体喷涂装置和方法 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005023046A1 (de) * | 2005-05-13 | 2006-11-16 | Nordson Corp., Westlake | Kleberdüse mit gekühlter Überwachungsoptik |
JP2010153769A (ja) * | 2008-11-19 | 2010-07-08 | Tokyo Electron Ltd | 基板位置検出装置、基板位置検出方法、成膜装置、成膜方法、プログラム及びコンピュータ可読記憶媒体 |
DE102015117906B4 (de) * | 2015-10-21 | 2018-01-25 | Westfalen Ag | Verfahren und Vorrichtung zum Herstellen von metallischen Gegenständen |
FR3066938B1 (fr) * | 2017-06-02 | 2019-07-26 | Prodways Group | Procede et dispositif de fabrication additive par soudage a l'arc robotise avec apport de matiere par fil de soudage pour la fabrication de pieces en metal a tres faible conductivite thermique |
EP3486070B8 (de) * | 2017-11-15 | 2023-04-12 | Concept Laser GmbH | Verfahren zur generativen fertigung von dreidimensionalen objekten |
CN108127224B (zh) * | 2017-12-21 | 2020-08-25 | 重庆晓微城企业孵化器有限公司 | 自动空调架焊接设备 |
CN112059453A (zh) * | 2020-07-31 | 2020-12-11 | 苏州优霹耐磨复合材料有限公司 | 一种耐磨板组织细化处理方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3610876A (en) * | 1969-12-22 | 1971-10-05 | Gopal Krishna Bhat | Variable parameter tungsten-inert gas welding |
US4551197A (en) * | 1984-07-26 | 1985-11-05 | Guilmette Joseph G | Method and apparatus for the recovery and recycling of condensable gas reactants |
US4616694A (en) * | 1984-10-22 | 1986-10-14 | Hsieh Shih Yung | Fireproof cabinet system for electronic equipment |
ATE160055T1 (de) | 1990-09-07 | 1997-11-15 | Sulzer Metco Ag | Apparatur zur plasmathermischen bearbeitung von werkstückoberflächen |
US5227038A (en) * | 1991-10-04 | 1993-07-13 | William Marsh Rice University | Electric arc process for making fullerenes |
JP3372581B2 (ja) | 1993-01-21 | 2003-02-04 | 東京エレクトロン株式会社 | 処理装置 |
DE4336694A1 (de) * | 1993-10-27 | 1995-05-04 | Inst Neue Mat Gemein Gmbh | Verfahren zur Herstellung von Metall- und Keramiksinterkörpern und -schichten |
JPH0929002A (ja) * | 1995-07-17 | 1997-02-04 | Teisan Kk | ガス回収装置 |
JPH09142892A (ja) * | 1995-11-28 | 1997-06-03 | Furukawa Electric Co Ltd:The | 被覆光ファイバの製造装置及び製造方法 |
US5958348A (en) * | 1997-02-28 | 1999-09-28 | Nanogram Corporation | Efficient production of particles by chemical reaction |
US6296711B1 (en) * | 1998-04-14 | 2001-10-02 | Cvd Systems, Inc. | Film processing system |
KR100291330B1 (ko) * | 1998-07-02 | 2001-07-12 | 윤종용 | 반도체장치제조용스퍼터링설비및이를이용한스퍼터링방법 |
US6364932B1 (en) * | 2000-05-02 | 2002-04-02 | The Boc Group, Inc. | Cold gas-dynamic spraying process |
EP1437327B1 (de) * | 2001-10-19 | 2007-04-11 | Tokuyama Corporation | Verfahren zur herstellung von silicium |
DE10224777A1 (de) * | 2002-06-04 | 2003-12-18 | Linde Ag | Verfahren und Vorrichtung zum Kaltgasspritzen |
US6759085B2 (en) * | 2002-06-17 | 2004-07-06 | Sulzer Metco (Us) Inc. | Method and apparatus for low pressure cold spraying |
JP4336509B2 (ja) * | 2003-03-07 | 2009-09-30 | キヤノン株式会社 | 処理方法及びシステム |
GB0512184D0 (en) * | 2005-06-15 | 2005-07-20 | Rolls Royce Plc | Method and apparatus for the treatment of a component |
-
2004
- 2004-08-12 GB GBGB0417936.2A patent/GB0417936D0/en not_active Ceased
-
2005
- 2005-07-06 DE DE602005000770T patent/DE602005000770T2/de active Active
- 2005-07-06 ES ES05254224T patent/ES2282979T3/es active Active
- 2005-07-06 EP EP05254224A patent/EP1626102B1/de not_active Not-in-force
- 2005-07-08 US US11/176,305 patent/US7465476B2/en not_active Expired - Fee Related
-
2008
- 2008-11-10 US US12/292,009 patent/US20090071401A1/en not_active Abandoned
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109819660A (zh) * | 2017-09-18 | 2019-05-28 | 欧洲涂料股份公司 | 等离子体喷涂装置和方法 |
CN109819660B (zh) * | 2017-09-18 | 2022-05-03 | 林科泰克特伦多股份公司 | 等离子体喷涂装置和方法 |
Also Published As
Publication number | Publication date |
---|---|
US20090071401A1 (en) | 2009-03-19 |
DE602005000770T2 (de) | 2007-07-12 |
EP1626102B1 (de) | 2007-03-28 |
ES2282979T3 (es) | 2007-10-16 |
US7465476B2 (en) | 2008-12-16 |
GB0417936D0 (en) | 2004-09-15 |
EP1626102A1 (de) | 2006-02-15 |
US20060032441A1 (en) | 2006-02-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |