DE602004005347D1 - Einrichtung und verfahren zur eindringungsfreien detektion und messung der eigenschaften eines mediums - Google Patents

Einrichtung und verfahren zur eindringungsfreien detektion und messung der eigenschaften eines mediums

Info

Publication number
DE602004005347D1
DE602004005347D1 DE602004005347T DE602004005347T DE602004005347D1 DE 602004005347 D1 DE602004005347 D1 DE 602004005347D1 DE 602004005347 T DE602004005347 T DE 602004005347T DE 602004005347 T DE602004005347 T DE 602004005347T DE 602004005347 D1 DE602004005347 D1 DE 602004005347D1
Authority
DE
Germany
Prior art keywords
frequency
microscope
zone
order
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004005347T
Other languages
English (en)
Other versions
DE602004005347T2 (de
Inventor
Timothee Pol Toury
Joseph Zyss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Ecole Normale Superieure de Cachan
Original Assignee
Centre National de la Recherche Scientifique CNRS
Ecole Normale Superieure de Cachan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Ecole Normale Superieure de Cachan filed Critical Centre National de la Recherche Scientifique CNRS
Publication of DE602004005347D1 publication Critical patent/DE602004005347D1/de
Application granted granted Critical
Publication of DE602004005347T2 publication Critical patent/DE602004005347T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02011—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal polarization variation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02024—Measuring in transmission, i.e. light traverses the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02042—Confocal imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/65—Spatial scanning object beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Inspection Of Paper Currency And Valuable Securities (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE602004005347T 2003-08-22 2004-08-18 Einrichtung und verfahren zur eindringungsfreien detektion und messung der eigenschaften eines mediums Expired - Lifetime DE602004005347T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0310116A FR2859020B1 (fr) 2003-08-22 2003-08-22 Dispositif et procede de detection et de mesure non invasives des proprietes d'un milieu
FR0310116 2003-08-22
PCT/FR2004/002157 WO2005022128A2 (fr) 2003-08-22 2004-08-18 Dispositif et procede de detection et de mesure non invasives des proprietes d’un milieu

Publications (2)

Publication Number Publication Date
DE602004005347D1 true DE602004005347D1 (de) 2007-04-26
DE602004005347T2 DE602004005347T2 (de) 2007-11-29

Family

ID=34112861

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004005347T Expired - Lifetime DE602004005347T2 (de) 2003-08-22 2004-08-18 Einrichtung und verfahren zur eindringungsfreien detektion und messung der eigenschaften eines mediums

Country Status (7)

Country Link
US (1) US7710573B2 (de)
EP (1) EP1656536B1 (de)
JP (1) JP4699364B2 (de)
AT (1) ATE356969T1 (de)
DE (1) DE602004005347T2 (de)
FR (1) FR2859020B1 (de)
WO (1) WO2005022128A2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7268881B2 (en) * 2004-02-17 2007-09-11 The Curators Of The University Of Missouri Light scattering detector
US7903252B2 (en) * 2005-01-13 2011-03-08 The Curators Of The University Of Missouri Noise cancellation in fourier transform spectrophotometry
EP1915608A2 (de) 2005-08-17 2008-04-30 Technische Universität Braunschweig Mikroskop

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5272434A (en) * 1987-06-20 1993-12-21 Schlumberger Technologies, Inc. Method and apparatus for electro-optically testing circuits
CA1330360C (en) * 1987-07-31 1994-06-21 Paul Meyrueix Circuit testers
JP2538435B2 (ja) * 1991-03-27 1996-09-25 理化学研究所 縞位相分布解析方法および縞位相分布解析装置
JPH1053733A (ja) * 1996-08-09 1998-02-24 Mitsuboshi Belting Ltd すりガラス着色塗料およびすりガラス化した強化ガラスの製造方法
US5905577A (en) * 1997-03-15 1999-05-18 Schlumberger Technologies, Inc. Dual-laser voltage probing of IC's
JPH1114322A (ja) * 1997-06-19 1999-01-22 Canon Inc 電子モアレ測定方法及びそれを用いた測定装置
US6072179A (en) * 1998-08-07 2000-06-06 Intel Corporation Method and apparatus using an infrared laser based optical probe for measuring voltages directly from active regions in an integrated circuit
EP1121602B1 (de) * 1998-10-14 2004-04-07 The Johns Hopkins University Verbesserung der prüfbarkeit von multi-chip-modulen durch dielektrikumszwischenschichten aus polarisiertem polymer
US6512385B1 (en) * 1999-07-26 2003-01-28 Paul Pfaff Method for testing a device under test including the interference of two beams
US6304330B1 (en) * 1999-10-06 2001-10-16 Metrolaser, Inc. Methods and apparatus for splitting, imaging, and measuring wavefronts in interferometry
US6587258B1 (en) * 2000-03-24 2003-07-01 Southwest Sciences Incorporated Electro-optic electric field probe
JP2004505314A (ja) * 2000-07-27 2004-02-19 ゼテティック・インスティチュート バックグラウンド振幅が減衰および補償された走査干渉近距離場共焦点顕微鏡検査
US7206078B2 (en) * 2002-05-03 2007-04-17 Attofemto, Inc. Non-destructive testing system using a laser beam
FR2859024B1 (fr) * 2003-08-22 2005-12-09 Centre Nat Rech Scient Dispositif et procede de detection et de mesure non invasives d'un champ electrique

Also Published As

Publication number Publication date
JP4699364B2 (ja) 2011-06-08
US7710573B2 (en) 2010-05-04
EP1656536A2 (de) 2006-05-17
WO2005022128A2 (fr) 2005-03-10
WO2005022128A3 (fr) 2005-06-16
DE602004005347T2 (de) 2007-11-29
FR2859020B1 (fr) 2005-11-04
JP2007503574A (ja) 2007-02-22
ATE356969T1 (de) 2007-04-15
US20070070352A1 (en) 2007-03-29
EP1656536B1 (de) 2007-03-14
FR2859020A1 (fr) 2005-02-25

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