DE602004003621D1 - Beschichtung für siliziumhaltiges Substrat - Google Patents

Beschichtung für siliziumhaltiges Substrat

Info

Publication number
DE602004003621D1
DE602004003621D1 DE200460003621 DE602004003621T DE602004003621D1 DE 602004003621 D1 DE602004003621 D1 DE 602004003621D1 DE 200460003621 DE200460003621 DE 200460003621 DE 602004003621 T DE602004003621 T DE 602004003621T DE 602004003621 D1 DE602004003621 D1 DE 602004003621D1
Authority
DE
Germany
Prior art keywords
silicon
coating
containing substrate
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE200460003621
Other languages
English (en)
Other versions
DE602004003621T2 (de
Inventor
Greg C Ojard
Shantikumar V Nair
Harry E Eaton
Yasser A Gowayed
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RTX Corp
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Publication of DE602004003621D1 publication Critical patent/DE602004003621D1/de
Application granted granted Critical
Publication of DE602004003621T2 publication Critical patent/DE602004003621T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
    • F01D5/12—Blades
    • F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
    • F01D5/288—Protective coatings for blades
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/12—Light metals
    • F05D2300/121—Aluminium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/20—Oxide or non-oxide ceramics
    • F05D2300/21—Oxide ceramics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/20—Oxide or non-oxide ceramics
    • F05D2300/22—Non-oxide ceramics
    • F05D2300/226—Carbides
    • F05D2300/2261—Carbides of silicon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/20—Oxide or non-oxide ceramics
    • F05D2300/22—Non-oxide ceramics
    • F05D2300/228—Nitrides
    • F05D2300/2283—Nitrides of silicon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/614—Fibres or filaments
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249924—Noninterengaged fiber-containing paper-free web or sheet which is not of specified porosity
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249924—Noninterengaged fiber-containing paper-free web or sheet which is not of specified porosity
    • Y10T428/249928—Fiber embedded in a ceramic, glass, or carbon matrix
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913—Rod, strand, filament or fiber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Laminated Bodies (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
DE200460003621 2003-05-22 2004-05-21 Beschichtung für siliziumhaltiges Substrat Expired - Lifetime DE602004003621T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/443,343 US7056574B2 (en) 2003-05-22 2003-05-22 Bond layer for silicon containing substrate
US443343 2003-05-22

Publications (2)

Publication Number Publication Date
DE602004003621D1 true DE602004003621D1 (de) 2007-01-25
DE602004003621T2 DE602004003621T2 (de) 2007-09-27

Family

ID=33098004

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200460003621 Expired - Lifetime DE602004003621T2 (de) 2003-05-22 2004-05-21 Beschichtung für siliziumhaltiges Substrat

Country Status (4)

Country Link
US (1) US7056574B2 (de)
EP (1) EP1479660B1 (de)
JP (1) JP4109651B2 (de)
DE (1) DE602004003621T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100853618B1 (ko) * 2006-01-04 2008-08-25 주식회사 엘지화학 안전장치를 구비하고 있는 중대형 전지팩
US7763356B2 (en) * 2006-03-13 2010-07-27 United Technologies Corporation Bond coating and thermal barrier compositions, processes for applying both, and their coated articles
US20100021716A1 (en) * 2007-06-19 2010-01-28 Strock Christopher W Thermal barrier system and bonding method
US10717678B2 (en) * 2008-09-30 2020-07-21 Rolls-Royce Corporation Coating including a rare earth silicate-based layer including a second phase
US9771811B2 (en) * 2012-01-11 2017-09-26 General Electric Company Continuous fiber reinforced mesh bond coat for environmental barrier coating system
US9428650B2 (en) 2012-12-11 2016-08-30 General Electric Company Environmental barrier coatings and methods therefor
US20140248156A1 (en) * 2012-12-21 2014-09-04 United Technologies Corporation Composite Articles and Methods
US9561986B2 (en) 2013-10-31 2017-02-07 General Electric Company Silica-forming articles having engineered surfaces to enhance resistance to creep sliding under high-temperature loading
US10329205B2 (en) 2014-11-24 2019-06-25 Rolls-Royce Corporation Bond layer for silicon-containing substrates
US20160236989A1 (en) 2015-02-17 2016-08-18 United Technologies Corporation Toughened bond layer and method of production
JP6067166B1 (ja) * 2016-05-13 2017-01-25 三菱日立パワーシステムズ株式会社 コーティング構造、これを有するタービン部品及びコーティング構造の製造方法
US11066339B2 (en) * 2017-06-08 2021-07-20 General Electric Company Article for high temperature service
US11845701B2 (en) 2020-07-21 2023-12-19 Rolls-Royce Corporation EBC layer containing boron

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4595637A (en) 1981-11-17 1986-06-17 United Technologies Corporation Plasma coatings comprised of sprayed fibers
US4992318A (en) * 1989-10-26 1991-02-12 Corning Incorporated Laminated hybrid ceramic matrix composites
US6299988B1 (en) 1998-04-27 2001-10-09 General Electric Company Ceramic with preferential oxygen reactive layer
US6296941B1 (en) 1999-04-15 2001-10-02 General Electric Company Silicon based substrate with yttrium silicate environmental/thermal barrier layer
US6254935B1 (en) 1999-04-15 2001-07-03 United Technologies Corporation Method for applying a barrier layer to a silicon based substrate
US6296942B1 (en) 1999-04-15 2001-10-02 General Electric Company Silicon based substrate with calcium aluminosilicate environmental/thermal barrier layer
US6410148B1 (en) * 1999-04-15 2002-06-25 General Electric Co. Silicon based substrate with environmental/ thermal barrier layer
US6582779B2 (en) * 1999-08-11 2003-06-24 Alliedsignal, Inc. Silicon nitride components with protective coating
US6352790B1 (en) 2000-06-29 2002-03-05 United Technologies Corporation Substrate containing silicon and a barrier layer which functions as a protective/thermal barrier coating

Also Published As

Publication number Publication date
EP1479660B1 (de) 2006-12-13
JP4109651B2 (ja) 2008-07-02
EP1479660A3 (de) 2005-08-10
JP2005096411A (ja) 2005-04-14
EP1479660A2 (de) 2004-11-24
US20040234740A1 (en) 2004-11-25
US7056574B2 (en) 2006-06-06
DE602004003621T2 (de) 2007-09-27

Similar Documents

Publication Publication Date Title
DE602004004832D1 (de) Beschichtung für siliziumhaltiges Substrat
DE60310851D1 (de) Umwelt/Wärmedämmschicht für siliziumhaltiges Substrat
DE60205204D1 (de) Barriereschicht für siliziumhaltiges Substrat
FR2869897B1 (fr) Substrat a revetement photocatalytique
DE60327015D1 (de) Substrat für transparente Elektroden
FR2838735B1 (fr) Substrat a revetement auto-nettoyant
FR2858816B1 (fr) Substrat transparent comportant un revetement antireflet
DE602006014058D1 (de) Schichtsystem für siliziumhaltige Substrats
DE10261362B8 (de) Substrat-Halter
DE60314131D1 (de) Silan-beschichtungszusammensetzung
DE602004027446D1 (de) Näherung-CVD-Beschichtungsverfahren
FR2895522B1 (fr) Substrat transparent comportant un revetement antireflet
DE602005018786D1 (de) Substrat für lithografiedruckplattenvorläufer
DE602004008145D1 (de) Bindungsschicht für Substrate die auf Silizium basiert sind
DE602004008148D1 (de) Polysiloxane zum Beschichten von Oberflächen
DE60308896D1 (de) Vernetzungsmittel für beschichtetenelastomeren artikel
DE602004011458D1 (de) Substratverarbeitungsverfahren
DE60306252D1 (de) Übertragungswerkzeug für Beschichtungsfilm
DE602004003621D1 (de) Beschichtung für siliziumhaltiges Substrat
DE60220736D1 (de) Herstellungsverfahren für gebondetes Substrat
DE602004012039D1 (de) Diffusionsbeschichtungsverfahren
DE10352144B8 (de) Vakuumbeschichtungsanlage zum Beschichten von längserstreckten Substraten
DE602004003988D1 (de) Flüssiges Renigungsmittel für Halbleiter
DE60301923D1 (de) Geschlitzes Substrat
DE502004007108D1 (de) Multifunktion-Substratsträger

Legal Events

Date Code Title Description
8364 No opposition during term of opposition