DE60106838D1 - Solvent mixture for use in removing high purity precursors - Google Patents
Solvent mixture for use in removing high purity precursorsInfo
- Publication number
- DE60106838D1 DE60106838D1 DE60106838T DE60106838T DE60106838D1 DE 60106838 D1 DE60106838 D1 DE 60106838D1 DE 60106838 T DE60106838 T DE 60106838T DE 60106838 T DE60106838 T DE 60106838T DE 60106838 D1 DE60106838 D1 DE 60106838D1
- Authority
- DE
- Germany
- Prior art keywords
- high purity
- manifold
- source chemical
- solvent
- purity source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002243 precursor Substances 0.000 title 1
- 239000011877 solvent mixture Substances 0.000 title 1
- 239000000126 substance Substances 0.000 abstract 7
- 239000002904 solvent Substances 0.000 abstract 4
- 238000010926 purge Methods 0.000 abstract 2
- 238000004140 cleaning Methods 0.000 abstract 1
- 239000011261 inert gas Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 238000013022 venting Methods 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
- B08B9/0321—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
- C11D7/5018—Halogenated solvents
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
- C11D7/5027—Hydrocarbons
-
- C11D2111/44—
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/24—Hydrocarbons
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Detergent Compositions (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Chemical Vapour Deposition (AREA)
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Weting (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The present invention is a process for cleaning a manifold which delivers high purity source chemical from a high purity source chemical container to a point of use after delivery of the high purity source chemical through the manifold is discontinued, comprising; evacuating the manifold by connection to a source of vacuum, terminating the evacuation, introducing at least one solvent for the high purity source chemical into the manifold from at least one source of the at least one solvent, dissolving any residual high purity source chemical in the manifold into the at least one solvent, venting a resulting mixture of residual high purity source chemical and solvent from the manifold, purging such as by pressurizing the manifold by connection to a source of preferably elevated pressure inert gas and terminating the purging i.e. pressurizing, before reintroducing high purity source chemical into the manifold.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US67643700A | 2000-09-29 | 2000-09-29 | |
| US676437 | 2000-09-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60106838D1 true DE60106838D1 (en) | 2004-12-09 |
| DE60106838T2 DE60106838T2 (en) | 2005-04-14 |
Family
ID=24714510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60106838T Expired - Fee Related DE60106838T2 (en) | 2000-09-29 | 2001-09-28 | Solvent mixture for use in the removal of high purity precursors |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP1193309B1 (en) |
| JP (1) | JP2002219432A (en) |
| KR (1) | KR100408736B1 (en) |
| AT (1) | ATE281510T1 (en) |
| DE (1) | DE60106838T2 (en) |
| TW (1) | TW486392B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7041609B2 (en) | 2002-08-28 | 2006-05-09 | Micron Technology, Inc. | Systems and methods for forming metal oxides using alcohols |
| US7112485B2 (en) | 2002-08-28 | 2006-09-26 | Micron Technology, Inc. | Systems and methods for forming zirconium and/or hafnium-containing layers |
| US6958300B2 (en) * | 2002-08-28 | 2005-10-25 | Micron Technology, Inc. | Systems and methods for forming metal oxides using metal organo-amines and metal organo-oxides |
| TWI258768B (en) | 2004-03-10 | 2006-07-21 | Samsung Electronics Co Ltd | Sense amplifier and method for generating variable reference level |
| US8129577B2 (en) | 2008-09-16 | 2012-03-06 | Air Products And Chemicals, Inc. | Process and system for providing acetylene |
| DE102014206875A1 (en) * | 2014-04-09 | 2015-10-15 | Wacker Chemie Ag | Process for cleaning technical parts of metal halides |
| JP6935330B2 (en) * | 2015-09-30 | 2021-09-15 | 芝浦メカトロニクス株式会社 | Substrate processing equipment and substrate processing method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5401429A (en) * | 1993-04-01 | 1995-03-28 | Minnesota Mining And Manufacturing Company | Azeotropic compositions containing perfluorinated cycloaminoether |
| WO1995032274A1 (en) * | 1994-05-19 | 1995-11-30 | Ag Technology Co., Ltd. | Mixed solvent composition |
| US5964230A (en) * | 1997-10-06 | 1999-10-12 | Air Products And Chemicals, Inc. | Solvent purge mechanism |
-
2001
- 2001-09-24 TW TW090123509A patent/TW486392B/en not_active IP Right Cessation
- 2001-09-28 JP JP2001300498A patent/JP2002219432A/en active Pending
- 2001-09-28 EP EP01122661A patent/EP1193309B1/en not_active Expired - Lifetime
- 2001-09-28 KR KR10-2001-0060572A patent/KR100408736B1/en not_active IP Right Cessation
- 2001-09-28 AT AT01122661T patent/ATE281510T1/en not_active IP Right Cessation
- 2001-09-28 DE DE60106838T patent/DE60106838T2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP1193309B1 (en) | 2004-11-03 |
| ATE281510T1 (en) | 2004-11-15 |
| DE60106838T2 (en) | 2005-04-14 |
| JP2002219432A (en) | 2002-08-06 |
| KR100408736B1 (en) | 2003-12-11 |
| KR20020025820A (en) | 2002-04-04 |
| TW486392B (en) | 2002-05-11 |
| EP1193309A1 (en) | 2002-04-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |