DE602004011038D1 - Beschichtete optik zur verbesserung der dauerhaftigkeit - Google Patents

Beschichtete optik zur verbesserung der dauerhaftigkeit

Info

Publication number
DE602004011038D1
DE602004011038D1 DE602004011038T DE602004011038T DE602004011038D1 DE 602004011038 D1 DE602004011038 D1 DE 602004011038D1 DE 602004011038 T DE602004011038 T DE 602004011038T DE 602004011038 T DE602004011038 T DE 602004011038T DE 602004011038 D1 DE602004011038 D1 DE 602004011038D1
Authority
DE
Germany
Prior art keywords
improve durability
coated optics
optics
coated
durability
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004011038T
Other languages
English (en)
Other versions
DE602004011038T2 (de
Inventor
Robert L Maier
Paul M Then
Robert W Sparrow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of DE602004011038D1 publication Critical patent/DE602004011038D1/de
Application granted granted Critical
Publication of DE602004011038T2 publication Critical patent/DE602004011038T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • G02B1/105—
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14—Protective coatings, e.g. hard coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
    • H01S3/0346—Protection of windows or mirrors against deleterious effects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
    • H01S3/2251—ArF, i.e. argon fluoride is comprised for lasing around 193 nm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Lasers (AREA)
DE602004011038T 2003-04-11 2004-03-23 Beschichtete optik zur verbesserung der dauerhaftigkeit Expired - Lifetime DE602004011038T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US46251803P 2003-04-11 2003-04-11
US462518P 2003-04-11
PCT/US2004/008910 WO2004095656A1 (en) 2003-04-11 2004-03-23 Coated optics to improve durability

Publications (2)

Publication Number Publication Date
DE602004011038D1 true DE602004011038D1 (de) 2008-02-14
DE602004011038T2 DE602004011038T2 (de) 2008-12-24

Family

ID=33310737

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004011038T Expired - Lifetime DE602004011038T2 (de) 2003-04-11 2004-03-23 Beschichtete optik zur verbesserung der dauerhaftigkeit

Country Status (8)

Country Link
US (1) US6872479B2 (de)
EP (1) EP1614199B1 (de)
JP (1) JP4479923B2 (de)
KR (1) KR101014442B1 (de)
CN (1) CN100365886C (de)
DE (1) DE602004011038T2 (de)
TW (1) TWI238262B (de)
WO (1) WO2004095656A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7128984B2 (en) * 2004-08-31 2006-10-31 Corning Incorporated Surfacing of metal fluoride excimer optics
US7305019B2 (en) * 2005-01-05 2007-12-04 Intel Corporation Excimer laser with electron emitters
US7242843B2 (en) * 2005-06-30 2007-07-10 Corning Incorporated Extended lifetime excimer laser optics
EP2399680A1 (de) * 2007-07-31 2011-12-28 Corning Incorporated DUV-Optik
US20090244507A1 (en) * 2008-03-28 2009-10-01 Nikon Corporation Optical member, light routing unit, and exposure apparatus
US8986572B2 (en) 2009-10-21 2015-03-24 Corning Incorporated Calcium fluoride optics with improved laser durability
US20130104461A1 (en) * 2011-09-16 2013-05-02 Carbodeon Ltd Oy Coating material, coating and coated object
DE102011054837A1 (de) 2011-10-26 2013-05-02 Carl Zeiss Laser Optics Gmbh Optisches Element
WO2013152031A1 (en) * 2012-04-04 2013-10-10 Kla-Tencor Corporation Protective fluorine-doped silicon oxide film for optical components
DE102018221189A1 (de) 2018-12-07 2020-06-10 Carl Zeiss Smt Gmbh Verfahren zum Bilden von Nanostrukturen an einer Oberfläche und optisches Element
DE102019200208A1 (de) 2019-01-10 2020-07-16 Carl Zeiss Smt Gmbh Verfahren zum in situ dynamischen Schutz einer Oberfläche und optische Anordnung
US11143953B2 (en) 2019-03-21 2021-10-12 International Business Machines Corporation Protection of photomasks from 193nm radiation damage using thin coatings of ALD Al2O3
DE102021200747A1 (de) 2021-01-28 2022-07-28 Carl Zeiss Smt Gmbh Verfahren zum Bilden einer Schicht, optisches Element und optisches System
CN113981380B (zh) * 2021-08-24 2023-12-05 湖北光安伦芯片有限公司 一种激光器及其镀膜方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4101707A (en) * 1977-04-04 1978-07-18 Rockwell International Corporation Homogeneous multilayer dielectric mirror and method of making same
JP2792689B2 (ja) * 1989-11-22 1998-09-03 三菱電機株式会社 光学部品保護方法
CA2040638A1 (en) * 1990-04-20 1991-10-21 Gedeon I. Deak Barrier materials useful for packaging
US5527596A (en) * 1990-09-27 1996-06-18 Diamonex, Incorporated Abrasion wear resistant coated substrate product
JPH0543399A (ja) * 1991-03-08 1993-02-23 Ricoh Co Ltd 薄膜機能部材
US6342312B2 (en) * 1996-03-22 2002-01-29 Canon Kabushiki Kaisha Calcium fluoride crystal, optical article and exposure apparatus for photo-lithography using the same
US6466365B1 (en) * 2000-04-07 2002-10-15 Corning Incorporated Film coated optical lithography elements and method of making
FR2812664B1 (fr) * 2000-08-01 2002-11-08 Essilor Int Procede de depot d'une couche de silice dopee au fluor et son application en optique ophtalmique
US6856638B2 (en) * 2000-10-23 2005-02-15 Lambda Physik Ag Resonator arrangement for bandwidth control

Also Published As

Publication number Publication date
CN1771638A (zh) 2006-05-10
KR101014442B1 (ko) 2011-02-14
JP2006523024A (ja) 2006-10-05
TWI238262B (en) 2005-08-21
US20040202225A1 (en) 2004-10-14
DE602004011038T2 (de) 2008-12-24
JP4479923B2 (ja) 2010-06-09
KR20050111641A (ko) 2005-11-25
TW200533948A (en) 2005-10-16
US6872479B2 (en) 2005-03-29
EP1614199A1 (de) 2006-01-11
EP1614199B1 (de) 2008-01-02
EP1614199A4 (de) 2006-05-17
WO2004095656A1 (en) 2004-11-04
CN100365886C (zh) 2008-01-30

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Legal Events

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8364 No opposition during term of opposition