DE60117639D1 - Verfahren und Apparat zum Entfernen von Teilchen aus hochreinen Gas-Systemen - Google Patents

Verfahren und Apparat zum Entfernen von Teilchen aus hochreinen Gas-Systemen

Info

Publication number
DE60117639D1
DE60117639D1 DE60117639T DE60117639T DE60117639D1 DE 60117639 D1 DE60117639 D1 DE 60117639D1 DE 60117639 T DE60117639 T DE 60117639T DE 60117639 T DE60117639 T DE 60117639T DE 60117639 D1 DE60117639 D1 DE 60117639D1
Authority
DE
Germany
Prior art keywords
gas
emitter
collector surface
particles
high purity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60117639T
Other languages
English (en)
Other versions
DE60117639T2 (de
Inventor
Wayne Thomas Mcdermott
Richard Carl Ockovic
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Products and Chemicals Inc
Original Assignee
Air Products and Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Products and Chemicals Inc filed Critical Air Products and Chemicals Inc
Application granted granted Critical
Publication of DE60117639D1 publication Critical patent/DE60117639D1/de
Publication of DE60117639T2 publication Critical patent/DE60117639T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/02—Plant or installations having external electricity supply
    • B03C3/04—Plant or installations having external electricity supply dry type
    • B03C3/06—Plant or installations having external electricity supply dry type characterised by presence of stationary tube electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/38—Particle charging or ionising stations, e.g. using electric discharge, radioactive radiation or flames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/40—Electrode constructions
    • B03C3/41—Ionising-electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C2201/00—Details of magnetic or electrostatic separation
    • B03C2201/10—Ionising electrode has multiple serrated ends or parts

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electrostatic Separation (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
DE60117639T 2000-06-23 2001-06-18 Verfahren und Apparat zum Entfernen von Teilchen aus hochreinen Gas-Systemen Expired - Fee Related DE60117639T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US602933 2000-06-23
US09/602,933 US6436170B1 (en) 2000-06-23 2000-06-23 Process and apparatus for removing particles from high purity gas systems

Publications (2)

Publication Number Publication Date
DE60117639D1 true DE60117639D1 (de) 2006-05-04
DE60117639T2 DE60117639T2 (de) 2007-02-01

Family

ID=24413349

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60117639T Expired - Fee Related DE60117639T2 (de) 2000-06-23 2001-06-18 Verfahren und Apparat zum Entfernen von Teilchen aus hochreinen Gas-Systemen

Country Status (8)

Country Link
US (2) US6436170B1 (de)
EP (1) EP1166881B1 (de)
JP (1) JP3704061B2 (de)
KR (1) KR100431973B1 (de)
AT (1) ATE319519T1 (de)
DE (1) DE60117639T2 (de)
SG (1) SG142145A1 (de)
TW (1) TW510821B (de)

Families Citing this family (21)

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FR2798303B1 (fr) * 1999-09-14 2001-11-09 Daniel Teboul Dispositif de traitement d'un milieu gazeux, en particulier des gaz d'echappement d'un moteur a combustion interne, et vehicule equipe d'un tel dispositif
US6436170B1 (en) * 2000-06-23 2002-08-20 Air Products And Chemical, Inc. Process and apparatus for removing particles from high purity gas systems
RU2182523C1 (ru) * 2001-02-08 2002-05-20 Общество с ограниченной ответственностью "ВИНТЕЛ" Устройство для накопления аэрозолей из газов
KR100584737B1 (ko) * 2001-11-20 2006-05-30 주식회사 포스코 전자기 집진장치
KR100480130B1 (ko) * 2002-12-11 2005-04-06 엘지전자 주식회사 전기가스압축기
US7483255B2 (en) * 2003-06-11 2009-01-27 Ion Systems Ionizing electrode structure and apparatus
US20050031503A1 (en) * 2003-08-05 2005-02-10 Fox Michael T. Air ionization control
US6802404B1 (en) * 2003-09-25 2004-10-12 Tenneco Automotive Operating Company Inc. Electro-rheological or magneto-rheological controlled hydraulic restriction
JP2006216710A (ja) * 2005-02-02 2006-08-17 Hitachi High-Technologies Corp 半導体製造装置
JP3840579B2 (ja) * 2005-02-25 2006-11-01 ダイキン工業株式会社 空気調和装置
CN100551542C (zh) * 2006-06-04 2009-10-21 张寅啸 等离子层变频滤尘器
ATE519542T1 (de) * 2008-03-28 2011-08-15 Isi Ind Produkte Gmbh Ionisierungselement und elektrostatischer filter
DE102008059113A1 (de) * 2008-11-26 2010-05-27 Eads Deutschland Gmbh Vorrichtung zur Sammlung von stark elektronenaffinen Partikeln
US8092577B2 (en) 2008-12-19 2012-01-10 Steris Corporation Method and apparatus for removing gaseous or vaporous sterilants from a medium
FI122485B (fi) * 2009-10-01 2012-02-15 Jorma Keskinen Menetelmä ja laitteisto kaasun puhdistamiseksi
US8495730B2 (en) 2009-10-12 2013-07-23 International Business Machines Corporation Dynamically constructed capability for enforcing object access order
CH702246A1 (de) * 2009-11-18 2011-05-31 Beat Mueller Elektrostatische Feinstaubfilteranlage, Halterung für eine Elektrode und Elektrode dafür.
CA2801598C (en) * 2010-06-11 2014-04-15 Steris Corporation Method and apparatus for removing gaseous or vaporous sterilants from a medium
CN106733189B (zh) * 2016-11-11 2018-03-20 成都陵川特种工业有限责任公司 一种基于消声弯头的除尘改进结构
CN109578809B (zh) * 2018-12-29 2024-02-06 武汉格罗夫氢能汽车有限公司 一种应用于供氢系统的泄漏监测装置
CN110575908A (zh) * 2019-10-24 2019-12-17 宁波市镇海怡福莱文化创意有限公司 一种空气净化器的集电极

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1067974A (en) * 1911-11-06 1913-07-22 Int Precipitation Co Method of discharge of electricity into gases.
US2244278A (en) * 1940-03-01 1941-06-03 Research Corp Electrode for electric precipitators
US3631655A (en) 1970-01-02 1972-01-04 Buell Eng Co Multiple unit precipitator apparatus
US3768258A (en) * 1971-05-13 1973-10-30 Consan Pacific Inc Polluting fume abatement apparatus
DE2134576C3 (de) * 1971-07-10 1975-10-30 Metallgesellschaft Ag, 6000 Frankfurt Röhre n-NaBelektroabscheider
US4072477A (en) * 1972-05-11 1978-02-07 The Regents Of The University Of California Electrostatic precipitation process
US4232355A (en) 1979-01-08 1980-11-04 Santek, Inc. Ionization voltage source
US4247307A (en) * 1979-09-21 1981-01-27 Union Carbide Corporation High intensity ionization-wet collection method and apparatus
US4544382A (en) * 1980-05-19 1985-10-01 Office National D'etudes Et De Recherches Aerospatiales (Onera) Apparatus for separating particles in suspension in a gas
US4376637A (en) * 1980-10-14 1983-03-15 California Institute Of Technology Apparatus and method for destructive removal of particles contained in flowing fluid
US4695358A (en) * 1985-11-08 1987-09-22 Florida State University Method of removing SO2, NOX and particles from gas mixtures using streamer corona
US4735633A (en) * 1987-06-23 1988-04-05 Chiu Kin Chung R Method and system for vapor extraction from gases
US5199257A (en) * 1989-02-10 1993-04-06 Centro Sviluppo Materiali S.P.A. Device for removal of particulates from exhaust and flue gases
DE4123617C2 (de) * 1991-07-17 1995-07-06 Metallgesellschaft Ag Vorrichtung zum Transport von Stoffen
GB9220975D0 (en) 1992-10-06 1992-11-18 Air Prod & Chem Apparatus for supplying high purity gas
SE9400110L (sv) 1994-01-17 1995-07-18 Tl Vent Ab Luftreningsapparat
DE19524214A1 (de) * 1995-07-03 1997-01-09 Abb Research Ltd Elektrofilter
US5707428A (en) 1995-08-07 1998-01-13 Environmental Elements Corp. Laminar flow electrostatic precipitation system
CN1208840A (zh) * 1997-06-18 1999-02-24 船井电机株式会社 具有空气净化功能的空调装置及用于该装置中的电集尘器
FI108992B (fi) * 1998-05-26 2002-05-15 Metso Paper Inc Menetelmä ja laite hiukkasten erottamiseksi ilmavirrasta
JP2000133494A (ja) * 1998-10-23 2000-05-12 Mitsubishi Heavy Ind Ltd マイクロ波プラズマ発生装置及び方法
US6224653B1 (en) * 1998-12-29 2001-05-01 Pulsatron Technology Corporation Electrostatic method and means for removing contaminants from gases
US6228149B1 (en) * 1999-01-20 2001-05-08 Patterson Technique, Inc. Method and apparatus for moving, filtering and ionizing air
US6436170B1 (en) * 2000-06-23 2002-08-20 Air Products And Chemical, Inc. Process and apparatus for removing particles from high purity gas systems

Also Published As

Publication number Publication date
EP1166881A2 (de) 2002-01-02
TW510821B (en) 2002-11-21
EP1166881B1 (de) 2006-03-08
JP3704061B2 (ja) 2005-10-05
EP1166881A3 (de) 2002-11-20
KR100431973B1 (ko) 2004-05-22
US6436170B1 (en) 2002-08-20
US20020178911A1 (en) 2002-12-05
US6517608B2 (en) 2003-02-11
DE60117639T2 (de) 2007-02-01
KR20020001563A (ko) 2002-01-09
SG142145A1 (en) 2008-05-28
ATE319519T1 (de) 2006-03-15
JP2002066377A (ja) 2002-03-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee