DE602004009987D1 - Piezoelektrisches Bauelement und Herstellungsverfahren für ein piezoelektrisches Bauelement - Google Patents
Piezoelektrisches Bauelement und Herstellungsverfahren für ein piezoelektrisches BauelementInfo
- Publication number
- DE602004009987D1 DE602004009987D1 DE602004009987T DE602004009987T DE602004009987D1 DE 602004009987 D1 DE602004009987 D1 DE 602004009987D1 DE 602004009987 T DE602004009987 T DE 602004009987T DE 602004009987 T DE602004009987 T DE 602004009987T DE 602004009987 D1 DE602004009987 D1 DE 602004009987D1
- Authority
- DE
- Germany
- Prior art keywords
- piezoelectric device
- material layer
- piezoelectric material
- manufacturing
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
- H10N30/883—Further insulation means against electrical, physical or chemical damage, e.g. protective coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US46666403P | 2003-04-30 | 2003-04-30 | |
US466664P | 2003-04-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE602004009987D1 true DE602004009987D1 (de) | 2007-12-27 |
DE602004009987T2 DE602004009987T2 (de) | 2008-09-18 |
Family
ID=32990985
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602004009987T Expired - Fee Related DE602004009987T2 (de) | 2003-04-30 | 2004-04-29 | Piezoelektrisches Bauelement und Herstellungsverfahren für ein piezoelektrisches Bauelement |
Country Status (4)
Country | Link |
---|---|
US (1) | US7105988B2 (de) |
EP (1) | EP1473782B1 (de) |
AT (1) | ATE378695T1 (de) |
DE (1) | DE602004009987T2 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100599083B1 (ko) | 2003-04-22 | 2006-07-12 | 삼성전자주식회사 | 캔틸레버 형태의 압전 박막 공진 소자 및 그 제조방법 |
US7819870B2 (en) * | 2005-10-13 | 2010-10-26 | St. Jude Medical, Atrial Fibrillation Division, Inc. | Tissue contact and thermal assessment for brush electrodes |
JP2006214898A (ja) * | 2005-02-04 | 2006-08-17 | Seiko Epson Corp | 圧電デバイス及び電子機器 |
DE102005020527A1 (de) * | 2005-05-03 | 2006-11-09 | Festo Ag & Co. | Piezoelektrisches Element |
US8672936B2 (en) * | 2005-10-13 | 2014-03-18 | St. Jude Medical, Atrial Fibrillation Division, Inc. | Systems and methods for assessing tissue contact |
US8162935B2 (en) * | 2005-10-27 | 2012-04-24 | St. Jude Medical, Atrial Fibrillation Division, Inc. | Systems and methods for electrode contact assessment |
US8226648B2 (en) | 2007-12-31 | 2012-07-24 | St. Jude Medical, Atrial Fibrillation Division, Inc. | Pressure-sensitive flexible polymer bipolar electrode |
US10085798B2 (en) | 2006-12-29 | 2018-10-02 | St. Jude Medical, Atrial Fibrillation Division, Inc. | Ablation electrode with tactile sensor |
DE102007000552A1 (de) * | 2007-10-08 | 2009-04-09 | Huf Hülsbeck & Fürst Gmbh & Co. Kg | Betätigbare Schalteinrichtung für ein Kraftfahrzeug |
US11121647B2 (en) * | 2018-12-13 | 2021-09-14 | Magnecomp Corporation | Contact pad features |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1162336B (it) * | 1979-06-22 | 1987-03-25 | Consiglio Nazionale Ricerche | Procedimento per la realizzazione di trasduttori ultraacustici a cortina di linee o a matrice di punti e trasduttori ottenuti |
JPS60189307A (ja) * | 1984-03-09 | 1985-09-26 | Toshiba Corp | 圧電薄膜共振器およびその製造方法 |
JPS6140071A (ja) | 1984-07-31 | 1986-02-26 | Mitsubishi Petrochem Co Ltd | 可撓性圧電素子 |
JPS61182286A (ja) * | 1985-02-07 | 1986-08-14 | Mitsubishi Petrochem Co Ltd | 可撓性圧電素子 |
US4904894A (en) | 1989-01-24 | 1990-02-27 | Pennwalt Corporation | Hail sensor |
JP2665106B2 (ja) * | 1992-03-17 | 1997-10-22 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
DE4217351C1 (de) | 1992-05-26 | 1993-10-21 | Wolfgang Schaefer Gmbh Elektro | Piezoelektrischer Taster |
US6420819B1 (en) | 1994-01-27 | 2002-07-16 | Active Control Experts, Inc. | Packaged strain actuator |
US6778090B2 (en) * | 1996-09-04 | 2004-08-17 | Paul Newham | Modular system for monitoring the presence of a person using a variety of sensing devices |
JP3705559B2 (ja) * | 1996-12-16 | 2005-10-12 | Necトーキン株式会社 | 圧電トランス電源 |
JPH114137A (ja) * | 1997-06-12 | 1999-01-06 | Murata Mfg Co Ltd | 圧電部品 |
DE10023556A1 (de) | 2000-05-15 | 2001-11-29 | Festo Ag & Co | Piezo-Biegewandler sowie Verwendung desselben |
US20030001696A1 (en) * | 2000-11-29 | 2003-01-02 | Kenji Yoshida | Acoustic wave device |
JP4248777B2 (ja) | 2000-12-28 | 2009-04-02 | 株式会社デンソー | インジェクタ用圧電体素子及びその製造方法,並びにインジェクタ |
US20020140321A1 (en) | 2001-03-27 | 2002-10-03 | Waterfield Larry G. | Coated electroactive bender actuator |
US6392332B1 (en) * | 2001-12-04 | 2002-05-21 | Kuan Kuan Sung | Laminated piezo ceramic transformer device |
-
2004
- 2004-04-28 US US10/834,683 patent/US7105988B2/en not_active Expired - Fee Related
- 2004-04-29 DE DE602004009987T patent/DE602004009987T2/de not_active Expired - Fee Related
- 2004-04-29 AT AT04101828T patent/ATE378695T1/de not_active IP Right Cessation
- 2004-04-29 EP EP04101828A patent/EP1473782B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1473782A3 (de) | 2005-10-12 |
DE602004009987T2 (de) | 2008-09-18 |
ATE378695T1 (de) | 2007-11-15 |
US20040217674A1 (en) | 2004-11-04 |
EP1473782B1 (de) | 2007-11-14 |
EP1473782A2 (de) | 2004-11-03 |
US7105988B2 (en) | 2006-09-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |