DE60136943D1 - Gerät zur drucküberwachung mit saw-anordnung - Google Patents

Gerät zur drucküberwachung mit saw-anordnung

Info

Publication number
DE60136943D1
DE60136943D1 DE60136943T DE60136943T DE60136943D1 DE 60136943 D1 DE60136943 D1 DE 60136943D1 DE 60136943 T DE60136943 T DE 60136943T DE 60136943 T DE60136943 T DE 60136943T DE 60136943 D1 DE60136943 D1 DE 60136943D1
Authority
DE
Germany
Prior art keywords
lid
saw devices
substrate
base
central region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60136943T
Other languages
English (en)
Inventor
Graham Michael Freakes
David Daniel Vile
Victor Alexandrovic Kalinin
John Peter Beckley
Arthur John Leigh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Transense Technologies PLC
Original Assignee
Transense Technologies PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Transense Technologies PLC filed Critical Transense Technologies PLC
Application granted granted Critical
Publication of DE60136943D1 publication Critical patent/DE60136943D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Sawing (AREA)
DE60136943T 2000-10-10 2001-10-10 Gerät zur drucküberwachung mit saw-anordnung Expired - Lifetime DE60136943D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0024813.8A GB0024813D0 (en) 2000-10-10 2000-10-10 Pressure monitoring device incorporating saw device
PCT/GB2001/004519 WO2002031461A1 (en) 2000-10-10 2001-10-10 Pressure monitor incorporating saw device

Publications (1)

Publication Number Publication Date
DE60136943D1 true DE60136943D1 (de) 2009-01-22

Family

ID=9901011

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60136943T Expired - Lifetime DE60136943D1 (de) 2000-10-10 2001-10-10 Gerät zur drucküberwachung mit saw-anordnung

Country Status (9)

Country Link
US (1) US6865950B2 (de)
EP (1) EP1325296B1 (de)
JP (1) JP4088921B2 (de)
CN (1) CN1221793C (de)
AT (1) ATE417253T1 (de)
AU (1) AU2001293996A1 (de)
DE (1) DE60136943D1 (de)
GB (2) GB0024813D0 (de)
WO (1) WO2002031461A1 (de)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7786864B1 (en) * 2000-09-08 2010-08-31 Automotive Technologies International, Inc. Vehicular RFID and sensor assemblies
GB0206705D0 (en) * 2002-03-21 2002-05-01 Transense Technologies Plc Pressure monitor incorporating saw device
WO2003081195A1 (en) 2002-03-21 2003-10-02 Transense Technologies Plc Pressure monitor incorporating saw device
US7100432B2 (en) 2002-06-06 2006-09-05 Mineral Lassen Llc Capacitive pressure sensor
FI116097B (fi) 2002-08-21 2005-09-15 Heikki Ruotoistenmaeki Voima- tai paineanturi ja menetelmä sen soveltamiseksi
US6907787B2 (en) 2003-04-30 2005-06-21 Honeywell International Inc. Surface acoustic wave pressure sensor with microstructure sensing elements
US7082835B2 (en) * 2003-06-18 2006-08-01 Honeywell International Inc. Pressure sensor apparatus and method
US7047813B2 (en) 2003-08-05 2006-05-23 Honeywell International Inc. Sensor slip fit apparatus and method
US6962084B2 (en) * 2003-08-06 2005-11-08 Honeywell International Inc. Sensor with molded sensor diaphragm cover
US6931934B2 (en) 2003-09-10 2005-08-23 Honeywell International Inc. Sensor top hat cover apparatus and method
US7005987B2 (en) * 2003-10-30 2006-02-28 Michelin Recherche Et Technique S.A. Acoustic wave device with digital data transmission functionality
US20050109095A1 (en) * 2003-11-20 2005-05-26 Sinnett Jay C. Saw transducer interface to pressure sensing diaphragm
GB0329019D0 (en) 2003-12-15 2004-01-14 Imp College Innovations Ltd Acoustic wave devices
US7165298B2 (en) * 2004-09-14 2007-01-23 Honeywell International Inc. Method of making a surface acoustic wave device
US7243547B2 (en) 2004-10-13 2007-07-17 Honeywell International Inc. MEMS SAW sensor
US7017416B1 (en) * 2004-10-22 2006-03-28 Honeywell International, Inc. Disposable pressure diaphragm and wireless sensor systems and methods
DE102005001097A1 (de) * 2005-01-08 2006-07-27 Abb Patent Gmbh Drucksensor (I)
US7866964B2 (en) * 2005-05-20 2011-01-11 Emerson Climate Technologies, Inc. Sensor for hermetic machine
US20080278288A1 (en) 2005-06-29 2008-11-13 O'brien George P Rfid to Store Saw Calibration Coefficients
US7651879B2 (en) 2005-12-07 2010-01-26 Honeywell International Inc. Surface acoustic wave pressure sensors
US7405675B2 (en) 2006-01-19 2008-07-29 Michelin Recherche Et Technique S. A. System and method for reducing search time and increasing search accuracy during interrogation of resonant devices
DE102006006073B4 (de) * 2006-02-09 2015-02-12 Unify Gmbh & Co. Kg Verfahren, Kommunikationssystem und Kommunikationsendeinrichtung zur Übermittlung von Daten
US8193926B2 (en) 2006-03-14 2012-06-05 Michelin Recherche Et Technique Piezoelectric triggering mechanism
US7886575B2 (en) * 2006-11-01 2011-02-15 Delaware Capital Formation, Inc. High sensitivity acoustic wave microsensors based on stress effects
US8262372B2 (en) * 2007-05-10 2012-09-11 Emerson Climate Technologies, Inc. Compressor hermetic terminal
GB2451861A (en) * 2007-08-14 2009-02-18 Transense Technologies Plc Surface acoustic wave based sensor in vented housing
US8939734B2 (en) 2007-08-28 2015-01-27 Emerson Climate Technologies, Inc. Molded plug for a compressor
US7569971B2 (en) 2007-10-02 2009-08-04 Delaware Capital Formation, Inc. Compensation of resonators for substrate and transducer asymmetry
US7730772B2 (en) 2007-12-28 2010-06-08 Honeywell International Inc. Surface acoustic wave sensor and package
US7726184B2 (en) 2007-12-28 2010-06-01 Honeywell International Inc. Surface acoustic wave sensor and package
US8384524B2 (en) 2008-11-26 2013-02-26 Honeywell International Inc. Passive surface acoustic wave sensing system
US8317392B2 (en) 2008-12-23 2012-11-27 Honeywell International Inc. Surface acoustic wave based micro-sensor apparatus and method for simultaneously monitoring multiple conditions
US8939735B2 (en) * 2009-03-27 2015-01-27 Emerson Climate Technologies, Inc. Compressor plug assembly
US8952863B2 (en) * 2010-12-17 2015-02-10 Nokia Corporation Strain-tunable antenna and associated methods
NO343151B1 (no) * 2011-02-16 2018-11-19 Techni As System for måling av trykk og temperatur
US9480177B2 (en) 2012-07-27 2016-10-25 Emerson Climate Technologies, Inc. Compressor protection module
US9835515B2 (en) 2014-10-10 2017-12-05 Stmicroeletronics S.R.L. Pressure sensor with testing device and related methods
CN104764557B (zh) * 2015-03-17 2017-04-19 中北大学 一种全金属微波谐振腔式无线无源超高温压力传感器及其制备方法
US10074404B2 (en) * 2016-11-28 2018-09-11 Western Digital Technologies, Inc. Pressure detection of hermetically sealed device
CN111623917B (zh) * 2020-06-10 2022-03-04 北京遥测技术研究所 一种高灵敏度的声表面波绝压压力传感器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3878477A (en) * 1974-01-08 1975-04-15 Hewlett Packard Co Acoustic surface wave oscillator force-sensing devices
US4216401A (en) * 1978-12-22 1980-08-05 United Technologies Corporation Surface acoustic wave (SAW) pressure sensor structure
US4586382A (en) * 1982-09-29 1986-05-06 Schlumberger Technology Corporation Surface acoustic wave sensors
EP0192903B1 (de) * 1984-12-31 1991-08-14 Schlumberger Limited Druckaufnehmer mit akustischen Oberflächenwellen mit niedriger thermischer Reaktionszeit
GB2235533B (en) * 1989-08-11 1994-02-09 Stc Plc Piezoelectric sensor device
GB2352814B (en) * 1999-07-28 2003-04-09 Transense Technologies Plc Pressure monitor system
GB2361318A (en) * 2000-04-12 2001-10-17 Marconi Caswell Ltd A surface acoustic wave strain sensor
US6535460B2 (en) * 2000-08-11 2003-03-18 Knowles Electronics, Llc Miniature broadband acoustic transducer

Also Published As

Publication number Publication date
JP2004511766A (ja) 2004-04-15
CN1479862A (zh) 2004-03-03
GB2372328A (en) 2002-08-21
CN1221793C (zh) 2005-10-05
US20040020299A1 (en) 2004-02-05
AU2001293996A1 (en) 2002-04-22
WO2002031461A1 (en) 2002-04-18
GB2372328B (en) 2004-03-17
US6865950B2 (en) 2005-03-15
GB0124343D0 (en) 2001-11-28
EP1325296A1 (de) 2003-07-09
GB0024813D0 (en) 2000-11-22
EP1325296B1 (de) 2008-12-10
ATE417253T1 (de) 2008-12-15
JP4088921B2 (ja) 2008-05-21

Similar Documents

Publication Publication Date Title
DE60136943D1 (de) Gerät zur drucküberwachung mit saw-anordnung
DE60207230D1 (de) Elektronisches kühlgerät
WO2003095963A3 (en) Barometric pressure sensor
EP1085784A3 (de) Halbleitervorrichtung,Halbleiterelektret-Kondensator Mikrofon und Verfahren zur Herstellung von einem Halbleiterelektret-Kondensator Mikrofon
DE60312493D1 (de) Druckmonitor mit oberflächenwellenvorrichtung
ATE232972T1 (de) Bolometer mit mikrobrückenstruktur
ES276163U (es) Un dispositivo de bastidor de conductores para un microfono de electreto
DK1368488T3 (da) Sensorindretning, indretning og fremgangsmåde til aomperometrisk og/eller potentiometrisk, farmakologisk testning af aktive steder og/eller aktive stoffer
TW200501856A (en) Method of mounting an electronic part
EP1503615A3 (de) Leiterplatine mit gekühltem Baustein, insbesondere SMD-Baustein
TW200702791A (en) Display device
DE60312973D1 (de) Beurteilung des zustands von früchten und gemüse
TW200627489A (en) Solid-electrolyte capacitor, manufacturing method thereof, and digital signal processing substrate using the solid-electrolyte capacitor
DE60107427D1 (de) Druckempfindlicher schalter
DE602005021148D1 (de) Bügeleisen
EP1965614A4 (de) Leiterplatten-verbindungsstruktur, leiterplatten-verbindungsteil und elektronische vorrichtung
ATE264500T1 (de) Membrane für druckmessgeräte
ATE460052T1 (de) Elektroakustischer wandler mit wandlerschaltung
SE0402111D0 (sv) A pressure compensating device for a bearing housing
JP2002271465A (ja) 携帯用電子機器のスピーカ取付け構造
KR200492599Y1 (ko) 향상된 방수구조를 갖는 이어폰
JPS54144187A (en) Semiconductor pressure converter
JPS53101752A (en) High frequency defreezer
YU12704A (sh) Presa za voće
JPS5742133A (en) Semiconductor device

Legal Events

Date Code Title Description
8364 No opposition during term of opposition