DE60143145D1 - Gasreibungspumpe - Google Patents

Gasreibungspumpe

Info

Publication number
DE60143145D1
DE60143145D1 DE60143145T DE60143145T DE60143145D1 DE 60143145 D1 DE60143145 D1 DE 60143145D1 DE 60143145 T DE60143145 T DE 60143145T DE 60143145 T DE60143145 T DE 60143145T DE 60143145 D1 DE60143145 D1 DE 60143145D1
Authority
DE
Germany
Prior art keywords
gas friction
friction pump
pump
gas
friction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60143145T
Other languages
English (en)
Inventor
Marsbed Hablanian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Varian Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Inc filed Critical Varian Inc
Application granted granted Critical
Publication of DE60143145D1 publication Critical patent/DE60143145D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
DE60143145T 2000-06-21 2001-06-19 Gasreibungspumpe Expired - Lifetime DE60143145D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/599,044 US6394747B1 (en) 2000-06-21 2000-06-21 Molecular drag vacuum pumps

Publications (1)

Publication Number Publication Date
DE60143145D1 true DE60143145D1 (de) 2010-11-11

Family

ID=24397964

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60143145T Expired - Lifetime DE60143145D1 (de) 2000-06-21 2001-06-19 Gasreibungspumpe

Country Status (4)

Country Link
US (1) US6394747B1 (de)
EP (1) EP1170508B1 (de)
JP (1) JP2002031081A (de)
DE (1) DE60143145D1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0215708D0 (en) * 2002-07-05 2002-08-14 Boc Group Plc A regenerative fluid pump and stator for the same
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
CN100482174C (zh) 2004-04-02 2009-04-29 皇家飞利浦电子股份有限公司 用于3d成像的腔内超声探测头
WO2006099052A2 (en) * 2005-03-09 2006-09-21 Arthur Williams Centrifugal bernoulli heat pump
DE102005062585B3 (de) * 2005-12-27 2007-07-05 J. Eberspächer GmbH & Co. KG Fluidfördereinrichtung, insbesondere Seitenkanalgebläse
WO2007146882A1 (en) * 2006-06-12 2007-12-21 Mag Aerospace Industries, Inc. Regenerative vacuum generator for aircraft and other vehicles
US7628577B2 (en) 2006-08-31 2009-12-08 Varian, S.P.A. Vacuum pumps with improved pumping channel configurations
DE102006043327A1 (de) * 2006-09-15 2008-03-27 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
GB0618745D0 (en) 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
EP2433011A1 (de) 2009-05-20 2012-03-28 Edwards Limited Seitenkanalvakuumpumpe mit axialdrucklagerausgleichsmittel
EP2757265B1 (de) * 2013-01-22 2016-05-18 Agilent Technologies, Inc. Spiralenförmige Pumpstufe und Vakuumpumpe mit der Pumpstufe
JP6353195B2 (ja) * 2013-05-09 2018-07-04 エドワーズ株式会社 固定円板および真空ポンプ
DE102014109004A1 (de) * 2014-06-26 2015-12-31 Pfeiffer Vacuum Gmbh Siegbahnstufe
US11519419B2 (en) * 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface
GB2616283A (en) * 2022-03-03 2023-09-06 Edwards Ltd Siegbahn drag pumps

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3104802A (en) * 1963-09-24 Unified system vacuum pump
US2954157A (en) * 1958-01-27 1960-09-27 Edwin E Eckberg Molecular vacuum pump
BE795042A (fr) * 1972-02-08 1973-08-06 Philips Nv Dispositif d'extrusion hydrodynamique
US4255081A (en) * 1979-06-07 1981-03-10 Oklejas Robert A Centrifugal pump
JPS61247893A (ja) 1985-04-26 1986-11-05 Hitachi Ltd 真空ポンプ
US5238362A (en) 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
US5358373A (en) 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
DE4314418A1 (de) 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten

Also Published As

Publication number Publication date
US6394747B1 (en) 2002-05-28
JP2002031081A (ja) 2002-01-31
EP1170508A1 (de) 2002-01-09
EP1170508B1 (de) 2010-09-29

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Representative=s name: KAHLER, KAECK & MOLLEKOPF, 86899 LANDSBERG, DE