FR3012671B1 - Dispositif mecanique integre a mouvement vertical - Google Patents
Dispositif mecanique integre a mouvement verticalInfo
- Publication number
- FR3012671B1 FR3012671B1 FR1360538A FR1360538A FR3012671B1 FR 3012671 B1 FR3012671 B1 FR 3012671B1 FR 1360538 A FR1360538 A FR 1360538A FR 1360538 A FR1360538 A FR 1360538A FR 3012671 B1 FR3012671 B1 FR 3012671B1
- Authority
- FR
- France
- Prior art keywords
- vertical movement
- mechanical device
- integrated mechanical
- integrated
- movement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H61/02—Electrothermal relays wherein the thermally-sensitive member is heated indirectly, e.g. resistively, inductively
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/58—Electric connections to or between contacts; Terminals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H9/00—Details of switching devices, not covered by groups H01H1/00 - H01H7/00
- H01H9/02—Bases, casings, or covers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/031—Thermal actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/053—Translation according to an axis perpendicular to the substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1360538A FR3012671B1 (fr) | 2013-10-29 | 2013-10-29 | Dispositif mecanique integre a mouvement vertical |
US14/517,369 US10157720B2 (en) | 2013-10-29 | 2014-10-17 | Integrated mechanical device with vertical movement |
US16/222,017 US10748726B2 (en) | 2013-10-29 | 2018-12-17 | Integrated mechanical device with vertical movement |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1360538A FR3012671B1 (fr) | 2013-10-29 | 2013-10-29 | Dispositif mecanique integre a mouvement vertical |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3012671A1 FR3012671A1 (fr) | 2015-05-01 |
FR3012671B1 true FR3012671B1 (fr) | 2015-11-13 |
Family
ID=50543101
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1360538A Expired - Fee Related FR3012671B1 (fr) | 2013-10-29 | 2013-10-29 | Dispositif mecanique integre a mouvement vertical |
Country Status (2)
Country | Link |
---|---|
US (2) | US10157720B2 (fr) |
FR (1) | FR3012671B1 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3012671B1 (fr) * | 2013-10-29 | 2015-11-13 | St Microelectronics Rousset | Dispositif mecanique integre a mouvement vertical |
US20230068451A1 (en) * | 2021-08-30 | 2023-03-02 | Texas Instruments Incorporated | Methods and apparatus to thermally actuate microelectromechanical structures devices |
Family Cites Families (48)
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GB1412465A (en) | 1972-10-13 | 1975-11-05 | Shell Int Research | Method of forming an article from resin-impregnated plastics material |
US5844238A (en) | 1996-03-27 | 1998-12-01 | David Sarnoff Research Center, Inc. | Infrared imager using room temperature capacitance sensor |
US5880921A (en) | 1997-04-28 | 1999-03-09 | Rockwell Science Center, Llc | Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology |
US6708491B1 (en) * | 2000-09-12 | 2004-03-23 | 3M Innovative Properties Company | Direct acting vertical thermal actuator |
US7095309B1 (en) * | 2000-10-20 | 2006-08-22 | Silverbrook Research Pty Ltd | Thermoelastic actuator design |
US6377438B1 (en) | 2000-10-23 | 2002-04-23 | Mcnc | Hybrid microelectromechanical system tunable capacitor and associated fabrication methods |
US6483056B2 (en) * | 2000-10-27 | 2002-11-19 | Daniel J Hyman | Microfabricated relay with multimorph actuator and electrostatic latch mechanism |
AU2002359369A1 (en) * | 2001-11-09 | 2003-05-26 | Coventor, Incorporated | Trilayered beam mems device and related methods |
GB2387480B (en) | 2002-04-09 | 2005-04-13 | Microsaic Systems Ltd | Micro-engineered self-releasing switch |
US7026184B2 (en) * | 2003-02-26 | 2006-04-11 | Carnegie Mellon University | Method of fabricating microstructures and devices made therefrom |
US6903492B2 (en) * | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Wetting finger latching piezoelectric relay |
FR2857153B1 (fr) * | 2003-07-01 | 2005-08-26 | Commissariat Energie Atomique | Micro-commutateur bistable a faible consommation. |
GB2410371B (en) | 2004-01-22 | 2007-04-04 | Microsaic Systems Ltd | Microengineered broadband electrical switches |
US7960804B1 (en) | 2004-05-24 | 2011-06-14 | The United States of America as respresented by the Secretary of the Air Force | Latching zip-mode actuated mono wafer MEMS switch |
US6906905B1 (en) * | 2004-06-30 | 2005-06-14 | International Business Machines Corporation | Micro electro-mechanical variable capacitor |
US7348870B2 (en) | 2005-01-05 | 2008-03-25 | International Business Machines Corporation | Structure and method of fabricating a hinge type MEMS switch |
US7312678B2 (en) | 2005-01-05 | 2007-12-25 | Norcada Inc. | Micro-electromechanical relay |
JP4580826B2 (ja) | 2005-06-17 | 2010-11-17 | 株式会社東芝 | マイクロメカニカルデバイス、マイクロスイッチ、容量可変キャパシタ、高周波回路及び光学スイッチ |
US7489004B2 (en) | 2006-01-24 | 2009-02-10 | Stmicroelectronics S.R.L. | Micro-electro-mechanical variable capacitor for radio frequency applications with reduced influence of a surface roughness |
JP2009537337A (ja) * | 2006-05-17 | 2009-10-29 | ミクロガン ゲーエムベーハー | 第iii族窒化物半導体を含むマイクロメカニカル・アクチュエータ |
US7675162B2 (en) * | 2006-10-03 | 2010-03-09 | Innovative Micro Technology | Interconnect structure using through wafer vias and method of fabrication |
EP2269201A1 (fr) * | 2008-04-18 | 2011-01-05 | Nxp B.V. | Condensateur accordable et commutateur utilisant des systèmes micro-électromécaniques avec matériau à changement de phase |
US8767373B2 (en) | 2008-05-08 | 2014-07-01 | Nxp, B.V. | Tunable capacitor |
US7545252B1 (en) * | 2008-07-24 | 2009-06-09 | International Business Machines Corporation | Phase change MEMS switch |
EP2344416B1 (fr) | 2008-11-07 | 2020-08-05 | Cavendish Kinetics, Inc. | Pluralité de dispositifs mems plus petits pour remplacer un dispositif mems plus grand |
US7978045B2 (en) * | 2008-12-04 | 2011-07-12 | Industrial Technology Research Institute | Multi-actuation MEMS switch |
ATE512447T1 (de) | 2008-12-24 | 2011-06-15 | St Microelectronics Rousset | Vorrichtung zur überwachung der temperatur eines elementes |
US8604898B2 (en) | 2009-04-20 | 2013-12-10 | International Business Machines Corporation | Vertical integrated circuit switches, design structure and methods of fabricating same |
WO2010127262A2 (fr) | 2009-04-30 | 2010-11-04 | SunPoint Technologies, Inc. | Positionnement thermomécanique pour suivi des radiations |
US8776573B2 (en) * | 2009-05-29 | 2014-07-15 | Life Technologies Corporation | Methods and apparatus for measuring analytes |
TWI396242B (zh) | 2009-08-11 | 2013-05-11 | Pixart Imaging Inc | 微電子裝置、微電子裝置的製造方法、微機電封裝結構及其封裝方法 |
US8247253B2 (en) | 2009-08-11 | 2012-08-21 | Pixart Imaging Inc. | MEMS package structure and method for fabricating the same |
US8569091B2 (en) * | 2009-08-27 | 2013-10-29 | International Business Machines Corporation | Integrated circuit switches, design structure and methods of fabricating the same |
JP5204066B2 (ja) | 2009-09-16 | 2013-06-05 | 株式会社東芝 | Memsデバイス |
US20110073188A1 (en) * | 2009-09-30 | 2011-03-31 | Marcus Michael A | Microvalve for control of compressed fluids |
WO2012040092A1 (fr) * | 2010-09-21 | 2012-03-29 | Cavendish Kinetics, Inc | Électrode d'excursion haute et microstructure à réseau croisé |
US20120126433A1 (en) * | 2010-11-19 | 2012-05-24 | Baolab Microsystems Sl | Methods and systems for fabrication of mems cmos devices in lower node designs |
JP5630243B2 (ja) | 2010-11-30 | 2014-11-26 | セイコーエプソン株式会社 | 電子装置、電子機器及び電子装置の製造方法 |
US8609450B2 (en) | 2010-12-06 | 2013-12-17 | International Business Machines Corporation | MEMS switches and fabrication methods |
US8441038B1 (en) * | 2011-01-20 | 2013-05-14 | Xilinx, Inc. | Nano relay with floating bridge |
US20140062619A1 (en) * | 2011-02-01 | 2014-03-06 | Baolab Microsystems Sl | Methods and systems for mems cmos-based radio frequency filters having arrays of elements |
WO2013052067A1 (fr) * | 2011-10-07 | 2013-04-11 | Intel Corporation | Formation d'un condensateur de mémoire dram parmi l'interconnexion métallique |
FR2984010B1 (fr) | 2011-12-09 | 2014-01-03 | St Microelectronics Rousset | Dispositif capacitif integre ayant une valeur capacitive thermiquement variable |
FR2984009B1 (fr) | 2011-12-09 | 2014-01-03 | St Microelectronics Rousset | Dispositif mecanique de commutation electrique integre |
ITTO20120224A1 (it) * | 2012-03-15 | 2013-09-16 | St Microelectronics Srl | Elemento di memoria elettromeccanico integrato e memoria elettronica comprendente il medesimo |
FR3000841A1 (fr) | 2013-01-09 | 2014-07-11 | St Microelectronics Rousset | Procede de realisation d'un dispositif metallique loge dans un logement ferme au sein d'un circuit integre, et circuit integre correspondant |
US9371222B2 (en) * | 2013-03-15 | 2016-06-21 | Honeywell International Inc. | Microstructure plating systems and methods |
FR3012671B1 (fr) * | 2013-10-29 | 2015-11-13 | St Microelectronics Rousset | Dispositif mecanique integre a mouvement vertical |
-
2013
- 2013-10-29 FR FR1360538A patent/FR3012671B1/fr not_active Expired - Fee Related
-
2014
- 2014-10-17 US US14/517,369 patent/US10157720B2/en active Active
-
2018
- 2018-12-17 US US16/222,017 patent/US10748726B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20190122845A1 (en) | 2019-04-25 |
US20150116072A1 (en) | 2015-04-30 |
FR3012671A1 (fr) | 2015-05-01 |
US10748726B2 (en) | 2020-08-18 |
US10157720B2 (en) | 2018-12-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 3 |
|
PLFP | Fee payment |
Year of fee payment: 4 |
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PLFP | Fee payment |
Year of fee payment: 5 |
|
PLFP | Fee payment |
Year of fee payment: 6 |
|
PLFP | Fee payment |
Year of fee payment: 7 |
|
ST | Notification of lapse |
Effective date: 20210605 |