DE60134055D1 - Verfahren und vorrichtung zur steuerung eines werkzeugs mit einem baseline-steuerskript - Google Patents

Verfahren und vorrichtung zur steuerung eines werkzeugs mit einem baseline-steuerskript

Info

Publication number
DE60134055D1
DE60134055D1 DE60134055T DE60134055T DE60134055D1 DE 60134055 D1 DE60134055 D1 DE 60134055D1 DE 60134055 T DE60134055 T DE 60134055T DE 60134055 T DE60134055 T DE 60134055T DE 60134055 D1 DE60134055 D1 DE 60134055D1
Authority
DE
Germany
Prior art keywords
tool
controlling
control strip
baseline control
baseline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60134055T
Other languages
English (en)
Inventor
Christopher A Bode
Alexander J Pasadyn
Anthony J Toprac
Joyce S Hewett
Anastasia Oshelski Peterson
Thomas J Sonderman
Michael L Miller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GlobalFoundries Inc
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Application granted granted Critical
Publication of DE60134055D1 publication Critical patent/DE60134055D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G05B19/0426—Programming the control sequence
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32129—Select program for specified machine from library, file server
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/36—Nc in input of data, input key till input tape
    • G05B2219/36225—Select and insert program from library, select case, variant
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
DE60134055T 2001-02-21 2001-10-22 Verfahren und vorrichtung zur steuerung eines werkzeugs mit einem baseline-steuerskript Expired - Lifetime DE60134055D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/789,871 US6615098B1 (en) 2001-02-21 2001-02-21 Method and apparatus for controlling a tool using a baseline control script
PCT/US2001/050178 WO2002069063A2 (en) 2001-02-21 2001-10-22 Method and apparatus for controlling a tool using a baseline control script

Publications (1)

Publication Number Publication Date
DE60134055D1 true DE60134055D1 (de) 2008-06-26

Family

ID=25148921

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60134055T Expired - Lifetime DE60134055D1 (de) 2001-02-21 2001-10-22 Verfahren und vorrichtung zur steuerung eines werkzeugs mit einem baseline-steuerskript

Country Status (8)

Country Link
US (1) US6615098B1 (de)
EP (1) EP1373997B1 (de)
JP (1) JP4261190B2 (de)
KR (1) KR100860132B1 (de)
CN (1) CN100367140C (de)
DE (1) DE60134055D1 (de)
TW (1) TW574640B (de)
WO (1) WO2002069063A2 (de)

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US7245980B1 (en) * 2000-07-03 2007-07-17 Wright Williams & Kelly, Inc. Method and apparatus for calculation of production quantities
US7016753B2 (en) * 2001-10-30 2006-03-21 Semiconductor Energy Laboratory Co., Ltd. Management system for production line and management method for production line
US7640529B2 (en) * 2002-07-30 2009-12-29 Photronics, Inc. User-friendly rule-based system and method for automatically generating photomask orders
US7375035B2 (en) * 2003-04-29 2008-05-20 Ronal Systems Corporation Host and ancillary tool interface methodology for distributed processing
US8032348B2 (en) 2003-09-30 2011-10-04 Tokyo Electron Limited System and method for using first-principles simulation to facilitate a semiconductor manufacturing process
US8036869B2 (en) 2003-09-30 2011-10-11 Tokyo Electron Limited System and method for using first-principles simulation to control a semiconductor manufacturing process via a simulation result or a derived empirical model
US8050900B2 (en) 2003-09-30 2011-11-01 Tokyo Electron Limited System and method for using first-principles simulation to provide virtual sensors that facilitate a semiconductor manufacturing process
US8296687B2 (en) 2003-09-30 2012-10-23 Tokyo Electron Limited System and method for using first-principles simulation to analyze a process performed by a semiconductor processing tool
US8073667B2 (en) * 2003-09-30 2011-12-06 Tokyo Electron Limited System and method for using first-principles simulation to control a semiconductor manufacturing process
US6980873B2 (en) 2004-04-23 2005-12-27 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for real-time fault detection, classification, and correction in a semiconductor manufacturing environment
US7437404B2 (en) * 2004-05-20 2008-10-14 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for improving equipment communication in semiconductor manufacturing equipment
US7206652B2 (en) * 2004-08-20 2007-04-17 International Business Machines Corporation Method and system for intelligent automated reticle management
JP2007334808A (ja) * 2006-06-19 2007-12-27 Yokogawa Electric Corp 管理システム
US7793292B2 (en) * 2006-09-13 2010-09-07 Fisher-Rosemount Systems, Inc. Compact batch viewing techniques for use in batch processes
KR100835276B1 (ko) * 2006-10-23 2008-06-05 삼성전자주식회사 반도체 장비 제어 시스템 및 제어 방법
JP5461778B2 (ja) * 2007-04-02 2014-04-02 株式会社日立国際電気 基板処理システム、群管理システム、構成管理プログラム、接続管理プログラム、端末プログラム及び各ハードウェアの接続管理方法
US7813828B2 (en) * 2007-04-02 2010-10-12 Hitachi Kokusai Electric Inc. Substrate processing system and group management system
TWI406118B (zh) * 2010-03-01 2013-08-21 Powertech Technology Inc 動態設定控制規則之機台授權系統
JP2013176828A (ja) * 2012-02-29 2013-09-09 Ebara Corp 研磨終点検出装置の遠隔監視システム
US11860591B2 (en) * 2021-09-13 2024-01-02 Applied Materials, Inc. Process recipe creation and matching using feature models

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Publication number Priority date Publication date Assignee Title
DE3581000D1 (de) 1984-05-19 1991-02-07 British Aerospace Industrielle verarbeitungs- und herstellungsverfahren.
US5432702A (en) * 1994-06-17 1995-07-11 Advanced Micro Devices Inc. Bar code recipe selection system using workstation controllers
DE19508476A1 (de) * 1995-03-09 1996-09-12 Siemens Ag Leitsystem für eine Anlage der Grundstoff- oder der verarbeitenden Industrie o. ä.
US5698766A (en) * 1995-04-05 1997-12-16 The Regents Of The University Of California Transgenic animal model for testing drugs for treating eating disorders and epilepsy
US5751581A (en) * 1995-11-13 1998-05-12 Advanced Micro Devices Material movement server
GB2329041B (en) 1996-06-13 1999-09-08 Mitsubishi Electric Corp Automatic programming device for multi-system machine tool
US6292708B1 (en) * 1998-06-11 2001-09-18 Speedfam-Ipec Corporation Distributed control system for a semiconductor wafer processing machine
WO2000036479A1 (en) 1998-12-16 2000-06-22 Speedfam-Ipec Corporation An equipment virtual controller
US6484064B1 (en) * 1999-10-05 2002-11-19 Advanced Micro Devices, Inc. Method and apparatus for running metrology standard wafer routes for cross-fab metrology calibration
US6465263B1 (en) * 2000-01-04 2002-10-15 Advanced Micro Devices, Inc. Method and apparatus for implementing corrected species by monitoring specific state parameters
US20020087229A1 (en) * 2001-01-02 2002-07-04 Pasadyn Alexander J. Use of endpoint system to match individual processing stations wirhin a tool

Also Published As

Publication number Publication date
JP4261190B2 (ja) 2009-04-30
US6615098B1 (en) 2003-09-02
EP1373997A2 (de) 2004-01-02
WO2002069063A3 (en) 2003-07-10
TW574640B (en) 2004-02-01
EP1373997B1 (de) 2008-05-14
JP2004531878A (ja) 2004-10-14
KR100860132B1 (ko) 2008-09-25
WO2002069063A2 (en) 2002-09-06
CN100367140C (zh) 2008-02-06
KR20030077618A (ko) 2003-10-01
CN1529835A (zh) 2004-09-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: GLOBALFOUNDRIES INC., GRAND CAYMAN, KY

8328 Change in the person/name/address of the agent

Representative=s name: GRUENECKER, KINKELDEY, STOCKMAIR & SCHWANHAEUSSER,