ATE281510T1 - SOLVENT MIXTURE FOR USE IN THE REMOVAL OF HIGHLY PURE PRECURSORS - Google Patents

SOLVENT MIXTURE FOR USE IN THE REMOVAL OF HIGHLY PURE PRECURSORS

Info

Publication number
ATE281510T1
ATE281510T1 AT01122661T AT01122661T ATE281510T1 AT E281510 T1 ATE281510 T1 AT E281510T1 AT 01122661 T AT01122661 T AT 01122661T AT 01122661 T AT01122661 T AT 01122661T AT E281510 T1 ATE281510 T1 AT E281510T1
Authority
AT
Austria
Prior art keywords
manifold
high purity
source chemical
solvent
purity source
Prior art date
Application number
AT01122661T
Other languages
German (de)
Inventor
Robert Sam Zorich
Xinjian Lei
David James Silva
Cynthia Lee Trent
Original Assignee
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Prod & Chem filed Critical Air Prod & Chem
Application granted granted Critical
Publication of ATE281510T1 publication Critical patent/ATE281510T1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
    • B08B9/027—Cleaning the internal surfaces; Removal of blockages
    • B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
    • B08B9/027—Cleaning the internal surfaces; Removal of blockages
    • B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
    • B08B9/0321—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
    • C11D7/5004—Organic solvents
    • C11D7/5018—Halogenated solvents
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
    • C11D7/5004—Organic solvents
    • C11D7/5027—Hydrocarbons
    • C11D2111/44—
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/24—Hydrocarbons

Abstract

The present invention is a process for cleaning a manifold which delivers high purity source chemical from a high purity source chemical container to a point of use after delivery of the high purity source chemical through the manifold is discontinued, comprising; evacuating the manifold by connection to a source of vacuum, terminating the evacuation, introducing at least one solvent for the high purity source chemical into the manifold from at least one source of the at least one solvent, dissolving any residual high purity source chemical in the manifold into the at least one solvent, venting a resulting mixture of residual high purity source chemical and solvent from the manifold, purging such as by pressurizing the manifold by connection to a source of preferably elevated pressure inert gas and terminating the purging i.e. pressurizing, before reintroducing high purity source chemical into the manifold.
AT01122661T 2000-09-29 2001-09-28 SOLVENT MIXTURE FOR USE IN THE REMOVAL OF HIGHLY PURE PRECURSORS ATE281510T1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US67643700A 2000-09-29 2000-09-29

Publications (1)

Publication Number Publication Date
ATE281510T1 true ATE281510T1 (en) 2004-11-15

Family

ID=24714510

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01122661T ATE281510T1 (en) 2000-09-29 2001-09-28 SOLVENT MIXTURE FOR USE IN THE REMOVAL OF HIGHLY PURE PRECURSORS

Country Status (6)

Country Link
EP (1) EP1193309B1 (en)
JP (1) JP2002219432A (en)
KR (1) KR100408736B1 (en)
AT (1) ATE281510T1 (en)
DE (1) DE60106838T2 (en)
TW (1) TW486392B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7041609B2 (en) 2002-08-28 2006-05-09 Micron Technology, Inc. Systems and methods for forming metal oxides using alcohols
US7112485B2 (en) 2002-08-28 2006-09-26 Micron Technology, Inc. Systems and methods for forming zirconium and/or hafnium-containing layers
US6958300B2 (en) * 2002-08-28 2005-10-25 Micron Technology, Inc. Systems and methods for forming metal oxides using metal organo-amines and metal organo-oxides
TWI258768B (en) 2004-03-10 2006-07-21 Samsung Electronics Co Ltd Sense amplifier and method for generating variable reference level
US8129577B2 (en) 2008-09-16 2012-03-06 Air Products And Chemicals, Inc. Process and system for providing acetylene
DE102014206875A1 (en) * 2014-04-09 2015-10-15 Wacker Chemie Ag Process for cleaning technical parts of metal halides
JP6935330B2 (en) * 2015-09-30 2021-09-15 芝浦メカトロニクス株式会社 Substrate processing equipment and substrate processing method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5401429A (en) * 1993-04-01 1995-03-28 Minnesota Mining And Manufacturing Company Azeotropic compositions containing perfluorinated cycloaminoether
WO1995032274A1 (en) * 1994-05-19 1995-11-30 Ag Technology Co., Ltd. Mixed solvent composition
US5964230A (en) * 1997-10-06 1999-10-12 Air Products And Chemicals, Inc. Solvent purge mechanism

Also Published As

Publication number Publication date
EP1193309B1 (en) 2004-11-03
DE60106838T2 (en) 2005-04-14
DE60106838D1 (en) 2004-12-09
JP2002219432A (en) 2002-08-06
KR100408736B1 (en) 2003-12-11
KR20020025820A (en) 2002-04-04
TW486392B (en) 2002-05-11
EP1193309A1 (en) 2002-04-03

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties