DE60135007D1 - Mikrohergestellter akustischer wandler mit unterdrückten substratmoden - Google Patents

Mikrohergestellter akustischer wandler mit unterdrückten substratmoden

Info

Publication number
DE60135007D1
DE60135007D1 DE60135007T DE60135007T DE60135007D1 DE 60135007 D1 DE60135007 D1 DE 60135007D1 DE 60135007 T DE60135007 T DE 60135007T DE 60135007 T DE60135007 T DE 60135007T DE 60135007 D1 DE60135007 D1 DE 60135007D1
Authority
DE
Germany
Prior art keywords
micro
acoustic transformer
substrate modes
originated
suppressed substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60135007T
Other languages
English (en)
Inventor
Igal Ladabaum
A Paul Wagner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Medical Solutions USA Inc
Original Assignee
Siemens Medical Solutions USA Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Medical Solutions USA Inc filed Critical Siemens Medical Solutions USA Inc
Application granted granted Critical
Publication of DE60135007D1 publication Critical patent/DE60135007D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
    • B06B1/0681—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface and a damping structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/70—Specific application
    • B06B2201/76—Medical, dental
DE60135007T 2000-10-19 2001-10-18 Mikrohergestellter akustischer wandler mit unterdrückten substratmoden Expired - Lifetime DE60135007D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US24229800P 2000-10-19 2000-10-19
PCT/US2001/046197 WO2002039782A2 (en) 2000-10-19 2001-10-18 Microfabricated acoustic transducer with suppressed substrate modes

Publications (1)

Publication Number Publication Date
DE60135007D1 true DE60135007D1 (de) 2008-09-04

Family

ID=22914223

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60135007T Expired - Lifetime DE60135007D1 (de) 2000-10-19 2001-10-18 Mikrohergestellter akustischer wandler mit unterdrückten substratmoden

Country Status (5)

Country Link
US (2) US6862254B2 (de)
EP (1) EP1330937B1 (de)
AU (1) AU2002236557A1 (de)
DE (1) DE60135007D1 (de)
WO (1) WO2002039782A2 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6862254B2 (en) * 2000-10-19 2005-03-01 Sensant Corporation Microfabricated ultrasonic transducer with suppressed substrate modes
US6659954B2 (en) * 2001-12-19 2003-12-09 Koninklijke Philips Electronics Nv Micromachined ultrasound transducer and method for fabricating same
US6831394B2 (en) 2002-12-11 2004-12-14 General Electric Company Backing material for micromachined ultrasonic transducer devices
US7280435B2 (en) * 2003-03-06 2007-10-09 General Electric Company Switching circuitry for reconfigurable arrays of sensor elements
US7443765B2 (en) 2003-03-06 2008-10-28 General Electric Company Reconfigurable linear sensor arrays for reduced channel count
US7313053B2 (en) 2003-03-06 2007-12-25 General Electric Company Method and apparatus for controlling scanning of mosaic sensor array
US7257051B2 (en) * 2003-03-06 2007-08-14 General Electric Company Integrated interface electronics for reconfigurable sensor array
WO2005046443A2 (en) * 2003-11-07 2005-05-26 Georgia Tech Research Corporation Combination catheter devices, methods, and systems
US7030536B2 (en) * 2003-12-29 2006-04-18 General Electric Company Micromachined ultrasonic transducer cells having compliant support structure
JP2005207811A (ja) * 2004-01-21 2005-08-04 Denso Corp 形状変化検出装置
WO2005077012A2 (en) * 2004-02-06 2005-08-25 Georgia Tech Research Corporation Cmut devices and fabrication methods
JP2007527285A (ja) * 2004-02-27 2007-09-27 ジョージア テック リサーチ コーポレイション 多要素電極ｃｍｕｔ素子及び製作方法
US7612483B2 (en) * 2004-02-27 2009-11-03 Georgia Tech Research Corporation Harmonic cMUT devices and fabrication methods
US7646133B2 (en) * 2004-02-27 2010-01-12 Georgia Tech Research Corporation Asymmetric membrane cMUT devices and fabrication methods
US7321181B2 (en) 2004-04-07 2008-01-22 The Board Of Trustees Of The Leland Stanford Junior University Capacitive membrane ultrasonic transducers with reduced bulk wave generation and method
ITBO20040449A1 (it) * 2004-07-19 2004-10-19 Dario Albarello Misuratore di rumore sismico portatile ad alte prestazioni per applicazioni ingegneristiche e geologiche
US7589456B2 (en) * 2005-06-14 2009-09-15 Siemens Medical Solutions Usa, Inc. Digital capacitive membrane transducer
US8335723B2 (en) * 2005-08-09 2012-12-18 Walker Digital, Llc Apparatus, systems and methods for facilitating commerce
JP4755500B2 (ja) * 2006-01-26 2011-08-24 株式会社日立製作所 超音波探触子
JP5260650B2 (ja) * 2007-07-31 2013-08-14 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 高ｋ誘電体を有するｃｍｕｔ
WO2009069555A1 (ja) 2007-11-29 2009-06-04 Hitachi Medical Corporation 超音波探触子及びこれを用いた超音波診断装置
US8133182B2 (en) 2008-09-09 2012-03-13 Siemens Medical Solutions Usa, Inc. Multi-dimensional transducer array and beamforming for ultrasound imaging
DE102009014489B4 (de) * 2009-03-23 2011-03-10 Siemens Aktiengesellschaft Katheter und medizinische Vorrichtung
JP5643191B2 (ja) * 2009-04-21 2014-12-17 株式会社日立メディコ 超音波探触子及び超音波撮像装置
DE102010007177B4 (de) * 2010-02-08 2017-06-22 Siemens Healthcare Gmbh Anzeigeverfahren für ein vor einer Aufweitungseinrichtung liegendes Bild des Inneren eines Gefäßes und hiermit korrespondierende Anzeigeeinrichtung
JPWO2011105269A1 (ja) 2010-02-26 2013-06-20 株式会社日立メディコ 超音波探触子とそれを用いた超音波撮像装置
JP5570311B2 (ja) * 2010-06-07 2014-08-13 キヤノン株式会社 電気機械変換装置、検体診断装置
US9402598B2 (en) 2010-08-20 2016-08-02 Hitachi Medical Corporation Ultrasound probe and ultrasound diagnostic device using same
US20130331705A1 (en) 2011-03-22 2013-12-12 Koninklijke Philips Electronics N.V. Ultrasonic cmut with suppressed acoustic coupling to the substrate
JP2012205726A (ja) * 2011-03-29 2012-10-25 Toshiba Corp 超音波プローブ及び超音波プローブの製造方法
EP3110628B1 (de) 2014-02-28 2019-07-03 The Regents of the University of California Membran mit variabler dicke für einen breitbandigen robusten piezoelektrischen mikrogefertigten ultraschallwandler (pmut)
US20180180724A1 (en) * 2016-12-26 2018-06-28 Nxp Usa, Inc. Ultrasonic transducer integrated with supporting electronics
US11395081B2 (en) * 2020-05-27 2022-07-19 xMEMS Labs, Inc. Acoustic testing method and acoustic testing system thereof

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4528652A (en) * 1981-12-30 1985-07-09 General Electric Company Ultrasonic transducer and attenuating material for use therein
US4507582A (en) * 1982-09-29 1985-03-26 New York Institute Of Technology Matching region for damped piezoelectric ultrasonic apparatus
US4494091A (en) 1983-05-09 1985-01-15 The United States Of America As Represented By The Secretary Of The Army Damping package for surface acoustic wave devices
US5160870A (en) * 1990-06-25 1992-11-03 Carson Paul L Ultrasonic image sensing array and method
US5287331A (en) 1992-10-26 1994-02-15 Queen's University Air coupled ultrasonic transducer
US5894452A (en) * 1994-10-21 1999-04-13 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated ultrasonic immersion transducer
US5619476A (en) * 1994-10-21 1997-04-08 The Board Of Trustees Of The Leland Stanford Jr. Univ. Electrostatic ultrasonic transducer
US5730113A (en) 1995-12-11 1998-03-24 General Electric Company Dicing saw alignment for array ultrasonic transducer fabrication
US5877580A (en) * 1996-12-23 1999-03-02 Regents Of The University Of California Micromachined chemical jet dispenser
US5982709A (en) * 1998-03-31 1999-11-09 The Board Of Trustees Of The Leland Stanford Junior University Acoustic transducers and method of microfabrication
US6150703A (en) 1998-06-29 2000-11-21 Trw Inc. Lateral mode suppression in semiconductor bulk acoustic resonator (SBAR) devices using tapered electrodes, and electrodes edge damping materials
US6295247B1 (en) * 1998-10-02 2001-09-25 The Board Of Trustees Of The Leland Stanford Junior University Micromachined rayleigh, lamb, and bulk wave capacitive ultrasonic transducers
US6862254B2 (en) * 2000-10-19 2005-03-01 Sensant Corporation Microfabricated ultrasonic transducer with suppressed substrate modes

Also Published As

Publication number Publication date
US6862254B2 (en) 2005-03-01
US20030103412A1 (en) 2003-06-05
US6714484B2 (en) 2004-03-30
AU2002236557A1 (en) 2002-05-21
EP1330937B1 (de) 2008-07-23
US20020048219A1 (en) 2002-04-25
WO2002039782A3 (en) 2003-02-27
EP1330937A2 (de) 2003-07-30
WO2002039782A2 (en) 2002-05-16

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Legal Events

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