DE602004008075D1 - Bistabiler mikroschalter mit geringer stromaufnahme - Google Patents
Bistabiler mikroschalter mit geringer stromaufnahmeInfo
- Publication number
- DE602004008075D1 DE602004008075D1 DE602004008075T DE602004008075T DE602004008075D1 DE 602004008075 D1 DE602004008075 D1 DE 602004008075D1 DE 602004008075 T DE602004008075 T DE 602004008075T DE 602004008075 T DE602004008075 T DE 602004008075T DE 602004008075 D1 DE602004008075 D1 DE 602004008075D1
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- power consumption
- low power
- conductive tracks
- deformed position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 abstract 3
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H2061/006—Micromechanical thermal relay
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
- Liquid Crystal (AREA)
- Thermally Actuated Switches (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Polyesters Or Polycarbonates (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0350278A FR2857153B1 (fr) | 2003-07-01 | 2003-07-01 | Micro-commutateur bistable a faible consommation. |
FR0350278 | 2003-07-01 | ||
PCT/FR2004/050298 WO2005006364A1 (fr) | 2003-07-01 | 2004-06-30 | Micro-commutateur bistable a faible consommation |
Publications (2)
Publication Number | Publication Date |
---|---|
DE602004008075D1 true DE602004008075D1 (de) | 2007-09-20 |
DE602004008075T2 DE602004008075T2 (de) | 2008-05-15 |
Family
ID=33523072
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602004008075T Expired - Lifetime DE602004008075T2 (de) | 2003-07-01 | 2004-06-30 | Bistabiler mikroschalter mit geringer stromaufnahme |
Country Status (7)
Country | Link |
---|---|
US (1) | US7489228B2 (de) |
EP (1) | EP1639613B1 (de) |
JP (1) | JP4464397B2 (de) |
AT (1) | ATE369612T1 (de) |
DE (1) | DE602004008075T2 (de) |
FR (1) | FR2857153B1 (de) |
WO (1) | WO2005006364A1 (de) |
Families Citing this family (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999052006A2 (en) | 1998-04-08 | 1999-10-14 | Etalon, Inc. | Interferometric modulation of radiation |
US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
WO2003007049A1 (en) | 1999-10-05 | 2003-01-23 | Iridigm Display Corporation | Photonic mems and structures |
FR2865724A1 (fr) * | 2004-02-04 | 2005-08-05 | St Microelectronics Sa | Microsysteme electromecanique pouvant basculer entre deux positions stables |
US20050269688A1 (en) * | 2004-06-03 | 2005-12-08 | Lior Shiv | Microelectromechanical systems (MEMS) devices integrated in a hermetically sealed package |
US8008736B2 (en) | 2004-09-27 | 2011-08-30 | Qualcomm Mems Technologies, Inc. | Analog interferometric modulator device |
US7372613B2 (en) | 2004-09-27 | 2008-05-13 | Idc, Llc | Method and device for multistate interferometric light modulation |
US7724993B2 (en) * | 2004-09-27 | 2010-05-25 | Qualcomm Mems Technologies, Inc. | MEMS switches with deforming membranes |
US7944599B2 (en) | 2004-09-27 | 2011-05-17 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
US7446927B2 (en) * | 2004-09-27 | 2008-11-04 | Idc, Llc | MEMS switch with set and latch electrodes |
US7289259B2 (en) | 2004-09-27 | 2007-10-30 | Idc, Llc | Conductive bus structure for interferometric modulator array |
US7719500B2 (en) | 2004-09-27 | 2010-05-18 | Qualcomm Mems Technologies, Inc. | Reflective display pixels arranged in non-rectangular arrays |
US7420725B2 (en) | 2004-09-27 | 2008-09-02 | Idc, Llc | Device having a conductive light absorbing mask and method for fabricating same |
US7936497B2 (en) | 2004-09-27 | 2011-05-03 | Qualcomm Mems Technologies, Inc. | MEMS device having deformable membrane characterized by mechanical persistence |
US7893919B2 (en) | 2004-09-27 | 2011-02-22 | Qualcomm Mems Technologies, Inc. | Display region architectures |
US7283030B2 (en) * | 2004-11-22 | 2007-10-16 | Eastman Kodak Company | Doubly-anchored thermal actuator having varying flexural rigidity |
US7339454B1 (en) * | 2005-04-11 | 2008-03-04 | Sandia Corporation | Tensile-stressed microelectromechanical apparatus and microelectromechanical relay formed therefrom |
US7916980B2 (en) | 2006-01-13 | 2011-03-29 | Qualcomm Mems Technologies, Inc. | Interconnect structure for MEMS device |
US7649671B2 (en) | 2006-06-01 | 2010-01-19 | Qualcomm Mems Technologies, Inc. | Analog interferometric modulator device with electrostatic actuation and release |
US7835061B2 (en) | 2006-06-28 | 2010-11-16 | Qualcomm Mems Technologies, Inc. | Support structures for free-standing electromechanical devices |
US7527998B2 (en) | 2006-06-30 | 2009-05-05 | Qualcomm Mems Technologies, Inc. | Method of manufacturing MEMS devices providing air gap control |
US7684106B2 (en) | 2006-11-02 | 2010-03-23 | Qualcomm Mems Technologies, Inc. | Compatible MEMS switch architecture |
US7724417B2 (en) * | 2006-12-19 | 2010-05-25 | Qualcomm Mems Technologies, Inc. | MEMS switches with deforming membranes |
FR2911448B1 (fr) * | 2007-01-16 | 2009-07-10 | St Microelectronics Sa | Resonateur acoustique en volume a frequence de resonance reglable et utilisation d'un tel resonateur dans le domaine de la telephonie |
US7719752B2 (en) | 2007-05-11 | 2010-05-18 | Qualcomm Mems Technologies, Inc. | MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same |
US8022896B2 (en) * | 2007-08-08 | 2011-09-20 | Qualcomm Mems Technologies, Inc. | ESD protection for MEMS display panels |
JP2009077479A (ja) * | 2007-09-19 | 2009-04-09 | Japan Radio Co Ltd | 無線スイッチ制御装置 |
US20090146773A1 (en) * | 2007-12-07 | 2009-06-11 | Honeywell International Inc. | Lateral snap acting mems micro switch |
US7642135B2 (en) * | 2007-12-17 | 2010-01-05 | Skyworks Solutions, Inc. | Thermal mechanical flip chip die bonding |
US8232858B1 (en) * | 2008-02-20 | 2012-07-31 | Sandia Corporation | Microelectromechanical (MEM) thermal actuator |
US7944604B2 (en) | 2008-03-07 | 2011-05-17 | Qualcomm Mems Technologies, Inc. | Interferometric modulator in transmission mode |
DE102009018744A1 (de) | 2009-04-27 | 2010-10-28 | Stock E.K. Bernd | Vorrichtung zur mechanischen Fixierung von Gegenständen |
US8582254B2 (en) | 2009-05-29 | 2013-11-12 | General Electric Company | Switching array having circuitry to adjust a temporal distribution of a gating signal applied to the array |
US8427792B2 (en) | 2009-05-29 | 2013-04-23 | General Electric Company | Method and system to enhance reliability of switch array |
JP5263203B2 (ja) * | 2010-03-12 | 2013-08-14 | オムロン株式会社 | 静電リレー |
US8339787B2 (en) * | 2010-09-08 | 2012-12-25 | Apple Inc. | Heat valve for thermal management in a mobile communications device |
CN102142338A (zh) * | 2010-12-16 | 2011-08-03 | 上海交通大学 | 面内运动的多向多通道多稳态微机电开关 |
US9134527B2 (en) | 2011-04-04 | 2015-09-15 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
US8963159B2 (en) | 2011-04-04 | 2015-02-24 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
US8659816B2 (en) | 2011-04-25 | 2014-02-25 | Qualcomm Mems Technologies, Inc. | Mechanical layer and methods of making the same |
FR2984008B1 (fr) * | 2011-12-13 | 2014-01-10 | Commissariat Energie Atomique | Dispositif electronique |
FR2990320B1 (fr) | 2012-05-07 | 2014-06-06 | Commissariat Energie Atomique | Haut-parleur digital a performance amelioree |
ITTO20120691A1 (it) * | 2012-08-01 | 2014-02-02 | Milano Politecnico | Sensore d'urto con meccanismo bistabile e metodo per il rilevamento di urti |
FR3012671B1 (fr) * | 2013-10-29 | 2015-11-13 | St Microelectronics Rousset | Dispositif mecanique integre a mouvement vertical |
WO2017082985A2 (en) | 2015-08-20 | 2017-05-18 | Northeaslem University | Zero power plasmonic microelectromechanical device |
KR101968650B1 (ko) * | 2018-05-15 | 2019-04-12 | 울산과학기술원 | 3d 프린팅으로 제조되는 회전 가능한 쌍안정성 구조체 및 이의 용도 |
KR101968644B1 (ko) * | 2018-05-15 | 2019-08-13 | 울산과학기술원 | 3d 프린팅으로 제조되는 트위스트 유형의 쌍안정성 구조체 및 이의 용도 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5619061A (en) * | 1993-07-27 | 1997-04-08 | Texas Instruments Incorporated | Micromechanical microwave switching |
US5536963A (en) * | 1994-05-11 | 1996-07-16 | Regents Of The University Of Minnesota | Microdevice with ferroelectric for sensing or applying a force |
FR2772512B1 (fr) * | 1997-12-16 | 2004-04-16 | Commissariat Energie Atomique | Microsysteme a element deformable sous l'effet d'un actionneur thermique |
US6188301B1 (en) * | 1998-11-13 | 2001-02-13 | General Electric Company | Switching structure and method of fabrication |
DE19937811C2 (de) * | 1999-08-11 | 2001-07-26 | Bosch Gmbh Robert | Relais, insbesondere Mikro Relais zum Schalen eines Stromkreises |
US6239685B1 (en) * | 1999-10-14 | 2001-05-29 | International Business Machines Corporation | Bistable micromechanical switches |
FR2818795B1 (fr) * | 2000-12-27 | 2003-12-05 | Commissariat Energie Atomique | Micro-dispositif a actionneur thermique |
US6911891B2 (en) * | 2001-01-19 | 2005-06-28 | Massachusetts Institute Of Technology | Bistable actuation techniques, mechanisms, and applications |
SE0101183D0 (sv) * | 2001-04-02 | 2001-04-02 | Ericsson Telefon Ab L M | Micro electromechanical switches |
US6768412B2 (en) * | 2001-08-20 | 2004-07-27 | Honeywell International, Inc. | Snap action thermal switch |
US6621392B1 (en) * | 2002-04-25 | 2003-09-16 | International Business Machines Corporation | Micro electromechanical switch having self-aligned spacers |
JP3969228B2 (ja) * | 2002-07-19 | 2007-09-05 | 松下電工株式会社 | 機械的変形量検出センサ及びそれを用いた加速度センサ、圧力センサ |
US7283030B2 (en) * | 2004-11-22 | 2007-10-16 | Eastman Kodak Company | Doubly-anchored thermal actuator having varying flexural rigidity |
-
2003
- 2003-07-01 FR FR0350278A patent/FR2857153B1/fr not_active Expired - Fee Related
-
2004
- 2004-06-30 EP EP04767860A patent/EP1639613B1/de not_active Expired - Lifetime
- 2004-06-30 JP JP2006516357A patent/JP4464397B2/ja not_active Expired - Lifetime
- 2004-06-30 DE DE602004008075T patent/DE602004008075T2/de not_active Expired - Lifetime
- 2004-06-30 US US10/561,948 patent/US7489228B2/en active Active
- 2004-06-30 AT AT04767860T patent/ATE369612T1/de not_active IP Right Cessation
- 2004-06-30 WO PCT/FR2004/050298 patent/WO2005006364A1/fr active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
DE602004008075T2 (de) | 2008-05-15 |
FR2857153B1 (fr) | 2005-08-26 |
US7489228B2 (en) | 2009-02-10 |
JP2007516560A (ja) | 2007-06-21 |
EP1639613A1 (de) | 2006-03-29 |
EP1639613B1 (de) | 2007-08-08 |
FR2857153A1 (fr) | 2005-01-07 |
WO2005006364A1 (fr) | 2005-01-20 |
ATE369612T1 (de) | 2007-08-15 |
JP4464397B2 (ja) | 2010-05-19 |
US20060152328A1 (en) | 2006-07-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |