DE602004010781D1 - Befestigungsvorrichtung für eine plasma-extraktionsblende - Google Patents

Befestigungsvorrichtung für eine plasma-extraktionsblende

Info

Publication number
DE602004010781D1
DE602004010781D1 DE602004010781T DE602004010781T DE602004010781D1 DE 602004010781 D1 DE602004010781 D1 DE 602004010781D1 DE 602004010781 T DE602004010781 T DE 602004010781T DE 602004010781 T DE602004010781 T DE 602004010781T DE 602004010781 D1 DE602004010781 D1 DE 602004010781D1
Authority
DE
Germany
Prior art keywords
fastening device
plasma extraction
extraction pad
pad
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004010781T
Other languages
English (en)
Other versions
DE602004010781T2 (de
Inventor
Victor Benveniste
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Axcelis Technologies Inc
Original Assignee
Axcelis Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Axcelis Technologies Inc filed Critical Axcelis Technologies Inc
Publication of DE602004010781D1 publication Critical patent/DE602004010781D1/de
Application granted granted Critical
Publication of DE602004010781T2 publication Critical patent/DE602004010781T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31701—Ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
DE602004010781T 2003-01-07 2004-01-07 Befestigungsvorrichtung für eine plasma-extraktionsblende Expired - Lifetime DE602004010781T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US395720 2003-01-07
US10/395,720 US20050242293A1 (en) 2003-01-07 2003-01-07 Mounting mechanism for plasma extraction aperture
PCT/US2004/000190 WO2004064100A2 (en) 2003-01-07 2004-01-07 Mounting mechanism for plasma extraction aperture

Publications (2)

Publication Number Publication Date
DE602004010781D1 true DE602004010781D1 (de) 2008-01-31
DE602004010781T2 DE602004010781T2 (de) 2008-12-04

Family

ID=32712901

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004010781T Expired - Lifetime DE602004010781T2 (de) 2003-01-07 2004-01-07 Befestigungsvorrichtung für eine plasma-extraktionsblende

Country Status (8)

Country Link
US (1) US20050242293A1 (de)
EP (1) EP1581962B1 (de)
JP (1) JP4517204B2 (de)
KR (1) KR20050092387A (de)
CN (1) CN100446168C (de)
DE (1) DE602004010781T2 (de)
TW (1) TWI321808B (de)
WO (1) WO2004064100A2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1530229B1 (de) * 2003-11-04 2012-04-04 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Teilchenoptische Komponente für Teilchenstrahlapparat
US7791047B2 (en) * 2003-12-12 2010-09-07 Semequip, Inc. Method and apparatus for extracting ions from an ion source for use in ion implantation
KR101160642B1 (ko) * 2003-12-12 2012-06-28 세미이큅, 인코포레이티드 고체로부터 승화된 증기의 유동제어
GB2449664B (en) * 2007-05-30 2011-12-14 Ion Science Ltd Electrode contact pellet and associated photoionisation detector assembly
US7915597B2 (en) * 2008-03-18 2011-03-29 Axcelis Technologies, Inc. Extraction electrode system for high current ion implanter
JP5903851B2 (ja) * 2011-11-29 2016-04-13 セイコーエプソン株式会社 イオンミリング装置
KR101890634B1 (ko) 2013-04-19 2018-08-22 캐논 아네르바 가부시키가이샤 이온빔 처리 장치, 전극 어셈블리 및 전극 어셈블리의 세정 방법
US9318302B1 (en) 2015-03-31 2016-04-19 Axcelis Technologies, Inc. Integrated extraction electrode manipulator for ion source
US10163609B2 (en) 2016-12-15 2018-12-25 Taiwan Semiconductor Manufacturing Co., Ltd. Plasma generation for ion implanter

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4883968A (en) * 1988-06-03 1989-11-28 Eaton Corporation Electron cyclotron resonance ion source
JPH06176890A (ja) * 1992-12-07 1994-06-24 Ishikawajima Harima Heavy Ind Co Ltd イオン源電極
US5420415A (en) * 1994-06-29 1995-05-30 Eaton Corporation Structure for alignment of an ion source aperture with a predetermined ion beam path
JPH08148106A (ja) * 1994-11-21 1996-06-07 Nissin Electric Co Ltd 大面積イオン引出し電極系
US6281508B1 (en) * 1999-02-08 2001-08-28 Etec Systems, Inc. Precision alignment and assembly of microlenses and microcolumns
US6417511B1 (en) * 2000-07-17 2002-07-09 Agilent Technologies, Inc. Ring pole ion guide apparatus, systems and method

Also Published As

Publication number Publication date
KR20050092387A (ko) 2005-09-21
TW200428463A (en) 2004-12-16
EP1581962B1 (de) 2007-12-19
EP1581962A2 (de) 2005-10-05
JP4517204B2 (ja) 2010-08-04
CN100446168C (zh) 2008-12-24
JP2006515108A (ja) 2006-05-18
TWI321808B (en) 2010-03-11
CN1723527A (zh) 2006-01-18
WO2004064100A2 (en) 2004-07-29
US20050242293A1 (en) 2005-11-03
DE602004010781T2 (de) 2008-12-04
WO2004064100A3 (en) 2004-10-21

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Legal Events

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8364 No opposition during term of opposition