DE60143145D1 - Gasreibungspumpe - Google Patents
GasreibungspumpeInfo
- Publication number
- DE60143145D1 DE60143145D1 DE60143145T DE60143145T DE60143145D1 DE 60143145 D1 DE60143145 D1 DE 60143145D1 DE 60143145 T DE60143145 T DE 60143145T DE 60143145 T DE60143145 T DE 60143145T DE 60143145 D1 DE60143145 D1 DE 60143145D1
- Authority
- DE
- Germany
- Prior art keywords
- gas friction
- friction pump
- pump
- gas
- friction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/599,044 US6394747B1 (en) | 2000-06-21 | 2000-06-21 | Molecular drag vacuum pumps |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60143145D1 true DE60143145D1 (de) | 2010-11-11 |
Family
ID=24397964
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60143145T Expired - Lifetime DE60143145D1 (de) | 2000-06-21 | 2001-06-19 | Gasreibungspumpe |
Country Status (4)
Country | Link |
---|---|
US (1) | US6394747B1 (de) |
EP (1) | EP1170508B1 (de) |
JP (1) | JP2002031081A (de) |
DE (1) | DE60143145D1 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0215708D0 (en) * | 2002-07-05 | 2002-08-14 | Boc Group Plc | A regenerative fluid pump and stator for the same |
GB0322883D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
CN100482174C (zh) | 2004-04-02 | 2009-04-29 | 皇家飞利浦电子股份有限公司 | 用于3d成像的腔内超声探测头 |
WO2006099052A2 (en) * | 2005-03-09 | 2006-09-21 | Arthur Williams | Centrifugal bernoulli heat pump |
DE102005062585B3 (de) * | 2005-12-27 | 2007-07-05 | J. Eberspächer GmbH & Co. KG | Fluidfördereinrichtung, insbesondere Seitenkanalgebläse |
EP2027015A1 (de) * | 2006-06-12 | 2009-02-25 | Mag Aerospace Industries, Inc. | Regenerativer vakuum-generator für flugzeuge und andere fahrzeuge |
US7628577B2 (en) | 2006-08-31 | 2009-12-08 | Varian, S.P.A. | Vacuum pumps with improved pumping channel configurations |
DE102006043327A1 (de) * | 2006-09-15 | 2008-03-27 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
GB0618745D0 (en) * | 2006-09-22 | 2006-11-01 | Boc Group Plc | Molecular drag pumping mechanism |
US8152442B2 (en) * | 2008-12-24 | 2012-04-10 | Agilent Technologies, Inc. | Centripetal pumping stage and vacuum pump incorporating such pumping stage |
US8070419B2 (en) * | 2008-12-24 | 2011-12-06 | Agilent Technologies, Inc. | Spiral pumping stage and vacuum pump incorporating such pumping stage |
US9334873B2 (en) | 2009-05-20 | 2016-05-10 | Edwards Limited | Side-channel compressor with symmetric rotor disc which pumps in parallel |
EP2757265B1 (de) * | 2013-01-22 | 2016-05-18 | Agilent Technologies, Inc. | Spiralenförmige Pumpstufe und Vakuumpumpe mit der Pumpstufe |
JP6353195B2 (ja) * | 2013-05-09 | 2018-07-04 | エドワーズ株式会社 | 固定円板および真空ポンプ |
DE102014109004A1 (de) * | 2014-06-26 | 2015-12-31 | Pfeiffer Vacuum Gmbh | Siegbahnstufe |
US11519419B2 (en) * | 2020-04-15 | 2022-12-06 | Kin-Chung Ray Chiu | Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface |
GB2616283A (en) * | 2022-03-03 | 2023-09-06 | Edwards Ltd | Siegbahn drag pumps |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3104802A (en) * | 1963-09-24 | Unified system vacuum pump | ||
US2954157A (en) * | 1958-01-27 | 1960-09-27 | Edwin E Eckberg | Molecular vacuum pump |
BE795042A (fr) * | 1972-02-08 | 1973-08-06 | Philips Nv | Dispositif d'extrusion hydrodynamique |
US4255081A (en) * | 1979-06-07 | 1981-03-10 | Oklejas Robert A | Centrifugal pump |
JPS61247893A (ja) | 1985-04-26 | 1986-11-05 | Hitachi Ltd | 真空ポンプ |
US5238362A (en) | 1990-03-09 | 1993-08-24 | Varian Associates, Inc. | Turbomolecular pump |
US5358373A (en) | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
DE4314418A1 (de) | 1993-05-03 | 1994-11-10 | Leybold Ag | Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten |
-
2000
- 2000-06-21 US US09/599,044 patent/US6394747B1/en not_active Expired - Fee Related
-
2001
- 2001-06-13 JP JP2001178985A patent/JP2002031081A/ja active Pending
- 2001-06-19 DE DE60143145T patent/DE60143145D1/de not_active Expired - Lifetime
- 2001-06-19 EP EP01113657A patent/EP1170508B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US6394747B1 (en) | 2002-05-28 |
EP1170508B1 (de) | 2010-09-29 |
JP2002031081A (ja) | 2002-01-31 |
EP1170508A1 (de) | 2002-01-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R081 | Change of applicant/patentee |
Ref document number: 1170508 Country of ref document: EP Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US Free format text: FORMER OWNER: VARIAN, INC., PALO ALTO, US Effective date: 20110629 |
|
R082 | Change of representative |
Ref document number: 1170508 Country of ref document: EP Representative=s name: KAHLER, KAECK & MOLLEKOPF, 86899 LANDSBERG, DE |